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MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～
EGO-40M basic unit（ 2/2）
No. PART NO.
40
200001726800
41
200000493200
42
200000493300
43
200001726900
44
210004015000
45
200001727000
46
200001727100
47
200001727200
48
200001727300
49
C10000000334
50
200001727400
51
200001727800
52
200001728000
53
C10000000351
54
200001727900
55
200001615100
56
C10000000417
57
200001728100
58
210004030500
59
200001723300
60
200003032800
61
200003019800
62
200003029000
63
200003029100
64
200003029200
65
200000604100
66
200000604200
67
200003029600
68
200003029700
69
200003029800
70
200003030000
71
200003030100
72
200003030200
73
200003033400
74
200003033100
75
200003324700
76
200003031300
77
200003031400
DESCRIPTION
Housing
Snap ring for hole
Snap ring for shaft
Hearth deck
Hearth
Bearing cap
Bearing collar
Bearing＃6908
Hearth receiver
O-ring JIS B2401 P21
Bevel gear 1
Hearth shaft
Separator
O-ring JIS B2401 P26
Cooling water port
Vacuum joint 1
O-ring JIS B2401 P9
Piping
Hearth positioner(option)
Cylindrical cover
Flat head screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Hexagon nut
Spring washer
Flat washer
Hexagon socket head screw
Hexagon socket head screw
27
５．ASSEMBLY AND DISASSEMBLY OF EBGUN
SUS304
SUS304
SUS304
SUS304
SUS304
SUS304
Fluorine
SUS304
SUS304
Fluorine
SUS304
Cu
Fluorine
SUS304
Cu
M3×6
SUS304
M3×6
SUS304
M3×10
SUS304
M3×12
SUS304
M3×15
SUS304
M4×6
SUS304
M4×8
SUS304
M4×10
SUS304
M4×12
SUS304
M4×15
SUS304
M4×25
SUS304
M4×30
SUS304
M4×35
SUS304
M3
SUS304
M3
SUS304
M3
SUS304
M4×6
SUS304
M5×6
SUS304
Q'TY
1
1
1
1
1
1
1
1
1
2
1
1
1
1
1
2
4
1
-
1
2
8
2
1
5
9
20
15
6
4
4
2
2
8
8
1
2
2
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