Leica EM ACE600 Manuals

Leica EM ACE600 Manuals

Manuals and User Guides for Leica EM ACE600. We have 2 Leica EM ACE600 manuals available for free PDF download: Operating Manual

Leica EM ACE600 Operating Manual

Leica EM ACE600 Operating Manual (146 pages)

High Vacuum Sputter Coater

Brand: Leica | Category: Laboratory Equipment | Size: 4 MB

Table of Contents

Table of Contents
6
1 Introduction

9
- Safety
  10
- Instrument Overview
  12
2 Installation and Set up

13
- Delivery of the Instrument
  13
- Installation Requirements
  13
- Unpacking and Connection
  14
- Inserting Chamber Shielding
  18
- Shutter Installation
  22
- Quartz Crystal Measurement Installation
  24
- Stage Installation
  27
- Eccentric Quartz Holder
  31
3 Operation

33
- Touch Screen Control Panel
  33
  - Settings
    34
  - Menu
    35
  - File Handling
    36
  - Software Update
    37
- Pump and Vent
  38
- Vacuum Test
  39
- Process Start and Stop
  39
- Vent after Process
  40
- Thickness Monitoring and Geometrical Correction (Qsg)
  40
- Carbon Thread Coating
  42
- Sputter Coating
  53
- Ebeam Coating
  62
- Carbon Rod Coating
  85
- Glow Discharge
  96
  - Choosing a Glow Discharge Protocol
    96
  - Running a Glow Discharge Process
    98
- Running a Sequence
  98
- Editing a Protocol or Sequence
  102
  - Editing a Carbon Thread Process
    102
  - Editing a Sputtering Process
    105
  - Editing an E Beam Process
    109
  - Editing a Carbon Rod Process
    112
  - Editing a Glow Discharge Process
    114
  - Editing a Sequence
    116
  - Manual Stage: Difference in User Interface and Set up
    118
- Defining a Coating Material
  119
  - Define a Carbon Thread
    120
  - Define a Sputter Target
    122
  - Define an E Beam Target
    123
  - Define a Carbon Rod Material
    124
4 Maintenance and Service

127
- General Instructions for Maintenance and Cleaning
  127
  - Source Cover
    128
- Cleaning of the Leica Em Ace600
  128
5 Troubleshooting

133
- Error Messages
  134
6 Servicing and Repair

141
7 Technical Data Sheet

142
8 Ec Declaration of Conformity

145

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Leica EM ACE600 Operating Manual

Leica EM ACE600 Operating Manual (132 pages)

Brand: Leica | Category: Laboratory Equipment | Size: 5 MB

Table of Contents

Table of Contents
6
1 Introduction

9
- Identification
  11
  - Product
    11
  - Name and Address of the Manufacturer
    11
2 Product Description

12
3 Installation and Set up

20
- Warranty
  20
- Instrument Overview
  21
- Delivery of the Instrument
  22
- Installation Requirements for the Instrument
  22
- Unpacking and Connection
  23
- Inserting Chamber Shielding
  27
- Shutter Installation
  31
- Quartz Crystal Measurement Installation
  33
  - Eccentric Quartz Holder
    35
- Stage Installation
  37
  - Rotating Stage
    40
4 Operating Instructions

42
- General Functions
  43
  - Software Update
    47
- Pump and Vent
  49
- Vacuum Test
  50
- Process Start and Stop
  50
- Thickness Monitoring and Geometrical Correction (QSG)
  50
- Carbon Thread Coating
  51
- Sputter Coating
  59
- E-Beam Coating
  66
- Carbon Rod Coating
  89
  - Loading a Carbon Rod
    90
  - Choosing a Carbon Rod Protocol
    96
  - Carbon Rod Materials
    99
- Glow Discharge
  100
  - Choosing a Glow Discharge Protocol
    100
- Sequence
  103
- Rotating Stage: Difference in User Interface and Set-Up
  107
- Running a Process
  108
- Load Lock
  111
5 Maintenance and Service

115
- General Instructions for Maintenance and Cleaning
  115
  - Source Cover
    116
- Cleaning of the Leica EM ACE600
  116
6 Troubleshooting

122

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