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Ulvac EGO-40M Instruction Manual page 22

Multi-hearth electron beam source
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３．PREPARATION
MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～
VIEW PORT
LEADEN GLASS
BELLJAR
TARGET
X RAY
GASKET
SUS304(SHIELD)
Figure 3.5 X-ray shield
15

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