Ulvac EGO-40M Instruction Manual page 31

５．ASSEMBLY AND DISASSEMBLY OF EBGUN
MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～
1) Adjustment of beam adjustment plate (See figure 5.2)
The distance between the beam adjustment plates can be adjusted to 15 mm and 17 mm.
Adjustment can be made by removing the screw that fixes the beam adjustment plate and the
emitter mount.
The emitter mount has two holes in it. The distance will be 15 mm if the adjustment plate is inserted
into the hole closer to the filament and 17 mm if it is inserted into the hole on the outer side. For
accurate adjustment, use the dimensional check jig.
17mm
15mm
Dimensional
check jig.
Beam adjustment plate
Figure 5.2 Beam diameter adjustment
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