Leica EM ACE600 Operating Manual page 58

High vacuum sputter coater
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1. Preconditions to be completed, details visible when tapping on it (see
below), turns green when done
2. Protocol which is performed: details visible when tapping on it (see below),
turns yellow when in progress
3. 'Venting after coating' is activated or deactivated. Can be changed at any
time
4. Status bar indicating what the instrument is doing at the moment
5. Summary of the actual process status
a. Status (either idle, process or venting)
b. Time since start button was pushed, value in brackets: time since protocol
started (yellow box (2) )
c. Current sputtering rate
d. Accumulated thickness
6. Stopping the process at any time after confirming to stop
When the sputtering vacuum is reached and stabilized, the high voltage switches
on and the plasma starts.
Hint, in case vacuum cannot stabilized or plasma is not stable check if the
argon line is open.
Preconditions details when clicking on the box
Operating Manual Leica EM ACE600
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1
2
a
b
Version 06/15
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c
5
d
6
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