Ulvac EGO-40M Instruction Manual page 19

３．PREPARATION
MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～
ION BEAM
ELECTRON BEAM
PLASMA
GUN SHIELD
SECONDARY
ELECTRON
SPUTTERING
EVAPORATION
FILAMENT HIGH VOLTAGE LEADS
MATERIAL
ELECTRON BEAM GUN
GUN SHIELD
HIGH VOLTAGE LEADS
Figure 3.2 Sputtering mechanism and gun shield
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