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Ulvac EGN-206M Instruction Manual

Multi hearth model electron beam evaporation source
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Multi Hearth Model
Electron Beam Evaporation Source
Model:
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EGN-206M
EGN-406M
11th Edition Mar 01, 2024
EB0043E-11-EN_HP200
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ULVAC, Inc
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Summary of Contents for Ulvac EGN-206M

  • Page 1 EB0043E-11-EN_HP200 Multi Hearth Model Electron Beam Evaporation Source Model: EGN-206M EGN-406M 11th Edition Mar 01, 2024 ULVAC, Inc...
  • Page 3 The content listed in this manual is subject to change without prior notice because of changes in system specifications or system improvements. The copyright of this manual and the safety guide is held by the ULVAC, Inc. You are forbidden from copying all or a portion of this manual without the consent of the ULVAC, Inc.
  • Page 4 Multi Hearth electron beam source EGN-206M/406M Introduction 1. Safety precautions Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair.Failure to comply with the safety precautions or neglecting to anticipate danger causes accidents to happen more easily. Accidents can be prevented before they happen by anticipating potentially dangerous situations at an early stage.
  • Page 5 Multi Hearth electron beam source EGN-206M/406M Introduction 2. Safety symbols This symbol indicates the possibility of impending death or serious injury when the hazard cannot be avoided. Work that ignores this warning has a high probability of severely injuring people or damaging factory equipment (including this system).
  • Page 6 If you have determined there is a malfunction or if you have any questions, contact one of the locations listed on the last page. When contacting ULVAC, please inform us of the product names, model name, manufacturing numbers, and about the symptoms of the problem in as much detail as possible.
  • Page 7 ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or the nearest sales office or dealer regarding repairs. The system will be repaired or replaced at no charge.

  • Page 8: Table Of Contents

    Multi Hearth electron beam source EGN-206M/406M 1. Contents 1. Contents 1. Contents ....................1 2. For Safe Operation .................. 3 2-1. Precautions when handling the system ..........3 2-2. Warning label / nameplate locations ..........5 2-3. Contacting ULVAC ................5 3.
  • Page 9 Multi Hearth electron beam source EGN-206M/406M 1. Contents 7-3. Recommended parts for regular replacement ........61 8. Troubleshooting ..................62 8-1. Troubleshooting ................62 9. Reference Materials ................70 People's Republic of China Electronic Industry Standard SJ / T11364-2014 ..72...

  • Page 10: For Safe Operation

    Multi Hearth electron beam source EGN-206M/406M 2. For Safe Operation 2. For Safe Operation 2-1. Precautions when handling the system In order to use this product safely, we will explain the safety precautions, the position where the warning label is attached, and the contact information.
  • Page 11 Multi Hearth electron beam source EGN-206M/406M 2. For Safe Operation This unit handle high voltages internally. When performing maintenance on the interior of the equipment, always shut off the primary side breaker for the power supply used and confirm that the AC power supply has been shut off, then wait three minutes or more before opening the specified cover.Interior...

  • Page 12: Warning Label / Nameplate Locations

    Use a cloth and water to clean the warning labels. Do not use gasoline or organic solvents. If a label is damaged, missing, or illegible, contact ULVAC or an exclusive dealer. A nameplate is also affixed to the top surface of the power supply.

  • Page 13: Overview

    The electron beam evaporation source EGN-206M/EGN-406M provides higher performance and reliability based on ULVAC's years of accumulation of technologies and actual achievement. EGN-206M has six crucibles with a capacity of 20cm maximum power supply of 8kW) and EGN-406M has six crucibles with a capacity of ３...

  • Page 14: Hazardous Substances Regulated By The Rohs Directive

    Multi Hearth electron beam source EGN-206M/406M 3. Overview 3-3. Hazardous substances regulated by the RoHS directive The following substances regulated by the RoHS Directive are not contained in the product itself or in the cable assembly that comes with the standard (Revised RoHS Directive RoHS”2011/65/EU”and（EU）2015/863）.

  • Page 15: System Configuration

    Multi Hearth electron beam source EGN-206M/406M 3. Overview 3-4. System Configuration The basic configuration of this system is shown below XYOUT CONTROL INTERLOCK PROGRAM POWER CONTROL CABLE VACUUM CHAMBER ION GAUGE EB GUN SOURCEI CHAMBER SWITCH BASE PLATE HIGH VOLTAGE...

  • Page 16: Specifications Of The Main Unit

    Multi Hearth electron beam source EGN-206M/406M 3. Overview 3-5. Specifications of the main unit Table 3-2.EGN Specifications Specifications Item EGN-206M EGN-406M Acceleration voltage -4KV to -10KV(DC) Emission current 0.8Amax at -10KV 1.0Amax at -10KV Maximum input power 8KWmax 10KWmax X-axis deflection coil -0.4A to -3.5A (2.8Ohm at 20℃)

  • Page 17: Set Up

    Multi Hearth electron beam source EGN-206M/406M 4. Set up 4. Set up 4-1. Precautions in Unpacking Carefully unpack the box of Electron beam evaporation source (hereinafter referred to as an EB gun). Prepare a clean site for checking the EB gun in advance.

  • Page 18: Precautions In Installation

    Multi Hearth electron beam source EGN-206M/406M 4. Set up 4-3. Precautions in Installation Use the handle only for pulling out from the rack, etc. Do not use it when moving or carrying it, hold the entire bottom surface of the main unit, etc., and carry it in a stable state.

  • Page 19: Preparation For Installation

    Do not use any parts that does not satisfy the electrical and mechanical specifications described on this operations manual. 1) Power supply unit for EB gun (1set) ULVAC HPS series, Power supply for electron beam vapor deposition source. HPS-510S/HPS-1000S/HPS-1000N/HPS-1600F etc. 2) Exhaust system for vapor deposition (1set)
  • Page 20 13) Vapor deposition source shutter mechanism (1set) 14) Hearth rotary drive mechanism (1set) When the hearth drive shaft of EGN-206M/406M is turned a 2/3 turn, one crucible moves. 15) Current introduction terminal for detecting hearth position (1set) ULVAC PTS-004 (8P) recommended However, if there is a system that can detect the crucible position mechanically by manually turning it, this introduction terminal is not necessary.
  • Page 21 Multi Hearth electron beam source EGN-206M/406M 4. Set up 1. For the motor drive, keep the number of revolutions of the hearth rotary shaft at 20rpm or less. 2. For measures against a burnout of the motor, check the current value at startup and attach protection circuits, such as fuses.
  • Page 22 Multi Hearth electron beam source EGN-206M/406M 4. Set up In order to work safely, inform all related parties of the details of the work, confirm the hazardous work (working in high locations, high voltage work) before starting the work, and implement all measures to prevent danger.In order to reliably shutoff hazardous energy, use LOTO (lockout-tagout).

  • Page 23: Installation Of Eb Gun

    Since the EGN-206M / 406M weighs 28 kg, the gun base should be strong enough to withstand the weight.
  • Page 24 Multi Hearth electron beam source EGN-206M/406M 4. Set up 1. Arrange the ferromagnetic substance 100 mm or more away from the EB gun.In addition, if there is a magnet nearby, such as an ion pump, check that -４ the magnetic flux density at the mounting position of the EB gun is 10 tesla or less.
  • Page 25 Multi Hearth electron beam source EGN-206M/406M 4. Set up 280mm Minimum distance 130mm Minimum distance Figure 4-1. Installation of multiple EB guns 3) High voltage introduction terminal Avoid placing this to where the operator always touches. Attach a robust metal cover to the electrode section on the atmospheric side.
  • Page 26 Multi Hearth electron beam source EGN-206M/406M 4. Set up 4) Filament lead wire Use a copper wire with a cross-sectional area of 10 10mm or more. Arrange the filament terminals and the high voltage introduction terminals so that the space between them is as short as possible, and do the wiring for making the after-mentioned gun shield easy.
  • Page 27 Multi Hearth electron beam source EGN-206M/406M 4. Set up ESecondary electrons are irradiated on the rear of the EB gun. The EB gun has a structure that releases energy of this secondary electrons from the hearth deck to the cooling water. Therefore give the gun shield a structure that does not cover the hearth deck part.
  • Page 28 Multi Hearth electron beam source EGN-206M/406M 4. Set up 1. Extremely worn parts due to sputtering by ionized gas particles need to be replaced. 2. This filament lead wire tends to be sputtered locally. Therefore replace it when the thickness of that part becomes approx. 80% of new one.
  • Page 29 Multi Hearth electron beam source EGN-206M/406M 4. Set up Feed through coller Source plate OUT ( IN ) IN ( OUT ) 8φ×10φ HEARTH DECK COOL 8φ×10φ HEARTH COOL Water feed through Electron beam GUN EGN-206M/406M Water feed through Pressure...
  • Page 30 Multi Hearth electron beam source EGN-206M/406M 4. Set up Feed through collar Source plate 8φ×10φ Hearth / Hearth deck cool Electron beam GUN Water feed through Water feed through EGN-206M/406M Pressure swith Water inlet 12L/min minimum Flow swith 10L/min minimum...
  • Page 31 Multi Hearth electron beam source EGN-206M/406M 4. Set up 7) Deflection coil wiring For the wiring in the vacuum chamber, glass cloth coated wires, fluorine resin tubes, or lead wires insulated by ceramic beads etc. Keep this wires away from the filament lead wire as much as possible.
  • Page 32 Multi Hearth electron beam source EGN-206M/406M 4. Set up 8) Flow switch wiring Connect the contacts of the flow switch and the pressure switch to the GUN WATER interlock circuit of the EB power supply in series. If there is a heat source (such as a resistance evaporation source) near the EB gun, be sure to set up an interlock with which the heat source is turned on only when cooling water passes through the EB gun.

  • Page 33: X-Ray Measures

    X-ray may leak depending on the thickness of the gasket part. It would be of no concern because in the air, the quantity of X-ray is rapidly reduced. However, ULVAC recommends the following method for higher safety.

  • Page 34: Storage Environment And Transportation Conditions

    Multi Hearth electron beam source EGN-206M/406M 4. Set up 4-7. Storage environment and transportation conditions Carry or store this product in an environment where the ambient temperature is -25 ° C to 55 ° C, the humidity is 80% or less, and condensation does not occur.

  • Page 35: Operation

    Multi Hearth electron beam source EGN-206M/406M 5.Operation 5. Operation 5-1. Pre-operation Check Check the following items before energizing. 1) Be sure to check that the EB power supply is OFF. 2) Wiring check of X- and Y-axes magnet coil Is the connection correct?
  • Page 36 Multi Hearth electron beam source EGN-206M/406M 5.Operation Never use in a highly wet environment. An electric shock may occur even at a low voltage. If water leakage or the like occurs, be sure to wipe out water and dry well before use.
  • Page 37 Multi Hearth electron beam source EGN-206M/406M 5.Operation Never operate the EB gun without the earth wiring. For the earth wiring method, thoroughly read the details described in the operations manual of the EB power supply and do it without any mistakes.

  • Page 38: Eb Gun Operation

    Multi Hearth electron beam source EGN-206M/406M 5.Operation 5-2. EB Gun Operation Read here together with the operations manual of the EB power supply. 1. Do not turn on the power without evaporation material of the hearth in all cases. 2. For operation of the EB gun at full power (8 kW for a crucible of 20cm...
  • Page 39 10 kV and, for a chemical compound, 8 kV or less. Immediately after a high voltage is applied, a local unusual electrical discharge may occur but is gradually reduced. If an overcurrent by an electric discharge occurs, the ULVAC's EB power supply automatically reduces the high voltage and, if the electric discharge quiets down, returns to the original state.
  • Page 40 Multi Hearth electron beam source EGN-206M/406M 5.Operation If the evaporation material is a magnetic substance, as the beam irradiation increases temperature, the magnetic properties is reduced, and therefore the deflecting magnetic field is affected and the beam spot position moves, which needs re-adjustment of the beam position.。...
  • Page 41 Multi Hearth electron beam source EGN-206M/406M 5.Operation 9) After a given film thickness is obtained, close the shutter and lower the beam current to switch the high voltage to OFF.It takes 15 to 20 minutes until the temperature of the vapor deposition material and the filament holder decreases.

  • Page 42: Beam Size Adjustment

    Multi Hearth electron beam source EGN-206M/406M 5.Operation 5-3. Beam size adjustment With this EB gun, two types of beam spots can be selected. Straight trim No electric field Ribbon beam piece shield Figure 5-1. Ribbon beam Spot beam L-shaped trim...
  • Page 43 Multi Hearth electron beam source EGN-206M/406M 5.Operation Straight trim pieces and L-shaped trim pieces have different dimensions. When installing a protective plate around the EB gun, be careful not to interfere with the trim piece.

  • Page 44: Disassembly And Assembly

    Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 6. Disassembly and assembly 6-1. Disassembling and assembling the EB gun Wear clean gloves when assembling and disassembling the EB gun. In addition, switch the main switch of the EB power supply to OFF. You need to store the key of the power supply.
  • Page 45 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 3) Attachment of filament Insert a new filament to the end where the filament cannot be inserted any more and check that the filament legs are pushed against the filament holder. Then tighten the filament retainer fixing bolts (M4x8).
  • Page 46 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 4) Assembling of emitter assembly Check the setup state of the filament and the presence of foreign substances between the filament holders, and then insert the emitter assembly into the main unit and connect the filament lead wire.
  • Page 47 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly M4X8 M4X8 Filament holder (R) Filament retainer Filament terminal (R) M4X8 M4X10(Hexagon socket M4X20 set screw) Beam former Filament holder (L) M4X8 M5X6 Filament Insulator Insulation bush Anode plate Filament terminal (L)

  • Page 48: Eb Gun Disassembly And Assembly Procedure

    Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 6-1-2. EB gun disassembly and assembly procedure 1) Preparation for removing the hearth deck and hearth When removing the hearth deck and the hearth, remove water accumulated inside by air. Close the feedwater valve and then also close the valve on the drain side.
  • Page 49 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 5) Bearing replacement If the bearings are extremely rusted or do not rotate smoothly, replace them. 6) Installation of O-ring Insert new O-rings into the hearth shaft and apply vacuum grease.

  • Page 50: Installation Of Hearth Positioner

    Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 6-1-3. Installation of hearth positioner The hearth positioner is a crucible position detector under the condition that motor-driven. With this switch, the contacts are closed when the roller pressed against the side of the hearth by spring is positioned in place in the groove corresponding to each crucible.
  • Page 51 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 1. Slide the arm holder so that each crucible is set on the circle of the hearth deck and on the concentric circles. 2. In the state where the roller is not engaged in the each crucible groove, slide the stationary contact so that the gap between the contacts is 1 mm.
  • Page 52 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly Arm holder Roller About 0.5ｍｍ Movable contact Stationary contact Figure 6-10. Installation of hearth positioner（HP-100）...
  • Page 53 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 1. Slide the arm holders so that each crucible is concentric with the circle on the hearth deck. 2. With the rollers not fitted in the crucible grooves, slide the static contacts so that the contact spacing is approximately 0.5 mm.

  • Page 54: Parts List And Exploded View

    Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 6-2. Parts list and exploded view 6-2-1. Parts list Table 6-2 EGN-206M/406M(1/3) Part No. Description EGN-206M/406M 6-point type 200008876800 Base plate 200008876900 Side plate 200008877000 Guide block 200008877100 Main magnetic pole...
  • Page 55 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 200001978300 Hearth positioner 200001978000 Joint for Hearth Deak 200008882000 Spring 200000509200 Hearth shaft 200001663600 Water inlet (upper) 200001663700 Water inlet (lower) 200001663800 Separator 200001662900 Thrust washer 200003860800 Spacer For Hearth Shaft...
  • Page 56 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 200009244200 Hearth deck reinforcement bar 200009244400 Tooth lock washer for M3 200009355900 Tooth lock washer for M4 200009356000 Hearth deck Table 6-3 EGN-206M/406M(2/3) Part No. Description 210006843400 Emitter assembly (straight type filament)
  • Page 57 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly 200000502900 EGL-35M roller pin（Hearth positioner） 200000502500 EGL-35M Spring（Hearth positioner） 200003029800 Hexagon socket head cap screw SUS M4*15 Pan head machine screw with cross hole SUS 200003032000 M3*6 200008869600 Movable contact Part No.

  • Page 58: Exploded View

    6. Disassembly and assembly Multi Hearth electron beam source EGN-206M/406M 6-2-2. Exploded view Option M4×16 ※The bolt surrounded by the frame has a vent hole Figure 6-10. EGN-206M/406M Exploded view...
  • Page 59 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly M4X8 M4X8 M4X8 M4X10(Hexagon socket M4X20 set screw) M4X8 M5X6 M4X8 M4X6 Option ※The bolt surrounded by the frame has a vent hole Figure 6-11. Exploded view of emitter assembly...
  • Page 60 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly ６ １ ５ Figure 6-12. Hearth Positioner Exploded View (HP-200)
  • Page 61 Multi Hearth electron beam source EGN-206M/406M 6. Disassembly and assembly M4×8 M4×8 M3×10 SEMS M3×6 Figure 6-13. Hearth Positioner Exploded View (HP-100)

  • Page 62: Maintenance

    Multi Hearth electron beam source EGN-206M/406M 7.Maintenance 7. Maintenance 7-1. Maintenance 1. The voltage applied to this EB gun is enough to pose a danger to human life. If you need to touch the EB gun and its surroundings for inspection etc, shut...
  • Page 63 Multi Hearth electron beam source EGN-206M/406M 7.Maintenance 1. Immediately after the operation, the EB gun (especially around the emitter assembly), evaporation material, filament lead wire, and high-voltage introduction terminal are at a high temperature. Take care not to get burned.

  • Page 64: Periodic Inspection

    Multi Hearth electron beam source EGN-206M/406M 7.Maintenance Is a cover attached to all the points subject to a high voltage? Does the structure prevent fingers or rods from getting in the 〇 cover? Is each screw of the emitter assembly loose? In addition, does the screw tend to be bitten at the time of 〇...
  • Page 65 Multi Hearth electron beam source EGN-206M/406M 7.Maintenance 1. Perform the operation check of the flow switch at the start of the vapor deposition unit. Fully close the valve for cooling water once and check that the "GUN WATER" indicator is turned off, and then gradually open the valve.
  • Page 66 Multi Hearth electron beam source EGN-206M/406M 7.Maintenance 8. The use of distilled water as the cooling water is most preferable to maintain the cooling effectiveness. In general, city water or well water can be used directly as the cooling water but the water quality needs to be 100 ppm or less (hard water with salts content per liter in terms of calcium carbonate).
  • Page 67 Multi Hearth electron beam source EGN-206M/406M 7.Maintenance If vapor deposition is accumulated, scrape it off using a chisel etc.。 Avoid strongly hitting using a chisel etc. Otherwise leakage may occur. す。 Figure 7-1. Cleaning of Hearth and Hearth Deck The recommended tightening torque for each bolt is described below.

  • Page 68: Recommended Parts For Regular Replacement

    Multi Hearth electron beam source EGN-206M/406M 7.Maintenance 7-3. Recommended parts for regular replacement For safe use, we recommend that you overhaul each of the following recommended replacement periods. Table 7-3. Recommended parts for regular replacement Parts name Recommended replacement period Filament 10～40 Hours...

  • Page 69: Troubleshooting

    Multi Hearth electron beam source EGN-206M/406M 8.Troubleshooting 8. Troubleshooting 8-1. Troubleshooting The symptoms of the troubles described in this chapter are limited to past cases and possible phenomena. If it overlaps with the trouble of the EB power supply, the symptom may be different from what is described.
  • Page 70 Multi Hearth electron beam source EGN-206M/406M 8.Troubleshooting Table 8-1. Troubleshooting list Symptoms: ① The high voltage of the power supply is normal, but the filament does not light. Cause: A. The filament is broken. B. The filament cable or filament lead wire has poor contact or is broken.
  • Page 71 Multi Hearth electron beam source EGN-206M/406M 8.Troubleshooting Symptoms: ③ High voltage and beam current are normal, but beam spot is not confirmed in Hearth. Cause: A. The wiring of the X-axis magnet coil is different. B. The adjustment of the EB power supply is insufficient, such as the relationship between the high voltage value and the X-axis magnet coil current value is inappropriate.
  • Page 72 Multi Hearth electron beam source EGN-206M/406M 8.Troubleshooting Symptoms: ⑥ X-axis magnet coil current flows normally, but the magnet indicator does not light. Cause: A. The X-axis magnet coil or lead wire is short-circuited. Checklist: a. Check if the lead wire for the X-axis magnet coil is short-circuited with the ground.
  • Page 73 Multi Hearth electron beam source EGN-206M/406M 8.Troubleshooting Symptoms: ⑩ Abnormal discharge increases sharply when there is a lot of abnormal discharge or when a certain amount of power is applied. Cause: A. There is no gun shield. B. There is a lot of outgas from the evaporative material.
  • Page 74 Multi Hearth electron beam source EGN-206M/406M 8.Troubleshooting Symptoms: ⑬ Even if the power and spot size are the same, the evaporation rate will decrease. Cause: A. The dimensions of the emitter assembly are incorrect. B. The life of the filament is near and deformed.
  • Page 75 Multi Hearth electron beam source EGN-206M/406M 8.Troubleshooting Symptoms: ⑯ The beam spot is deformed or does not sweep symmetrically. Cause: A. The dimensions of the emitter assembly are incorrect. B. The magnetic flux distribution is disturbed. Checklist: a. Verify that the emitter assembly is properly assembled with the correct dimensions.
  • Page 76 Multi Hearth electron beam source EGN-206M/406M 8.Troubleshooting Symptoms: ⑱ Hearth does not rotate smoothly. Cause: A. The grease is depleted. B. Foreign matter is mixed between Hearth and Hearth deck. Checklist: a. If the grease is depleted, apply grease. b. Remove foreign objects between Hearth and Hearth decks.

  • Page 77: Reference Materials

    Multi Hearth electron beam source EGN-206M/406M 9. Reference Materials 9. Reference Materials The following materials are attached. ● EGN-206M/406M Dimensions...
  • Page 78 Multi Hearth electron beam source EGN-206M/406M 9. Reference Materials Figure 9-1.EGN-206M/406M Outline view of EGN-206M / 406M...

  • Page 79: People's Republic Of China Electronic Industry Standard Sj / T11364-2014

    Multi Hearth electron beam source EGN-206M/406M 9. Reference Materials 中华人民共和国中国电子行业标准 SJ / T11364-2014（中国 RoHS2） People's Republic of China Electronic Industry Standard SJ / T11364-2014 有毒有害物质或元素/有毒または有害な物質または元素 部件名称/部品名称 Cr6+ PBDE 印刷电路板/Printed board ○ ○ ○ ○ ○ ○ 电子零件/Electronic parts ○ ○...

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