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MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～
1） Emitter assembly
No.
PARTS NO.
1
210004028900
2
210004026700
3
210004029600
4
210004026800
5
210004026900
6
210004027000
7
210004027100
8
210004028100
9
210004025300
10
210004025400
11
210004025500
12
210004024100
13
210004028000
14
210004029000
15
210004027200
16
210004028200
17
210004027300
18
210004027400
19
210004025600
20
210004025700
21
210004027500
22
200003028700
23
200003019800
24
200003029000
25
200003033100
26
200003602200
27
200003324700
28
200000604100
29
200000604200
30
200003029600
31
210004024000
32
DESCRIPTION
Insulator mount
Sheild
Washer
Emitter mount ,right
Emitter mount , left
Beam adjustment plate ,right
Beam adjustment plate ,left
Insulator
Filament holder ,right
Filament holder ,left
Filament retainer
Filament setscrew M4 x 8
Filament
Insulatoing spacer
Holder support
Insulation bush
Beam formaer
Anode plate
Filament terminal ,right
Filament terminal ,left
Anode support
Allen screw M3 x 4
Allen screw M3 x 6
Allen screw M3 x 10
Spring washer M3
Spring washer M4
Washer M3
Allen screw M4 x 6
Allen screw M4 x 8
Allen screw M4 x 10
Filament setscrew M4 x 6
５．ASSEMBLY AND DISASSEMBLY OF EBGUN
29
Q'TY
Copper
1
Copper
2
SUS304
1
Copper
1
Copper
1
1
1
Alumina
2
Moydbenum
1
Moydbenum
1
Moydbenum
2
3
Tungsten
1
Alumina
1
Moydbenum
1
Alumina
1
Moydbenum
1
Moydbenum
1
Moydbenum
1
Moydbenum
1
SUS304
2
SUS304
2
SUS304
2
SUS304
4
SUS304
4
SUS304
2
SUS304
2
SUS304
2
SUS304
4
SUS304
4
4
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