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MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～
Q'ty Item
5
Filament
2
Insulator
2
Insulation bushing
1
Insulation spacer
2
Filament setscrew
4
O-ring
O-ring
O-ring
1
Allen wrench
1
Allen wrench
1
Allen wrench
1
Dimensional inspection jig For EB Gun dimension and
1
Assembling jig
Table 3.1 Standard accessories List
Specifications
Tungsten, D=6 mm, L=10 mm
D=12 mm, L=22 mm
OD=8 mm, ID=4 mm, L=3.5 mm
OD=10 mm, ID=6 mm, t=1 mm
M4
8
Fluorine JIS B2401 P9
Fluorine JIS B2401 P21
Fluorine JIS B2401 P26
For M3 bolt
For M4 bolt
For M5 bolt
Adjustment of beam adjustment plate
For filament holder assembly
5
３．PREPARATION
Part number
210004028000
210004028100
210004028200
210004029000
210004024100
C10000000417
C10000000334
C10000000351
-
-
-
200001725700
200001725800
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