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Ulvac GI-M2 Instruction Manual

Metal ionization vacuum gauge
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METAL IONIZATION VACUUM GAUGE
MODEL GI-D7 / GI-N8
IONIZATION VACUUM GAUGE
INSTRUCTION MANUAL
This manual is for the ion gauges of serial numbers.
Read this manual carefully before using this gauge and
keep it at your hand for immediate reference.
2500 Hagisono, Chigasaki City, Kanagawa Prefecture, Japan 253-8543
MODEL GI-M2
GI-M2 ： S/N 32000G ～
GI-D7 ： S/N 32001G ～
GI-N8 ： S/N 30001G ～
Components Division,
ULVAC , Inc.
http://www.ulvac.co.jp/
SK00-7723-EI-003-08

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  • Page 1 MODEL GI-D7 / GI-N8 IONIZATION VACUUM GAUGE INSTRUCTION MANUAL This manual is for the ion gauges of serial numbers. GI-M2 ： S/N 32000G ～ GI-D7 ： S/N 32001G ～ GI-N8 ： S/N 30001G ～ Read this manual carefully before using this gauge and keep it at your hand for immediate reference.
  • Page 3 The copyright of this instruction manual is held by ULVAC, Inc. You are prohibited from copying any portion of this instruction manual without the consent of ULVAC Inc.
  • Page 4 If the gauge is damaged, immediately turn off the power. Otherwise, fire or electric shock can result. For safety reasons, contact your local ULVAC representative or ULVAC JAPAN. Turn off power. If the gauge gets unusually hot or gives out smoke, immediately turn off the power.
  • Page 5 Be cautious with operating environment. Do not use the gauge where it may splashed with water. If it is wetted, trouble, earth leakage or fire can result. Ensure ventilation. Do not plug the port for the fan and ventilation port. If it is plugged, heat will be contained inside, resulting in damage.
  • Page 6 Revision history Date Reason GI-D7：Analog Output of GI-TL3 Compatibility added Sep.11,2008 May.12,2009 Correction of errors Sep.15,2010 Added fuse type Jun.25,2012 Correction of errors GI-M2：Added LOG output Apr.5,2013 Sep.18,2013 Correction of errors GI-D7：Added Pressure protecting function switching Dec.2,2019...

  • Page 7: Table Of Contents

    Contents ..........28 UNCTION FEATURES OF GI-SERIES ....5 8.5. ETTING THE ENSITIVITY ACTOR SPECIFICATIONS AND ..........28 UNCTION COMPONENTS ........6 8.6. 1/2 .... 29 ETTING OF OINT 8.7. ELECTION OF ANGE HANGEOVER 2.1....6 TANDARD PECIFICATIONS ..........30 UNCTION 2.2.
  • Page 8 IGITAL UTPUT 17.2......86 ENSOR HEAD 10.3..63 XTERNAL ONTROL NPUT 17.2.1. Sensor head GI-M2 ....86 10.4. ETHOD OF XTERNAL 17.2.2. Sensor head GI-D7 ....87 ..........64 ONTROL 17.2.3. Sensor head GI-N8 ....88 10.5. (EXT-...
  • Page 9 Fig. 4-1 Installation of sensor head ....................14 Fig. 4-2 Reference drawing for mounting nude gauge to short tube ..........15 Fig. 4-3 Connection of controller (GI-M2) and sensor head ............16 Fig. 4-4 Conection of sensor head cable and GI-D7/N8 ...............16 Fig. 4-5 WIT connection .........................17 Fig.
  • Page 10 Table. 9-9 Measurement value outputs (GI-M2) .................49 Table. 9-10 Measurement value outputs ..................51 Table. 9-11 Measurement value outputs ..................53 Table. 9-12 Measurement value outputs ..................55 Table. 10-1 A list of EXT-I/O functions ...................59 Table. 13-1 Relative Sensitivity Factor of Ion Gauge for Each Gas with Respect to Nitrogen...

  • Page 11: Features Of Gi-Series

    The ionization gauge GI series consists of three following models. ①Metal Ionization Vaccum Gauge GI-M2 The Model GI-M2 is a hot cathode ionization vacuum gauge for pressure measurement that uses the M type sensor head, which is smaller than that of the predecessor model B-A type ionization gauge and consumes less power.

  • Page 12: Specifications And Components

    2.SPECIFICATIONS AND COMPONENTS 2.1.Standard Specifications Model GI-M2 metal Model GI-D7 ionization Model GI-N8 ionization Name ionization vacuum gauge vacuum gauge vacuum gauge Compatible 1 pc sensor head Mantissa part 3 digits, exponent part 2 digits digital display Pressure display □.□□ × 10□□...

  • Page 13: Standard Accessories

    Power ＡＣ１００±１０Ｖ ５０／６０Ｈｚ requirements Power 60VA 120VA 65VA consumption Fuse BS.SEMKO EWM 3.15A (Fuji Terminal Industry) (2 pc) Outside 240W × 380D × 99H (mm) dimensions Weight 5.8kg 5.6ｋｇ 5.7ｋｇ ※1） Pressure display can set that mantissa part 2 digits, exponent part 2 digits digital display (□.□□...

  • Page 14: Nomenclature And Functions Of Components

    3. NOMENCLATURE AND FUNCTIONS OF COMPONENTS 3.1. Operation Switch Fig. 3-1 Operation switch panel Name (Inscription) Function Pressing the top of the POWER switch turns on power and Power switch pressing the bottom turns it off. When the power is on, the ①...

  • Page 15: Front Panel Lamps

    REMOTE lamp Lit when the gauge is set in the REMOTE status by external ④ (REMOTE) control (external I/O, RS-232C). GI-M2: Lit when emission current is 10 µA. Emission state lamp GI-N8: Lit when emission current is 0.5 mA. ⑤ (10µA) GI-D7: Not used.

  • Page 16: Front Panelm

    3.3. Front Panel Measurement Value Display/Set Value Indicator Fig. 3-3 Front panel measurement value display/set value indicator Status Function Displays the pressure measurement When in the measurement mode value. ① When in the program set mode Displays the set value of each program.
  • Page 17 3.4. Rear Panel GI-M2 ５ １ ６ ３ ２ ７ GI-D7 ／ GI-N8 ５ １ ６ ３ ２ ７ Fig. 3-4 Rear panel Name (Inscription) Function Sensor connector Connector for connecting the sensor head cable. (multi- ① (SENSOR) core/coaxial compound cable)

  • Page 18: Ext-I/O Connector

    • Digital input common is 23, 24, 48, and 49. ＿ ＿＿ • of signal identification (e.g. ) indicates the LOW status (short, negative logic). □ ※１） Em-Hi： １ｍA(GI-M2)、５ｍA(GI-N8) 、 Em-Lo：10μA（GI-M2）、0.5mA(GI-N8) ※２） Use it only in GI-N8. ※３） As for REC-HOLD, GI-M2/GI-D7, X-RAY are functions in GI-N8.

  • Page 19: View When Theb

    5 of the external I/O connector or to the （ＨＰ４） internal ground. See page 59 ※１） Use it only in GI-M2. Turn it on at the time of tungsten filament use. ※2） When the factory shipment, it is set entirely by OFF.

  • Page 20: Installation

    I NSTALLATION Turn power. WARNING 4.1. Preliminary Operation 2 6 B ① Unpack the gauge and check quantities. (See page 7 for the accessories.) ② Check components to see if they are damaged. Beware of high temperature. 4.2. Installing the controller 2 7 B •...

  • Page 21: Installation Of Wib-N3、Win-N2/N3 （Gi-D7、Gi-N8

    4.3.3. Installation of WIB-N3、WIN-N2/N3 （GI-D7、GI-N8） If the nude gauge is used, use a pipe 39.7 mm or more in inside diameter. Contact of the filament with the outside wall of the pipe can be a cause of controller failure. ＵＦＣ－０７０ Flange Inside φ３９．７...

  • Page 22: Connection Of Controller (Gi-M2) And Sensor Head

    Sensor head cable (sensor head side) Fig. 4-3 Connection of controller (GI-M2) and sensor head Avoid installation in a place where temperature (above specified cable temperature) or humidity is high. The standard operating temperature for the sensor head cable is 150°C.

  • Page 23: Connection Of Sensor Head And Sensor Head Cable (Gi-D7/Gi-N8)

    4.4.3.Connection of sensor head and sensor head cable (GI-D7/GI-N8) Collector Display of electrode WIT socket type name Display of cable name （WIT） WIB pin socket type Fig. 4-5 WIT connection Sensor Sensor Electrode head name head name Cable name name （WIB）...
  • Page 24 Collector Display of electrode name WIN-G Display of cable name Shield WIN-G pin socket type Sensor Electrode head name Cable name name （WIN-G） Filament F１、F2 F1、F2 (One set with each 2) (2x２places) Glit G(２places) Only use 1place. Shield （Non sign） Ｓ...

  • Page 25: Flow Of Program Run

    5.FLOW OF PROGRAM RUN Turn off power To set sensitivity factor, set points 1 and 2, Check line range, degas, filament, recorder and baud voltage. rate, follow the instructions in Sections 8 and WARNIN Be cautious with higher. The initial setting can be made from the front panel or RS-232C.

  • Page 26: Starting Up Gauge (Supply Of Power)

    CAUTION pressure. ＰＯＷ－① portion in the left figure ○ lights. （GI-D7 dose not turn on Em-Lo/Ezm- Hi.） GI-M2 ] is displayed on the ０．００ －10 segment indicator. GI-D7 ・ SnS1(WIT) setting ] is displayed on the ０．００ －7 segment indicator.

  • Page 27: Front Panel Operation

    7.FRONT PANEL OPERATION 7.1. Filament ON/OFF ＭＥＳＵ－① The first press on the FIL key turns on the filament and a second press turns it off. When the filament is turned on, the segment indicator displays [ ＦＩＬ ｏｎ and the (MESU-② status) is set up. If the filament is on and the emission current is flowing normally, the lamp above the FIL key lights and...

  • Page 28: On/Off

    OFF mode or before the set time elapses. If DEGAS is turned off in the midway, the set time counts will be reset. ＤＥＧ－② GI-M2 / GI-D7 Pressure is displayed on the segment indicator during degassing, too (Example) Display in the left figure →...

  • Page 29: Degassing

    CAUTION: GI-M2 / GI-D7 Degassing can be performed in all measurable pressure ranges. If degassing is performed at a high pressure, the sensor head may be contaminated, contrary to your Pa (10 Torr). expectation. It is recommended to perform it at a pressure below 10 DEGAS can work even that the time of abnormality an emission electric current.

  • Page 30: X-Ray Function Only )

    7.4. X-Ray Function ON/OFF (GI-N8 Only) →Refer to P.57 ＵＮＤＲ－① Holding down the F1 key for two seconds turns on the X-Ray action. A second press on the key (for two seconds or more) turns off the X-Ray action. The lamp above the F1 key lights when the X-Ray action is actuated.

  • Page 31: Setting

    8.SETTING 8.1.Setting operation To set sensitivity factor, set points, range changeover, degassing, filament, recorder output and baud rate, make settings according to the explanations in 8.1 and higher. These settings can be entered from the front panel or through the communication RS- 232C.

  • Page 32: Initial Setting

    8.2.INITIAL SETTING Table. 8-1 Factory Set Values Set value Mode GI-M2 GI-D7 GI-N8 Not used SnS 1 Not used Sensor head setting SEn (1) 6.00 -2 8.00 -2 1.53 -1 Sensitivity factor set value SEt-1 1.00 -0 5.00 -3 1.00 -3...

  • Page 33: Selection O F Sensor

    8.3.Selection Of Sensor Head（GI-D7 Only） Choose the kind of the sensor head to use. The set point as follows. ＳｎＳ：１ ⇒ ＷＩＴ ＳｎＳ：２ ⇒ ＷＩＢ ＳＮＳ－① The ○ portion in the left figure blinks after the segment indicator displays [ Ｓｎ...

  • Page 34: Selecting Thes

    8.4.Selecting the Sensitivity Factor Function → Refer to Ｐ．35 Set a sensitivity factor. The set point as follows. GI-M2 GI-D7 GI-N8 ＳＥｎ：１ ＳＥｎ：２ Any value Any value Any value ＳＥｎ：３ ＳＥＮＳ－① The ○ portion in the left figure blinks after the segment indicator displays [ ＳＥｎ...

  • Page 35: Setting Of Set Point 1/2

    8.6.Setting of Set Point 1/2 → Refer to Ｐ．37 Setting of set point 1/2. The set point as follows. GI-M2 GI-D7 GI-N8 WIT selection ６．７９×１０ －１ ～ －５ １．００×１０ Setiing ９．９９×１０ －０ ～ ６．６０×１０ －１ ～ range －８ －９ ５．００×１０...

  • Page 36: Selection Of Range Cunction

    ] selected, to transfer control to ｎ ＿２ the DGS-① status. 8.8. Setting of Range HOLD → Refer to Ｐ．38 Setting of range HOLD. The set point as follows. GI-M2 GI-D7 GI-N8 Setting －０ ～ －８ －１ ～ －７ －１ ～ －９...

  • Page 37: Setting Of Degas F

    8.9. Selection Of DEGAS Function → Refer to Ｐ．39 Setting of DEGAS function ｄＧＳ：１ ⇒ ＭＡＮＵＡＬ MODE ｄＧＳ：２ ⇒ ＡＵＴＯ MODE ＤＧＳ－① The ○ portion in the left figure blinks after the segment indicator displays [ ｄ ] for about 1 second. Each ＧＳ...

  • Page 38: Setting Of Filament 1/2

    8.11. Setting of Filament 1/2 → Refer to Ｐ．40 Select filament 1 or 2. ＦＩＬ：１ ⇒ Filament １ ＦＩＬ：２ ⇒ Filament ２ ＦＩＬ－① The ○ portion in the left figure blinks after the segment indicator displays [ ＦＩ ] for about 1 second. Each time Ｌ...

  • Page 39: Selection Of Analog Unction

    8.12.Selection of Analog Function → Refer to Ｐ．41 Setting of analog function. The set point as follows. GI-M2 GI-D7 GI-N8 Eeach-digit linear output mode ｒＥＣ：１ Pseudo-logarithmic mode ｒＥＣ：２ Range hold liniea mode ｒＥＣ：３ logarithmic mode GI-D6 compatibility output mode Not used ｒＥＣ：４...

  • Page 40: Setting Of Activatedf

    8.14.Setting of Activated Filament（GI-N8 only） → Refer to Ｐ．34 Here, the filament activating action is set. Filament activating action invalid (OFF) : Act_1 Filament activating action valid (ON) : Act_2 Ａｃｔ－① The ○ portion in the left figure blinks. Each time the [∆] key is pressed, the numeric value of the blinking portion changes [・・⇒１⇒２⇒１⇒・・].

  • Page 41: Functions

    "Sensitivity" referred to here is the total sensitivity obtained by multiplying the sensitivity constant (K) of the ULVAC sensor head (M type) for nitrogen by the relative sensitivity (Srj) for various types of gases, where the sensitivity for nitrogen is given as 1.

  • Page 42: Values

    9.1.4.Example for sensitivity set values The list of the calculation result :Sensitivity of sensor head Srj(N ) × relative sensitivity Ｓｒｊ Table. 9-1 Sensitivity Factor Reference GI-M2 ： 0.06 Pa －１ Input Input Molecule Input value Molecule Molecule value value 1.33E-02...

  • Page 43: Set Point

    In the case of 3-digits display, the set point value is entered in the form of . × 10 In the case of 2-digits display, the set point value is entered in the form of . × 10 The settable values are as follows: GI-M2 GI-D7 GI-N8 WIT selection －１...

  • Page 44: Setting Of Range Changeover

    9.3.2. Setting of range hold The range hold value is entered in the form of ×10 The settable values are as follows: GI-M2 GI-D7 GI-N8 Setting －０ ～ －８...

  • Page 45: Ｄｅｇａｓ

    9.4.1. What is DEGAS? "DEGAS" means dissociating the molecules adsorbed to the sensor head electrode, by heat. By a model, there are two kinds of methods. GI-M2／GI-D7 Molecules adsorbed to the sensor head electrode are released by heating. GI-N8 This gauge uses the electron bombardment system for degassing.

  • Page 46: Instructions In Degas

    9.4.6.Instructions in DEGAS GI-M2／GI-D7 The whole DEGAS movement operates a pressure measurement, too. There is the case that pressure rise by DEGAS occurs by the state of the measurement head, pressure at the movement. As a result, ON/OFF of the set point output varies with it.When the pressure protection is activated, [...

  • Page 47: Changeover Of Analogo

    The value entered last will be saved from front panel or RS-232C. REC - HOLD setting from external IO (GI-M2 / GI-D7) While it is input by IO, it is set by REC-HOLD.

  • Page 48: Lin Output In Each Status

    9.6.3.LIN output in each status It outputs a same value voltage of mantissa of pressure display value. The output voltage has hysteresis by the pressure that increased and the pressure that decreased. In the linear mode, this cannot be identified if the range differs because the output is propotional only to the mantissa part.

  • Page 49: Pseudo-Log Output

    0 to 10 volts. The output voltage has hysteresis by the pressure that increased and the pressure that decreased. The table below gives the relationship between pressure and output voltage. GI-M2 Pseudo-LOG OUTPUT Table. 9-3 Measured Pressure Value Table (GI-M2) Displayed pressure Output voltage Displayed pressure...
  • Page 50 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01 Pressure (Pa) Fig. 9-2 Supplementary explanation of output voltage (GI-M2) The measurement output voltage can be converted to a pressure value using the following equation. P:Pressure value （Torr） V:Measured output voltage （V）...
  • Page 51 GI-Ｄ７ Pseudo-LOG OUTPUT Table. 9-5 Measured Pressure Value Table (GI-D7) Displayed pressure Output voltage Displayed pressure Output voltage value (Pa) value (Pa) 6.70x10 6.67 5.00x10 3.50 1.00x10 6.10 1.00x10 3.10 5.00x10 5.50 5.00x10 2.50 1.00x10 5.10 1.00x10 2.10 5.00x10 4.50 5.00x10 1.50 1.00x10...
  • Page 52 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 Pressure (Pa) Fig. 9-3 Supplementary explanation of output voltage (GI-D7) The measurement output voltage can be converted to a pressure value using the following equation. P: Pressure value （Torr） V: Measured output voltage （V）...
  • Page 53 GI-Ｎ８ Pseudo-LOG OUTPUT Table. 9-7 Measured Pressure Value Table (GI-N8) Displayed pressure Output voltage Displayed pressure Output voltage value (Pa) value (Pa) 9.66 5.10 6.60×10 1.00×10 9.10 4.50 1.00×10 5.00×10 8.50 4.10 5.00×10 1.00×10 8.10 3.50 1.00×10 5.00×10 7.50 3.10 5.00×10 1.00×10 7.10...

  • Page 54: (Rec-Hold)

    9.6.5. Range Hold Linear Output (REC-HOLD) As in the LIN mode, the mantissa part 3-digits display A. BC and 2-digits display A. BG are outputted as A. BC [V] and A. BG [V] respectively, but above the specified range of REC-HOLD, it is outputted as FULL (10 V) and, below the specified range, the action is the same as when range hold is activated in the LIN range.

  • Page 55: Logarithmic Output (Gi-M2)

    Voltage values on order of several mV are low in accuracy because the ✔ Note recorder output is 12-bit DAC. The table below gives the relationship between pressure and output voltage. Table. 9-9 Measurement value outputs (GI-M2) Displayed pressure Output voltage Displayed pressure...
  • Page 56 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01 Pressure (Pa) Fig. 9-6 LOG output...

  • Page 57: Gi-D6 Compatibility Output （Gi-D7 Only

    9.6.7.GI-D6 Compatibility output （GI-D7 Only） The table below gives the relationship between pressure and output voltage. When chose WIT Table. 9-10 Measurement value outputs Displayed pressure Output voltage Displayed pressure Output voltage value (Pa) value (Pa) 9.99x10 4.99 1.00x10 1.10 1.00x10 4.10 5.00x10...
  • Page 58 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 Pressure (Pa) Fig. 9-7 GI-D6 Compatibility output (WIT) The measurement output voltage can be converted to a pressure value using the following equation. P: Pressure value （Torr） V: Measured output voltage （V） E: V from which decimal point is rounded down （V）...
  • Page 59 When chose ＷＩＢ Table. 9-11 Measurement value outputs Displayed pressure Output voltage Displayed pressure Output voltage value (Pa) value (Pa) 2.00x10 5.20 1.00x10 2.10 1.00x10 5.10 5.00x10 1.50 5.00x10 4.50 1.00x10 1.10 1.00x10 4.10 5.00x10 0.50 5.00x10 3.50 1.30x10 0.13 1.00x10 3.10 5.00x10...
  • Page 60 The measurement output voltage can be converted to a pressure value using the following equation. P: Pressure value （Torr） V: Measured output voltage （V） E: V from which decimal point is rounded down （V） P=10(V-E)×10 -(6-E) （Torr） 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03...

  • Page 61: Gi-Tl3 Compatibility Output （Gi-D7 Only

    9.6.8.GI-TL3 Compatibility output （GI-D7 Only） The table below gives the relationship between pressure and output voltage. Table. 9-12 Measurement value outputs Displayed pressure Output voltage Displayed pressure Output voltage value (Pa) value (Pa) 6.00x10 9.56 2.00x10 4.60 4.00x10 9.20 1.00x10 4.00 2.00x10 8.60...
  • Page 62 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 Pressure (Pa) Fig. 9-9 LOG output P: Pressure value （Torr） V: Measured output voltage （V） P=10 (V/2-7) （Torr） 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 Pressure (Torr)

  • Page 63: X-Ray Function

    9.7. X-Ray Function （GI-N8 Only） The X-Ray function can hold the background error of the ionic current value (pressure signal) due to soft X-rays. 9.7.1.What is X-Ray mode setting? Holding down the F1 key for two seconds or more turns ON X-Ray. A second press (two seconds or more) on the key turns OFF X-Ray.

  • Page 64: Filament Activation Only

    9.8.Filament Activation（GI-N8 Only） 9.8.1.Actuating conditions When the filament of a nude gauge (WIN-N type) is replaced, the filament is activated to activate the oxide coated on the filament. (If the filament is supplied as mounted on the sensor head, this step is not required because it has been factory treated.) 9.8.2.Operation Install the sensor head to the pumping system and make sure using another vacuum...

  • Page 65: External Inputs/Outputs

    10. EXTERNAL INPUTS/OUTPUTS Signals are exchanged with outside through the EXT-I/O connector on the rear panel, except through RS-232C. Table. 10-1 A list of EXT-I/O functions Termi Terminal Signal identification Signal contents direction ＳＥＴ１ ＣＯＭ １ Relay output ＳＥＴ１ ａ contact ２...
  • Page 66 ４１ ON( effective )/OFF(Invalidity) of the IO ＿＿＿＿＿＿ control input ＬＯＣＡＬ／ ＲＥＭＯＴＥ ４２ Regular ON input is necessary at the time of the IO control. ＿＿ FILAMENT ／ OFF A control input of the filament lighting ４３ ＿＿＿ A control input of the emission current EMISSION E m-Hi...

  • Page 67: Set Point Output

    However, it is recommended to use it at (SET2) below 24 VDC so as not to bring the noise b contact source into the GI-M2 gauge (for safety of 3(28) the connector wiring). Fig. 10-1 Set point internal circuit ＡＣ：１２５Ｖ...
  • Page 68 The measured output value is outputted by the BCD code. The relationship between the displayed value and the output data is as shown below. In the mantissa part 3-digits display, the 2nd digit of the decimal point is not outputted (truncated).

  • Page 69: External Control

    ①When 5V internal power supply is used The setting is jumper setting of HP3. Connect the ANALOG terminal or DIGITAL GND terminal (23, 24, 48, 49) and each signal by means of a relay contact or open collector. GI-M2/D7/N8 ”HP3" １９：EXT-5V（IN) 20：EXT-24V（IN) 2kΩ...

  • Page 70: Method Of E Control

    10.4.Method of External Control For external control, follow the time chart in Fig. 10-5. ① Before external operation, select the REMOTE mode. ② Then perform filament ON/OFF and DEGAS ON/OFF operation in that order. However, DEGAS is not turned ON unless the filament is ON. ③...

  • Page 71: How To Use Communication (Rs-232C)

    ３ Ground for signal (GND) ５ 11.1.3.2.Connecting the communication cable This gauge does not come with the RS-232C communication cable. Use a commercially available RS-232C cable (cross type). Host computer GI-M2 side side Pin No. Pin No. ２ ２ ３...

  • Page 72: List Of Commands

    ‘OK’ or ‘NG’ － Selects analog ″REC-HOLD″ ‘LH’ ‘OK’ or ‘NG’ － ‘L4’ ‘OK’ or ‘NG’ Selects Analog “LOG output” (GI-M2) － ‘L6’ ‘OK’ or ‘NG’ Selects Analog “GI-D6 compatibility output” (GI-D7) － ‘L3’ ‘OK’ or ‘NG’ Selects Analog “GI-TL3 compatibility output” (GI-D7) －...

  • Page 73: Explanation Ofc

    Explanation of function ‘GS’ ‘GI- ’ Reads control status － Send back the model (the model name). Send back ‘GI-M2’、 ‘GI-D7’ 11.4.3. Control of filament → Refer to Ｐ．40 Command Parameter Response Explanation of function ‘FO’ ‘OK’ or ‘NG’ Turns OFF filament －...

  • Page 74: Reading The Emission Valid

    ‘OK’ or ‘NG’ Selects analog “Pseudo-LOG” － ‘LH’ ‘OK’ or ‘NG’ Selects analog “REC-HOLD” － ‘L4’ ‘OK’ or ‘NG’ Selects analog “LOG” (GI-M2) － Selects analog “GI-D6” compatibility output ” (GI- ‘L6’ ‘OK’ or ‘NG’ － Selects analog “GI-TL3” compatibility output ”...

  • Page 75: Pressure Value And Action Status

    11.4.9. Reading the measured pressure value and action status Command Parameter Response Explanation of function X.XXE-XX ‘RP’ ‘ ’ Reads measured pressure data － ‘PR’ ‘ON’ or ‘OF’ Reads EXT-PROTECT status － XXXXXXX ‘RS’ ‘ ’ Reads action status Send back `0.00E-XX ` for a ,` RP' command in filament OFF. The `PR' command send back in an input state of EXT-PROTECT of IO.

  • Page 76: Troubleshooting

    Disconnection or short has occurred in the power line is disconnected. in the controller (inline filter, wiring, power switch, transformer, switching power supply, etc.) Contact ULVAC for inspection and repair. Trouble has occurred in the Element in the controller was damaged by erroneous controller due to erroneous wiring of the wire to the external I/O connector.
  • Page 77 ● Pressure cannot be measured by turning ON the filament.(The [FIL]lamp on the front panel is blinking.) Possible cause Corrective action The emission current value is not Examine the real cause from other items. normal. →Ｐ．78 Check the wiring between the filament and electrode for The filament has blown out.
  • Page 78 ● Pressure cannot be measured with the filament turned ON.(The [FIL] lamp on the panel is lit.) Possible cause Corrective action Check insulation between the electrodes of the sensor Insulation between the electrodes head and between the electrodes and the outside wall of the sensor head has failed.
  • Page 79 ● Measured pressure differs largely from expected value. Possible cause Corrective action Sensor head cable has blown out Check insulation between electrodes of the sensor or insulation has failed, resulting head. Also check continuity using a circuit tester. in leakage current. (See page 89～.) Note: After making insulation test of the ion collector line (coaxial contact) by a Megger, short the...
  • Page 80 ● Measurement value drifts. Possible cause Corrective action Sensor head is contaminated or Change the sensor head with another one and check sensitivity lowered the symptom. If there is no problem with another markedly. sensor head, the problem is in the sensor head now used.
  • Page 81 If the contact is not in continuity though actuated, the relay has failed. Contact ULVAC for inspection and repair. The minimum operating current of the relay used for output is 10 mA. At a current below this value, relay may not be in continuity electrically though mechanically actuated.
  • Page 82 Line voltage connected is not correct. 100VAC power is connected to some units. In this case, the internal element will fail. Failure of output circuit Contact ULVAC for inspection and repair. ● Display and analog output differ. Possible cause Corrective action Incorrect recorder output mode is Set a correct mode.(See page41.)
  • Page 83 ● Communication cannot be established. Possible cause Corrective action Cable specifications differ. RS-232C cables include the straight type and cross type. Use the cross type for this gauge. (See page 65.) Erroneous wiring or broken wire of Correct the wiring and check continuity using a cable circuit tester.

  • Page 84: Causes Of N O Emission

    12.1. Causes of No Emission Current and Corrective Actions The table below gives the causes of no stabilized emission current and corrective actions. Possible cause Corrective action Pressure is high Check pumping system. Filament burnout Replace sensor head. Filament wear Replace sensor head.

  • Page 85: Appendix

    Type of sensor head Type of gas Deterioration of sensor head The sensitivity in nitrogen gas atmosphere of the sensor head that can be used with this vacuum gauge is as follows. GI-M2 GI-D7 GI-N8 Measurement sensor head 0.06 Pa 0.0827 Pa...

  • Page 86: Type Of Measurableg

    13.2. Type of Measurable Gas and Specific Sensitivity Factor This gauge has been adjusted so that a correct pressure is indicated for nitrogen gas. Therefore, if a gas other than nitrogen gas is measured, there will be an error in the indicated value.
  • Page 87 3.64±0.37 Values marked with [*] are 4.04* 4.57±0.47 cited from Reference 2. 5.60±0.76 6.60 6.77±1.44 Unfortunately, data on 7.60 7.72 other types of gas are not available at ULVAC 8.18 8.86 0.614* 2.06±0.27 1.29* 2.27±0.28 1.77* 3.25±0.22 2.07* 3.82±0.59 4.81±0.99 6.37±0.86...

  • Page 88: Warranty

    1) In case, special agreement or memorandum for specifications is made individually, the descriptions are prior to this article “13 Product Warranty”. 2) Buyer shall inform ULVAC when this product is exported out of Japan. In the meantime, Buyer shall take necessary procedures according to Foreign Exchange and Foreign Trade Law.

  • Page 89: Certificate Of Contamination

    ULVAC service center or sales office prior to shipment. Please consult with your closest local ULVAC service center or sales office if our components are used with toxic gases or contaminated with reactive products or substances produced by reaction.

  • Page 90: China Rohs Declaration

    C hina RoHS Declaration 1 5 B Management Methods for Controlling Pollution by Electronic Information Products This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection.

  • Page 91: Related Drawings

    R ELATED DRAWINGS 1 6 B 17.1. I on gauge 7 3 B Fig. 17-1 Dimensional drawing・panel cut drawing...

  • Page 92: Ensor Head

    M-12 Sensor Tie-in with head model vacuum name M-11 Pipe end φ18 M-12 Pipe end φ15 M-13 UFC034 flange M-14 NW-16 flange M-15 NW-25 flange M-14 M-15 Fig. 17-2 Sensor heas GI-M2 Fig. 17-3 Sensor head electrode and pin assignment...

  • Page 93: Sensor Head Gi-D7

    17.2.2. Sensor head GI-D7 WIT-G1 (77) 80±2 17±1 157±3 WIB-G5 113±2 13±1 17±1 Φ18(φ15)±0.3 WIB-N3 UFC070 Dotted lines show minimum clearance around the gauge 6-φ6.8 Sensor head model name Tie-in with vacuum φ１８ Pipe end ＷＩＴ－Ｇ１ φ１５ Pipe end φ１８ Pipe end ＷＩＢ－Ｇ５...

  • Page 94: Sensor Head Gi-N8

    17.2.3. Sensor head GI-N8 WIN-N2 UFC070 Dotted lines show minimum clearance around the gauge 6-φ6.8 WIN-N3 UFC070 Dotted lines show minimum clearance around the gauge 6-φ6.8 Sensor head model name Tie-in with vacuum Flange ＷＩＮ－Ｎ３ ＵＦＣ０７０ Flange ＷＩＮ－Ｎ２ ＵＦＣ０７０ Fig. 17-5 Sensor head GI-N8...

  • Page 95: Sensor Head Cable (Gi-M2)

    Uses Uses Shield(GND) GRID(150V) FIL-1a FIL-1com GRID(DEGAS) GRID(DEGAS) Shield(GND) FIL-2com FIL-2a Shield(GND) FIL-1a GRID(150V) FIL-1com FIL-2com 10 FIL-2a Fig. 17-6 Sensor head cable connection diagram (GI-M2) Cable use about Fig. 17-7 Sensor head cable mouting reference drawing...

  • Page 96: Sensor Head Cable (Gi-M2) Long Cable Side

    17.3.2. Sensor head cable (GI-M2) A junction box and interconnecting cable are added for cables 20 m or longer. Sensor-side cable (2m) ① Controller-side cable (2m) ② Long cable （2x2m） ③ Junction （70x70x95mm） ④ Fig. 17-8 Long cable (GI-M2)

  • Page 97: Reference Diagram Of Sensor Cable Installation

    17.3.3. Reference diagram of sensor cable installation 100mm or less If the weight of the cable is applied to the probe, this may cause leaks. It is recommended to fix the cable at 1 m or less so that the weight of the cable is not applied to the probe.

  • Page 98: Wit Socket Type (Gi-D7) 4,10,15,20,25Ｍ

    17.4. S ensor head cable （GI-D7/GI-N8） 7 6 B 17.4.1. W IT socket type (GI-D7) 4,10,15,20,25ｍ 1 3 4 B ①Sensor ②Control side Uses head side Fil Com Ion collector 18,19 GRID(DEGAS) 14,15 GRID(150V) Ion collector Fil 1 (Shell) 16,17 Shield Fig.

  • Page 99: Wib-N3 Socket Type (Gi-D7) 4,10,15,20,25Ｍ

    17.4.3. W IB-N3 socket type (GI-D7) 4,10,15,20,25ｍ 1 3 6 B 17.4.4. W IN-N2 socket type (GI-N8) 4,10ｍ 1 3 7 B 17.4.5. W IN-N3 socket type (GI-N8) 4,10ｍ 1 3 8 B ①Sensor ②Control side Uses head side Fil 1 18,19 GRID(DEGAS) （NC）...

  • Page 100: Wib Pin Socket Type (Gi-D7) 4,10,15,20,25Ｍ

    17.4.6. W IB Pin socket type (GI-D7) 4,10,15,20,25ｍ 1 3 9 B 17.4.7. W IN-G Pin socket type (GI-N8) 4,10ｍ 1 4 0 B ①Sensor ②Contorl side Wiring Uses head side color Black Fil 1 F１ White Fil Com Brown Fil 2 Blue Fil Com...

  • Page 101: Sensor Head Cable （Gi-D7/Gi- N8） Long Cable

    17.4.8. S ensor head cable （GI-D7/GI-N8） Long cable 1 4 1 B A junction box and interconnecting cable are added for cables 30m(15m) or longer. GI-D7： 30,35,40,50ｍ GI-N8： 15,20,25,30ｍ Sensor side cable (2m) ① Long cable( 2x2m) ② Control side cable (2m) ③...

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