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Ulvac EGO-40M Instruction Manual

Multi-hearth electron beam source
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EB0018E-01
INSTRUCTION MANUAL
MULTI-HEARTH ELECTRON BEAM SOURCE
model：EGO-40M
2
nd
version 2023.08.01
ULVAC Inc.
※ Read this manual before operation this product
Keep this manual at your hand for immediate reference.

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  • Page 1 EB0018E-01 INSTRUCTION MANUAL MULTI-HEARTH ELECTRON BEAM SOURCE model：EGO-40M version 2023.08.01 ULVAC Inc. ※ Read this manual before operation this product Keep this manual at your hand for immediate reference.
  • Page 2 If this product is moved to other location, attach this manual to it. The contents of this manual are subject to change without notice for improvement. If you come up with any question or trouble, contact your local ULVAC representative or ULVAC,Inc. .
  • Page 3 MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION １．SAFTY CAUTIONS １ Most accidents are attributed to careless operation, inspection, maintenance or repair. Also failure to comply with safety cautions or predict potential danger is responsible for accidents. Accidents can be prevented by predicting a potentially dangerous situation at an early stage. ２...
  • Page 4 MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION ２．SAFETY DENOTATIONS Safety denotations are used throughout this manual and labeled on the product to call operator s attention to safety. Safety denotations are classified as follows. Failure to comply with this involves the possibility of impending death or serious personal injury.
  • Page 5 Before using the product, contact your local ULVAC representative or ULVAC Inc. to confirm the latest information. ULVAC products are warranted free from defects in material and workmanship for a period of twelve (12) months from the date of shipping. In addition, about the parts exchanged for repair, we will consider as possession of our company as long as there are no directions.
  • Page 6 MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION ４．IN CASE OF NOTICING ABNORMALITIES OF THE PRODUCT If you notice something wrong with the product, check the symptom and the failure with reference to the Troubleshooting in Section 7 of this manual. To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the trouble in order to repair the product as soon as possible.

  • Page 7: Table Of Contents

    MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ table of contents Table of contents １. FOR SAFETY OPERATION ................................. 1 １.１. CAUTION FOR HANDLING ............................. 1 １.２. CONTACT INFORMATION ............................. 1 ２. GENERAL DESCRIPTION ................................2 ２.１. INTRDUCTION ................................2 ２.２. CHARACTER ................................2 ２.３.

  • Page 8: For Safety Operation

    In case of water leakage, wipe up water and use the EB Gun after drying. １.２.CONTACT INFORMATION If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your local ULVAC representative, after confirming information of the product. In case of trouble, let us know the product information and trouble symptom and situation in detail as much as possible.

  • Page 9: General Description

    ２.１.INTRDUCTION The Model EGO-40M is a high-performance, high-reliability electron beam evaporation source, which is called EB Gun, developed and engineered for deposition of optical films by ULVAC’s advanced technology and expertise acquired over the past years. Advantages of the EB Gun include the following:...

  • Page 10: Configuration

    EARTH GUN GND CABLE INPUT EARTH GUN GND GROUND LOW IMPEDANCE FIRST CLASS 10Ω OR LESS INPUT CABLE Figure 1.1 Configuration of HPS-1000G and EGO-40M ２.４.SPECIFICATION Accelerating voltage -4 to -10 kVDC Emission current 1.0 A max. ( at -10 kV ) Maximum power input 10 kW at 40cc crucible 、...

  • Page 11: Preparation

    ３．PREPARATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３. PREPARATION The section describes necessary preparation and precaution before operation of the product. ３.１.UPPACKING ３.１.１. Caution for unpacking Carefully unpack the case containing an EB Gun. Prepare a clean room for inspecting an EB Gun. CAUTION Hold the EB Gun carefully not to drop it down when taking it out.
  • Page 12 ３．PREPARATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ Table 3.1 Standard accessories List Q’ty Item Specifications Part number Filament Tungsten, D=6 mm, L=10 mm 210004028000 Insulator D=12 mm, L=22 mm 210004028100 Insulation bushing OD=8 mm, ID=4 mm, L=3.5 mm 210004028200 Insulation spacer OD=10 mm, ID=6 mm, t=1 mm 210004029000 Filament setscrew...

  • Page 13: Installation Of Eb Gun

    9） Chamber close switch, 125 VAC, 0.5 A 10） Vacuum interlock switch, 125 VAC, 0.5 A ULVAC Model DTA-002 can be used. Interlocking can be done more effectively by using a filament power distribution or a meter relay of the ionization gauge.

  • Page 14: Installation Of Eb Gun

    EGO-40M, which weighs 18 kg. NOTE Because the weight of EGO-40M is 18kg, use gun base whose strength withstands the weight. If an exhaust port is located under the gun base, make a notch or a hole in the gun base so that the exhaust efficiency is not lowered.
  • Page 15 ３．PREPARATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ Installation of multiple EB guns Magnetic interference will occur if two or more EB guns are installed in proximity to each other. Magnetic interference will increase the beam size or deform the beam. In an extreme case, the beam cannot be deflected and may deflect out of the crucible.
  • Page 16 CAUTION The flow switch recommended by ULVAC uses a magnetic float, which may be deposited with iron powder. Periodically disassemble and clean it. The pressure switch has been so set that it is turned ON at 3 kg/cm and OFF at 2.5 kg/cm...

  • Page 17: Safeguards Against X－Rays (See Fig. 3-5.)

    X-rays are absorbed by the metal, but a small dose of X-rays may leak defending on the thickness of the gasket. X-rays can be harmful to the human body if exposed for a long time. For safety, ULVAC recommends the following methods.
  • Page 18 ３．PREPARATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ 250mm MINIMUM DISTANCE BETWEEN CENTER LINES EGO-40M ELECTRON BEAM GUNS 84mm MINIMUM DISTANCE BETWEEN GUNS Figure 3.1 Installation of multiple EB guns...
  • Page 19 ３．PREPARATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ION BEAM ELECTRON BEAM PLASMA GUN SHIELD SECONDARY ELECTRON SPUTTERING EVAPORATION FILAMENT HIGH VOLTAGE LEADS MATERIAL ELECTRON BEAM GUN GUN SHIELD HIGH VOLTAGE LEADS Figure 3.2 Sputtering mechanism and gun shield...
  • Page 20 ３．PREPARATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ FEEDTHROUGH COLLAR SOURCE PLATE ELECTRON BEAM GUN EGO-40M INLET OUTLET COPPER 8φ×10φmm WATER FEED THROUGH 1/2“ TUBE PRESSURE FLOW METER SWITCH WATER FLOW SWICTH INLET 10L/min minimum 1/2“ TUBE MAINTENANCE VALUE WATER OUTLET GUN WATER...
  • Page 21 ３．PREPARATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ FEEDTHROUGH COLLAR OR SOURCE PLATE AMP FASTON RECEPTACLE #170095-1 0.5 m㎡ POSITION OPTIONAL HEARTH SIGNAL POSITIONING ASSEMBLY COMMON EB GUN COPPER PLATE （30 x 0.31 mm） TO SYSTEM GROUND FROM EB POWER SUPPLY EARTH GUN GROUND SWEEP COIL ±...
  • Page 22 ３．PREPARATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ VIEW PORT LEADEN GLASS BELLJAR TARGET X RAY GASKET SUS304(SHIELD) Figure 3.5 X-ray shield...

  • Page 23: Operation

    ４．OPERATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M ４. OPERATION The section describes setting method and operation method of the product. And connection with each unit is also described in the section. ４.１.INSPECTION BEFORE OPERATION Be sure to check the following before power distribution. 1）...

  • Page 24: Operation Of Eb Gun

    ４．OPERATION MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M ４.２.OPERATION OF EB GUN Always observe the following items for operation of the EB Gun. Read an EB power supply instruction manual in conjunction. CAUTION １. Never turn ON power without charging the hearth with evaporant. ２.
  • Page 25 On application of high voltage, abnormal local discharge may occur, but it should decrease gradually. An ULVAC EB power supply is so designed that it automatically lowers high voltage if over-current is produced due to discharge, and high voltage is restored after discharge has ceased. If discharge does not stop, possible cause is inside the vacuum chamber.

  • Page 26: Disassembly And Reassembly Of Eb Gun

    ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ ５. DISASSEMBLY AND REASSEMBLY OF EB GUN This section describes precaution and method for disassemble and reassembly In disassembling or reassembling the EB Gun, be sure to wear clean gloves. Turn OFF the MAIN switch on the EB Gun power supply.
  • Page 27 ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ Figure 5.1 Emitter assembly dimensional drawing and electrode dimensional drawing...

  • Page 28: Method For Disassemble And Reassembly Of Eb Gun

    ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ ５.２.METHOD FOR DISASSEMBLE AND REASSEMBLY OF EB GUN Before removing the hearth and hearth deck, be sure to drain the water remaining in the hearth with air. Close the water feed valve of the EB Gun and close the valve on the water drain side. Water remains in the EB Gun and the cooling water piping.

  • Page 29: Cleaning Hearth Area

    ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ ５.３.CLEANING HEARTH AREA In daily operation, clean the hearth area from above the hearth deck, but some parts of the hearth are not accessible for cleaning. Remove the deck and magnetic pole in the top of the hearth by using the follwing procedure and clean all the four hearths.

  • Page 30: Adjustment Of Beam Daimeter

    ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ ５.４.ADJUSTMENT OF BEAM DAIMETER The beam diameter changes depending on the accelerating voltage of the EB Gun. With metal evaporant, better results can generally be obtained by reducing the beam diameter and with oxide and compound evaporants, by increasing the beam diameter.
  • Page 31 ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ 1) Adjustment of beam adjustment plate (See figure 5.2) The distance between the beam adjustment plates can be adjusted to 15 mm and 17 mm. Adjustment can be made by removing the screw that fixes the beam adjustment plate and the emitter mount.

  • Page 32: Installing Hearth Positioner

    ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ ５.５.INSTALLING HEARTH POSITIONER Hearth positioner is a crucible position transducer for driving with motor drive. Hearth positioner is a switch to close the contact by the roller, which is pressed against a side of the hearth by a spring, falling into a ditch for each crucible.

  • Page 33: Parts List

    ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ ５.６. PARTS LIST １ ） EGO-40M basic unit（ 1/2） No. PART NO. DESCRIPTION Q’TY EGO-40M EB GUN 1 式 200001726100 Base plate SUS304 200001720500 Cooling plate 200001720700 Side plate ,right...
  • Page 34 ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ EGO-40M basic unit（ 2/2） No. PART NO. DESCRIPTION Q’TY 200001726800 Housing SUS304 200000493200 Snap ring for hole SUS304 200000493300 Snap ring for shaft SUS304 200001726900 Hearth deck 210004015000 Hearth 200001727000...
  • Page 35 ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ Figure 5.3 Exploded view of EGO-40M...
  • Page 36 ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ 1） Emitter assembly PARTS NO. DESCRIPTION Q’TY 210004028900 Insulator mount Copper 210004026700 Sheild Copper 210004029600 Washer SUS304 210004026800 Emitter mount ,right Copper 210004026900 Emitter mount , left Copper 210004027000 Beam adjustment plate ,right...
  • Page 37 ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ Figure 5.4 Exploded view of Emitter assembly...
  • Page 38 ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ ３） Hearth Positioner PART No DESCRIPTION 200000603500 Switch cover SUS304 SUS304 200000502100 Base SUS304 200000502400 Pin(1) SUS304 200000502200 Mount SUS304 200000503000 Static contact 200000502700 Bush Fluorine 200000502600 Washer Fluorine SUS304...
  • Page 39 ５．ASSEMBLY AND DISASSEMBLY OF EBGUN MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～ Figure 5.5 Exploded view of Hearth positioner...

  • Page 40: Maintenance

    Take care not to burn yourself. If a hearth of EGO-40M is operated by a motor drive, take care so that hand is not caught in the device.

  • Page 41: Preventive Maintenance

    ６．MAINTENANCE MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ６.１.PREVENTIVE MAINTENANCE Turn OFF the three-phase input power of the EB power supply before making ｔhe following checks, except for items 1 through 3. Item Checks Frequency of check Remarks Daily Weekly Monthly Does the EB Gun flow switch turn ON and OFF at the specified flow rate? Here, does the GUN WATER Note 1.

  • Page 42: Periodical Inspection

    ６．MAINTENANCE MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ６.２.PERIODICAL INSPECTION Check the following after turning OFF the 3-phase power Table 6.2 Periodical inspection list Frequency of check Item Checks When Every Every Remarks installed 3 months year Is the feed-through ground terminal grounded with a ground resistance of not more than 10 ? Is the ground Note 7.
  • Page 43 ６．MAINTENANCE MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ NOTE Make functional check of the flow switch in the following way before starting the coater. Close the cooling water valve temporarily to check that the GUN WATER indicator goes out. Then slowly open the valve to feed water and check that the indicator lights when the flow rate exceeds the necessary minimum value mentioned in the EB Gun instruction manual.

  • Page 44: Troubleshooting

    7．TROUBLESHOOTING MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ７. TROUBLESHOOTING The section describes action on trouble. ７.１.TROUBLESHOOTING If trouble occurs, make an initial diagnosis with referring to table 6.1. If a trouble occurs simultaneously with that of the EB power supply, the symptom may differ from that described here.
  • Page 45 7．TROUBLESHOOTING MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ Table 6．1 Troubleshooting Trouble symptom Possible cause Corrective action 1. The filament does not light. A. Filament burnout a. Change the filament. The high voltage is normal. B. Poor contact or broken wire of the a.
  • Page 46 7．TROUBLESHOOTING MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ Trouble symptom Possible cause Corrective action 3. The beam spot is not visible in A. Poor adjustment of the EB power supply. a. Adjust the deflection coil current in accordance with the power supply the hearth.
  • Page 47 7．TROUBLESHOOTING MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ Trouble symptom Possible cause Corrective action 10. Water leak The vacuum gauge A. Defective seal for the hearth shaft. a. Replace the O-ring. needle deflects in the pressure b. Check the surface of the shaft seal for scar. If it is severely scarred, range of 10 when the hearth is replace the part.
  • Page 48 7．TROUBLESHOOTING MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ Trouble symptom Possible cause Corrective action 15. The evaporation rate decreases A. Oxidization of evaporant. a. Change evaporant. and is unstable. B. Increased ripple in the high voltage (5% a. Check if oscillation occurs in the high voltage circuit of the power supply. Apparently there is no change in p-p or more) See its instruction manual.

  • Page 49: Attached Materials

    8．ATTACHED MATERIALS MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ８. ATTACHED MATERIALS Following materials are attached with this manual. ・ EGO-40M outside drawing...
  • Page 50 8．ATTACHED MATERIALS MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ Figure 8.1 EGO-40M outside drawing...

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