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MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～
1
0.5 m㎡
POSITION
2
SIGNAL
3
4
COMMON
SWEEP COIL
FOCUS COIL
FEEDTHROUGH COLLAR
OR SOURCE PLATE
AMP FASTON RECEPTACLE
#170095-1
OPTIONAL HEARTH
POSITIONING ASSEMBLY
EB GUN
1
2
3
4
1
0.75 m㎡ (AWG18)
Figure 3.4 Wiring arrangement in vacuum chamber
COPPER PLATE
（30 x 0.31 mm）
2
SYSTEM GND
0.75 m㎡ (AWG18)
14
３．PREPARATION
TO SYSTEM
GROUND
FROM EB POWER
SUPPLY EARTH
GUN GROUND
6
±
X
5
X COMMON
4
±
Y
3
Y COMMON
2
＋
FOCUS
1
－
FROM EB
POWER SUPPLY
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