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Ulvac TMX-1 Instruction Manual

Oil mist trap
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Instruction Manual
Oil Mist Trap
TMX-1/TMX-1H
TMX-2/TMX-2H
Read this manual before operation and
keep it at your hand for immediate
reference.
Model
ULVAC, Inc.
SK00-6769-DI-002-04

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Summary of Contents for Ulvac TMX-1

  • Page 1 SK00-6769-DI-002-04 Instruction Manual Oil Mist Trap Model TMX-1/TMX-1H TMX-2/TMX-2H Read this manual before operation and keep it at your hand for immediate reference. ULVAC, Inc.
  • Page 2 Table o f Contents 1. Before Using This Trap ..................... 1 1.1 Warning label types and display positions .................. 2 1.2 Warning label display positions ....................2 2. General Description....................3 2.1 Features ............................3 2.2 Specifications ..........................4 2.2.1 Product specifications ......................4 2.2.2 Internal structural drawing.....................
  • Page 3 Figure.1: Warning label display positions ..................2 Figure 2: Internal structural drawing of TMX-1, TMX-2, TMX-1H, and TMX-2H ......5 Figure 3: External dimensions of TMX-1 (for D-330 (D) K, D-650 (D) K) ........7 Figure 4: External dimensions of TMX-1 (for PVD-180) ..............8 Figure 5: External dimensions of TMX-1 (PVD-360, VD151, VD201) ...........
  • Page 4 1. Before Using This Trap Thank you for purchasing the oil mist trap: TMX-1, TMX-2, TMX-1H, TMX-2H (hereafter, "this trap") made by ULVAC (hereinafter, "we"). To ensure safety, upon receiving the trap, confirm that it matches the details of your order and has not been damaged in transit or for another reason.
  • Page 5 Do not exhaust gas that has these characteristics. Before use, read through the instruction manual and fully understand its contents. 1.2 Warning label display positions Warning label display positions of TMX-1, TMX-2 and TMX-1H, TMX-2H are common. Figure.1: Warning label display positions SK00-6769-DI-002-04...
  • Page 6 2. General Description 2.1 Features (1) Removal of oil mist Approx. 90% of the oil mist discharged from an oil sealed rotary vacuum pump can be removed, allowing the work environment to be kept free from contamination with oil mist. It also has a sound deadening effect.
  • Page 7 2.2 Specifications 2.2.1 Product specifications For the product specifications, see Table 1 below. Table 1: TMX-1, TMX-2, TMX-1H, TMX-2H specifications list Exhaust side Mount side Exhaust side Diameter of Applicable Mass Dimensional Model Flange Flange pipe screw pump (*2) drawing...
  • Page 8 2.2.2 Internal structural drawing For the internal structure of the product, see Figure. 2 and Table 2 below. Figure 2: Internal structural drawing of TMX-1, TMX-2, TMX-1H, and TMX-2H SK00-6769-DI-002-04...
  • Page 9 Table 2: Parts list of TMX-1, TMX-2, TMX-1H, and TMX-2H Code Name Material Note Qty. Mounting flange SS400 － Main unit SS400 － Upper lid SPCD － Outer cylinder SS400 － Inner cylinder SS400 － Lower lid SPCD － Element (B) Tetoron －...
  • Page 10 2.2.3 External Dimensions For the external dimensions of the product, see Tables 3 to 11 below. Figure 3: External dimensions of TMX-1 (for D-330 (D) K, D-650 (D) K) SK00-6769-DI-002-04...
  • Page 11 Figure 4: External dimensions of TMX-1 (for PVD-180) SK00-6769-DI-002-04...
  • Page 12 Figure 5: External dimensions of TMX-1 (For PVD-360, VD151, VD201) SK00-6769-DI-002-04...
  • Page 13 Figure 6: External Dimensions of TMX-1H (For D-330 (D) KH) SK00-6769-DI-002-04...
  • Page 14 Figure 7: External Dimensions of TMX-1H (For D-650(D)KH) SK00-6769-DI-002-04...
  • Page 15 Figure 8: External Dimensions of TMX-1H (For PVD-180H) SK00-6769-DI-002-04...
  • Page 16 Figure 9: External Dimensions of TMX-1H (For PVD-360H) SK00-6769-DI-002-04...
  • Page 17 Figure 10: External Dimensions of TMX-2 (For D-950(D)K) SK00-6769-DI-002-04...
  • Page 18 Figure 11: External Dimensions of TMX-2H (For D-950(D)KH) SK00-6769-DI-002-04...
  • Page 19 (2) Are accessories (instruction manual, parts you ordered) supplied with the unit? (3) Is the gasket installed to the oil mist trap? (4) Is any part damaged or missing and any screw or nut loosened in transit? If you find any problem, contact your local ULVAC organization or representative. SK00-6769-DI-002-04...
  • Page 20 (1) Remove the exhaust pipe installed on the pump. (2) Install the adapter that is used to screw TMX-1 in the pump. When installing the adapter to TMX-1, be sure to remove the baffle (Code No. 10 in "Figure 2: Internal structural drawing"...
  • Page 21 O-ring（G30：PVD-360,VD151,VD201） O-ring（G25：PVD-180） Figure 14: Drawing for installation to a PVD-type pump, VD151, or VD201 3.3 Duct piping When using a loose-type flanged exhaust pipe (RF series) for duct piping, take great care not to apply an excessive force to the main unit of the oil mist trap during piping. An excessive force may cause damage.
  • Page 22 Table 3 can be repeatedly exhausted. Table 3: Limitation on operation in repeated exhaust process Model and applicable TMX model Maximum tank that can be exhausted PVD-180(H)+TMX-1(H)+adaptor 50 ℓ VD151,VD201 +TMX-1(H) + adaptor 100 ℓ PVD-360(H) D-330K(H) +TMX-1(H) 100 ℓ D-330DK(H)
  • Page 23 Table 4: Limitation on operation at high suction pressure Model Limited exhaust time Continuous PVD-180(H),360(H) D-650K(H),D-650DK(H) suction VD151,VD201 D-330K(H),D-330DK(H) D-950K(H),D-950DK(H) pressure Pa 40,000～90,000 Within 3 minutes Within 3 minutes Within 30 minutes 13,000～40,000 Within 10 minutes Within 10 minutes Within 30 minutes 6,600～13,000 Within 15 minutes Within 15 minutes...
  • Page 24 If the unit has not been used for a long period of time, contact your nearest ULVAC TECHNO or ULVAC service center for inspection before operating it again.
  • Page 25 6.4 Measures (1) Domestic transaction: We send you a substitute or repair the product you send back to us or the nearest ULVAC TECHNO's office. If you need support on site, consult the nearest sales office, agency separately. (2) Direct export transaction: We will deliver a substitute.
  • Page 26 7. Major Replacement Parts Table 5: Major replacement parts list Parts name Material Qty. Note Oil mist trap 1 set － TMX-1, TMX-2 Refer to "Fig 2: Internal structural O-ring for each part 1 set drawing." SK00-6769-DI-002-04...
  • Page 27 MEMO SK00-6769-DI-002-04...

This manual is also suitable for:

Tmx-1hTmx-2Tmx-2h