Ulvac EGO-40M Instruction Manual page 3

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～
１．SAFTY CAUTIONS
Most accidents are attributed to careless operation, inspection, maintenance or repair. Also
failure to comply with safety cautions or predict potential danger is responsible for accidents.
Accidents can be prevented by predicting a potentially dangerous situation at an early stage.
Personal injuries are caused by erroneous operation or inadequate maintenance or inspection.
Never try to operate the product before you read sections on operation, inspection and
maintenance and fully understand them.
Safety denotations are used throughout this manual and are labeled on this product.
Failure to comply with these warnings or cautions may lead to personal injuries or loss of life.
The supervisor, operator and maintenance personnel should read this manual before operation or
maintenance. Only those who have been trained and know how to operate correctly should
operate this equipment using correct techniques and tools.
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INTRODUCTION