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Ulvac VWR-400M/ERH Instruction Manual

Compact vacuum evaporator
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No.35043-2-02-7
Instruction Manual
Compact Vacuum Evaporator
DEPOX
(VWR-400M/ERH)
Please read this manual thoroughly to ensure safe and effective
operation of this equipment.
Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described
in this manual is subject to changes in dimensions and specifications
without prior notice.
Ulvac Kiko,Inc.

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  • Page 1 No.35043-2-02-7 Instruction Manual Compact Vacuum Evaporator DEPOX (VWR-400M/ERH) Please read this manual thoroughly to ensure safe and effective operation of this equipment. Keep this manual in a safe place. Please note that due to performance upgrade, the equipment described in this manual is subject to changes in dimensions and specifications without prior notice.

  • Page 2: Table Of Contents

    Table of Contents Items with shade include description on safety. To Safely Use This Equipment (1) Before Using ------------------------------------------------------------------------------- 1 1. Target Users ----------------------------------------------------------------------- 1 2. Read the Manual Thoroughly -------------------------------------------------- 1 3. Keep This Manual in a Safe Place -------------------------------------------- 1 4.
  • Page 3 (4) Operations -------------------------------------------------------------------------------- 13 1. Potential dangers and safety precautions during operation --------- 13 2. Evacuation device operation ------------------------------------------------- 14 2-1 Preparation ------------------------------------------------------------------ 14 2-2 Operations ------------------------------------------------------------------- 14 2-3 Shut down ------------------------------------------------------------------ 14 3. Vapor deposition operation --------------------------------------------------- 15 3-1 Opening the vacuum chamber ------------------------------------------ 15 3-2 Vacuum chamber evacuation ------------------------------------------- 15 4.

  • Page 4: To Safely Use This Equipment

    The copyright of this user’s manual and safety guides are reserved by Technical Division of Ulvac Kiko. No part of this document, in whole or part may not be reproduced without permission of Ulvac Kiko Inc.
  • Page 5 Warning Label The warning labels are pasted on the following parts. 1) Glass bell jar (PL001) (PL005) When accompanied by a liquid nitrogen trap. 2) Around the introduction funnel for liquid nitrogen. (PL006) When accompanied by a bell jar cover. 3) Bell jar cover (PL001) (PL005) Check labels Caution...
  • Page 6 Use Environment This product does not have explosion-proof design, and thus use in environments where inflammable substances are present should be avoided. Avoid this Otherwise, explosion could occur, causing fire and burns. action Temperature around the pump is extremely high during operation. Do not place flammable objects around it.
  • Page 7 Operations Do not apply any shock to the glass bell jar, and avoid heating it to 50°C or higher. In a case of explosion upon vacuum condition, the exploded pieces will spread. Avoid this action This may cause a serious damage to the product. Always ventilate the room when using liquid nitrogen because the Warning oxygen content may be decreased due to increase of liquid nitrogen...
  • Page 8 Comply with regulations Do not make any modification of the product that is not permitted by Ulvac Kiko, Inc. We do not assume any responsibility for any damage due to such modifications. Avoid this...

  • Page 9: Before Using

    (1) Before Using 1. Target Users Only persons who have used vacuum deposition equipment or trained based on this manual may operate this equipment. 2. Read the Manual Thoroughly Please read this manual thoroughly in order to use the equipment in a safe and correct manner.

  • Page 10: Product Overview

    (2) Product Overview 1. Purpose of This Product and Actions that are Prohibited This product is a system that evaporates substances in a vacuum space by means of resistance heating evaporation source to form a thin film. To safely and correctly use this product, avoid the following actions that are prohibited.

  • Page 11: Product Specifications

    3. Product Specifications Ultimate pressure 4.0 x 10 Pa (Upon no-load cleaning in vacuum chamber) 3.0 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber) Evacuation time 10 minutes or less up to 4.0 x 10 (Upon no-load cleaning in vacuum chamber) 10 minutes or less up to 3.0 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber) Necessary power...

  • Page 12: Individual Unit Specifications

    4. Individual Unit Specifications Unit Model and Specifications Quantity 1) Glass bell jar - Dimensions: Internal diameter 300 mm × Height 300 mm 1 pc. - Material: Hard glass 2) Feed-through Collar - Number of port: 12 ports (Side: 8 pcs., Bottom: 4 pcs.) 1 set - Dimensions: Internal diameter 305 mm ×...

  • Page 13: Standard Accessories

    Unit Model and Specifications Quantity 5) Oil sealed rotary - Model: GLD-202B 1 set vacuum pump (R.P) - Evacuation speed: 200 L/min - Ultimate pressure: 6.7 x 10 - Required power: 0.55 kVA Oil for use: SMR-100, 1.1L 6) Main valve - Model: SBVM-4A X 1 set - Internal diameter: VG-100...

  • Page 14: How To Use Switches, Handles, And Operation Levers

    6. How to Use Switches, Handles, and Operation Levers Before handling switches, handles, or operation levers, confirm the safety and conditions. Check Name How to Operate MAIN switch Manual ON-OFF BACK.P(or R.P) switch Manual ON-OFF ON: lamp illumination MAIN.P(or D.P) switch Manual ON-OFF ON: lamp illumination MAIN valve handle...

  • Page 15: Layout Of Switches, Handles, And Operation Levers

    7. Layout of Switches, Handles, and Operation Levers...

  • Page 16: Evacuation System Drawing

    Evacuation system drawing Electrical system drawing...

  • Page 17: Opening The Package And Installation

    (3) Opening the Package and Installation 1. General Cautions 1) Is the product what you requested? 2) Are the accessories and all necessary parts included? 3) Maintain space of more than 1 m from the equipment for safety upon installation. 4) After the installation position is determined, fix the equipment with Check adjusters.

  • Page 18: Power Supply

    4. Power Supply Primary power supply Please prepare the following. Single-phase 100 V, 16.0 A or more Single-phase 200 V, 7.5 A or more Check the Smaller power supply capacity may cause Warning capacity the breaker to trip due to overcurrent during the operation.

  • Page 19: Evaporation Electrode Power Output Diagram

    Evaporator electrode power output diagram...

  • Page 20: Water

    5. Water Volume 2.0 L/min Temperature 20°C to 25°C Pressure 200 kPa to 300 kPa (gage pressure) We recommend tap water or pH controlled pore water circulating in a cooling water circulator. Specifications of primary piping connection (portions connected with the equipment) Equipment connection (socket) Rp1/4 (Tool-less joint) Recommended hose Tetronic braided hose (prepared by a user)

  • Page 21: Required Tool List

    6. Required Tool List Name Where to be Used Installation of primary power cable Phillips screwdriver Attaching the Vacuum gauge head Hexagonal wrench (WAF1.5) Attaching the Vacuum gauge head Torque wrench/socket (WAF 13) Installation of the evaporation power cable. 250 crescent wrench Installation of the piping for cooling water.

  • Page 22: Evacuation Device Operation

    2. Evacuation device operation 2-1 Preparation 1) Attach the BACK.P VENT(or RP VENT) cap (appurtenant part) to close off the vent. 2) Attach the pirani gauge to the gauge port of the vacuum chamber bottom. 3) Attach the ionization vacuum gauge head to the vacuum chamber KF port. 4) Close the three-way valve and the main valve.

  • Page 23: Vapor Deposition Operation

    3. Vapor deposition operation 3-1 Opening the vacuum chamber 1) Close the main valve. 2) Verify that the three-way valve is set to Fore. 3) If necessary, open the vent valve slowly. Reference: Filling the vacuum chamber with dry air or nitrogen gas when opening will help prevent contamination.

  • Page 24: Creating A Film

    4. Creating a film 4-1 Preparation 1) Open the vacuum chamber, as described in section 3-1. 2) Attach the evaporation element (boat, filament, etc.) to the electrode. 3) Supply a vapor source to the evaporation element. 4) Close the shutter. 5) Attach the material to be coated (substrate) 6) Evacuate the vacuum chamber, as described in section 3-2.

  • Page 25: Handling Malfunctions

    5. Handling malfunctions 5-1 Instantaneous power outage - All devices automatically return to the conditions before the power outage. 5-2 Long power outage 1) Main valve: CLOSE 2) Three-way valve: CLOSE 3) BACK.P VENT(or RP VENT): OPEN 4) All switches on the operation panel: 5-3 Operation after power recovery 2.Evacuation Device Operation Procedure 2-1 Preparation...

  • Page 26: Maintenance And Repair

    Comply with regulations upon disposal. Comply with regulations Do not make any modification of the product that is not permitted by Ulvac Kiko, Inc. We do not assume any responsibility for any damage due to such modifications. Avoid this action...

  • Page 27: Maintenance And Repair That Can Be Made By User

    2. Maintenance and Repair that Can be Made by User 1) O-ring replacement (except for oil sealed rotary vacuum pump) 2) Cleaning of the feed-though collar and the glass bell jar. 3) Replacement of oil for the sealed vacuum pump and oil diffusion pump. 4) Replacement of the element of oil mist trap.

  • Page 28: Oil Diffusion Pump

    3. Removal, Maintenance, and Installation of Devices 3-2 Oil diffusion pump 1) Required tools Phillips head (+) screwdriver, 17 mm spanner x 2 2) Removal procedure - All devices of the coater stop.: Confirm - The breaker of the devices is turned off. Confirm - The primary power supply of the coater is removed.: Confirm - Remove the side panel and rear panel (optional) if they are attached.

  • Page 29: Oil Mist Trap

    3. Removal, Maintenance, and Installation of Devices 3-3 Oil Mist Trap (Sold Separately) OMI-200 1) Required tools Rod（Attached component） 2) Removal procedure - Insert the rod into the lower part of the oil mist trap, and then rotate it counter-clockwise to loosen. - Rotate the whole unit counter-clockwise with both hands to remove.

  • Page 30: Maintenance And Inspection Points

    4. Maintenance and Inspection Points Location (device) Description Timing Glass bell jar Clean the inside. As necessary Oil sealed rotary Confirm that the oil level of the oil level gauge Every time vacuum pump is within the indicated lines. before using Replace oil.

  • Page 31: Troubleshooting

    5. Troubleshooting Status Cause Troubleshooting Ultimate pressure is low The ambient temperature at Decrease the ambient or unstable, or the installation site is high. temperature to 25°C by evacuation performance cooling. is low. Operation time is too long after Operate 24 hours to 48 installation or long termination.

  • Page 32: Storage Of Equipment

    6. Storage of Equipment Observe the following guidelines to store the equipment. 1) Place of storage - Floor with sufficient strength - Location with good ventilation - Location without direct sunlight - Location where no corrosive chemicals or gases are present.
  • Page 33 7. Consumable List Replacemen Location of Use Parts Specifications Material Quantity t by user O-ring for suction V120 (Attached Main valve flange component) O-ring for valve body (Attached component) P10 (Attached O-ring for valve pole component) Gasket for suction Oil diffusion pump V100 flange Oil for use...

  • Page 34: Disposal

    (6) Disposal 1. Cautions upon Disposal To dispose this product or pumps, comply with industrial waste disposal rules. Correctly dispose the products following the regulations Comply with stipulated in laws or by the local government. Caution regulations Applied regulations: Rules of waste disposal and cleaning Consign the disposal work to: 1) Transportation: Collector and carriers of industrial waste.
  • Page 35 1. Standard Optional Parts List Installation Name of optional parts Applications conditions Basic electrode set Installable by Evaporation electrode. (for service port) user Basic electrode set Installable by Evaporation electrode. (for base plate) user Installable by Gauge port set For adding Ø 18 gauge port. user Installable by Hermetic port set...
  • Page 36 1. Standard Optional Parts List Installation Name of optional parts Applications conditions Installable by Sample holder (Ø 260) Fixing material. user Preventing evaporated material from Installable by Plate preventing adhesion adhering to glass bell jar. user Electrode separation plate Plate for separating evaporation source Installable by (2-point type) Contamination prevention.

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