Table Of Contents - Ulvac EGO-40M Instruction Manual

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～
１. FOR SAFETY OPERATION ......................................................................................................................................................... 1
１.１. CAUTION FOR HANDLING ..................................................................................................................................... 1
１.２. CONTACT INFORMATION ..................................................................................................................................... 1
２. GENERAL DESCRIPTION ............................................................................................................................................................ 2
２.１. INTRDUCTION ............................................................................................................................................................. 2
２.２. CHARACTER ................................................................................................................................................................ 2
２.３. CONFIGURATION ....................................................................................................................................................... 3
２.４. SPECIFICATION .......................................................................................................................................................... 3
３. PREPARATION ................................................................................................................................................................................ 4
３.１. UPPACKING .................................................................................................................................................................. 4
３.１.１. Caution for unpacking .................................................................................................................................................... 4
３.１.２. Check after Unpacking ................................................................................................................................................... 4
３.２. INSTALLATION OF EB GUN ................................................................................................................................. 6
３.２.１. Necessary Equipment ..................................................................................................................................................... 6
３.２.２. Installation of EB GUN ................................................................................................................................................... 7
３.３. SAFEGUARDS AGAINST X－RAYS (See Fig. 3-5.) ............................................................................... 10
４. OPERATION .................................................................................................................................................................................... 16
４.１. INSPECTION BEFORE OPERATION ................................................................................................................ 16
４.２. OPERATION OF EB GUN ...................................................................................................................................... 17
５. DISASSEMBLY AND REASSEMBLY OF EB GUN ........................................................................................................... 19
５.１. REPLACEMENT OF FILAMENT .......................................................................................................................... 19
５.２. METHOD FOR DISASSEMBLE AND REASSEMBLY OF EB GUN ....................................................... 21
５.３. CLEANING HEARTH AREA .................................................................................................................................. 22
５.４. ADJUSTMENT OF BEAM DAIMETER .............................................................................................................. 23
５.５. INSTALLING HEARTH POSITIONER ................................................................................................................ 25
５.６. PARTS LIST................................................................................................................................................................ 26
６. MAINTENANCE .............................................................................................................................................................................. 33
６.１. PREVENTIVE MAINTENANCE ............................................................................................................................ 34
６.２. PERIODICAL INSPECTION................................................................................................................................... 35
７. TROUBLESHOOTING .................................................................................................................................................................. 37
７.１. TROUBLESHOOTING ............................................................................................................................................. 37
８. ATTACHED MATERIALS ........................................................................................................................................................... 42

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