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Ulvac VPC-061A User Manual

Desktop vacuum coater
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No.31920-2-02-1
User's Manual
Desktop vacuum Coater
VPC-061A
Please read this manual thoroughly to ensure safe and effective
operation of this equipment. Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described
in this manual is subject to changes in dimensions and specifications
without prior notice.
Ulvac Kiko, Inc.

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Summary of Contents for Ulvac VPC-061A

  • Page 1 Please read this manual thoroughly to ensure safe and effective operation of this equipment. Keep this manual in a safe place. Please note that due to performance upgrade, the equipment described in this manual is subject to changes in dimensions and specifications without prior notice. Ulvac Kiko, Inc.

  • Page 2: Table Of Contents

    Table of Contents Items with shade include description on safety. To Safely Use This Equipment (1) Before Using ................1 1. Target Users ..............1 2. Read the Manual Thoroughly ..........1 3. Keep This Manual in a Safe Place ........1 4.
  • Page 3 5. Measures upon Abnormal Conditions ......13 5-1 Instantaneous power outage ........13 5-2 Long power outage ..........13 5-3 Operation after power recovery ....... 13 (5) Maintenance and Repair............14 1. Risks and Safety Measure upon Maintenance and Repair .. 14 2.

  • Page 4: To Safely Use This Equipment

    The copyright of this user’s manual and safety guides are reserved by Technical Division of Ulvac Kiko. No part of this document, in whole or part may be reproduced without permission of Ulvac Kiko Inc.
  • Page 5 Power Supply Primary power supply Please prepare the following: Single-phase 100 V, 6.3 A or more Single-phase 200 V, 7.5 A or more Check the Smaller power supply capacity may cause the breaker to trip due to capacity overcurrent during the operation. For the primary power supply, a single power supply should be provided for the device, and other equipment should not be connected with it.
  • Page 6 Environment This product does not have explosion-proof design, and thus use in environments where inflammable substances are present should be avoided. Avoid this Otherwise, explosion could occur, causing fire and burns. action Temperature at a lower part of the oil diffusion pump is extremely high during operation.
  • Page 7 Operations Do not apply any shock to the glass bell jar, and avoid heating it to 50°C or higher. In a case of explosion upon vacuum condition, the exploded pieces will spread. Avoid this action This may cause a serious damage to the product. Please make sure to ventilate the room when using liquid Warning nitrogen.
  • Page 8 Maintenance, Repair, and Disposal Wear a dust-proof mask and gloves to clean the thin film adhered to the inside of the glass bell jar and the base plate. Wear protective The thin film could be broken into minute particles, and float in the Warning gear air, which could be inhaled into human body.

  • Page 9: Before Using

    (1) Before Using 1. Target Users Only persons who have used vacuum deposition equipment or trained based on this manual may operate this equipment. 2. Read the Manual Thoroughly Please read this manual thoroughly in order to use the equipment in a safe and correct manner.

  • Page 10: Product Overview

    (2) Product Overview 1. Purpose of This Product and Actions that are Prohibited This product is a system that evaporates substances in a vacuum space by means of resistance heating evaporation source to form a thin film. To safely and correctly use this product, avoid the following actions that are prohibited.

  • Page 11: Product Specifications

    3. Product Specifications Ultimate pressure 1.3 x 10 (Upon no-load cleaning in vacuum chamber) 6.6 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber) Evacuation time 20 minutes or less up to the 4.0 x 10 (Upon no-load cleaning in vacuum chamber) 20 minutes or less up to the 1.3 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber)
  • Page 12 4. Individual Unit Specifications Unit Model and Specifications Quantity - Model: PSE-150C - Dimensions: 480 mm × Depth 435.3 mm × Height 149 mm (exclude projection and attached component) - Weight: Approx. 40 kg - Input: Single-phase 200 V - Output: Max.

  • Page 13: Standard Accessories

    5. Standard Accessories 1 pc. - For the main unit: 100 V single-phase, with plug, 2 m 1 pc. 1) Power supply cable - For evaporation power: 200 V single-phase, with crimp-type terminal, 2 m 2) User’s manual - Standard paper 1 pc.

  • Page 14: Layout Of Switches, Handles, And Operation Levers

    7. Layout of Switches, Handles, and Operation Levers Evacuation system drawing Electrical system drawing...

  • Page 15: Opening The Package And Installation

    (3) Opening the Package and Installation 1. General Cautions 1) Is the product what you requested? 2) Are the accessories and all necessary parts included? 3) Maintain a space of more than 0.3 m from the equipment Confirm for safety upon installation. 2.

  • Page 16: Power Supply

    4. Power Supply Primary power supply Please prepare the following: Single-phase 100 V, 6.3 A or more Single-phase 200 V, 7.5 A or more Check the Warning Smaller power supply capacity may cause the breaker capacity to trip due to overcurrent during the operation. Specifications of Primary Cable Connection (Portions Connecting with the Equipment) For 100-V power supply, Cable length: 2 m End: 3P plug with ground (with...

  • Page 17: Necessary Tool List

    5. Necessary Tool List Tool Where to be Used Installation of the evaporation input power Phillips head (+) screwdriver cable Torque wrench/socket (WAF Installation of the evaporation output power cable Installation of the evaporation output power 25-mm crescent wrench cable 6.

  • Page 18: Operations

    (4) Operations 1. Risks and Safety Measures upon Operations Do not apply any shock to the glass bell jar, and avoid heating it to 50°C or higher. In a case of explosion upon vacuum condition, the exploded pieces will spread. Avoid this action This may cause a serious damage to the product.

  • Page 19: Device Operation Procedure

    2. Evacuation Device Operation Procedure 2-1 Preparation 1) Main valve , VENT. V: CLOSE. 2) Three-way valve: FORE 3) All switches on the operation panel: 4) Attach the probe to the gauge port when using the ionization gauge. 5) User side breaker: 2-2 Operations Unit setup 1) MAIN.SW:...

  • Page 20: Deposition Steps

    7) MAIN.SW: 8) Breaker of user side: 9) If there is any liquid nitrogen inside, it evaporates naturally. 3. Deposition Steps 3-1 Opening bell jar 1) When an ionization gauge is use. Filament: 2) Main valve: COMPLETE CLOSE 3) Three-way valve: FORE Confirm 4) VENT.

  • Page 21: Film Formation Steps

    4. Film Formation Steps 4-1 Preparation 1) Opening bell jar: Steps of 3-1 2) Attaching the evaporation source (substrate or filament) to the electrode 3) Provide the evaporation material to evaporation source 4) Shutter: CLOSE 5) Attaching the material (substrate) 6) Vacuum evacuation of bell jar: Steps of 3-2 - Executing the vacuum evacuation up to a certain pressure 4-2 Film formation...

  • Page 22: Maintenance And Repair

    Work by two or Otherwise, you could injure your back. more people Do not make any modification of the product that is not permitted by Ulvac Kiko, Inc. Avoid this We do not assume any responsibility for any damage action due to such modifications.

  • Page 23: Removal, Maintenance, And Installation Of Devices

    3. Removal, Maintenance, and Installation of Devices 3-1 Oil sealed rotary vacuum pump 1) Required tool: 8 mm Spanner x 1 2) Removal procedure - All devices of the coater stop.: Confirm - The primary power supply of the coater is removed.: Confirm - Remove the roughing piping by loosening the roughing piping fixing nut.

  • Page 24: Oil Mist Trap

    3. Removal, Maintenance, and Installation of Devices 3-3 Oil Mist Trap OMT-050A (Sold Separately) 1) Required tools None 2) Removal procedure - Rotate the lower portion of the oil mist trap counter-clockwise with both hands 3) Replace the element. Please refer to Oil Mist Trap OMT-050A User’s Manual 4) Order of attachment - Place the attached O-ring on the lower face of the oil mist trap body.

  • Page 25: Maintenance And Inspection Points

    4. Maintenance and Inspection Points Timing of Unit Maintenance and Inspection Maintenance and Inspection Glass bell jar Clean the inside. As necessary Confirm that the oil level of the oil Every time before level gauge is within the indicated using Oil sealed lines.

  • Page 26: Troubleshooting

    5. Troubleshooting Symptom Cause Troubleshooting Decrease the ambient The ambient temperature at temperature to 25°C by the installation site is high. cooling. Operation time is too long Operate 24 hours to 48 after installation or long hours, and then perform termination.

  • Page 27: Storage Of Equipment

    6. Storage of Equipment Observe the following guidelines to store the equipment. 1) Place of storage - Floor with sufficient strength - Location with good ventilation - Location without direct sunlight - Location where no corrosive chemicals or gases are present. 2) Cautions before and upon storing - Perform roughing evacuation inside the bell jar 7.

  • Page 28: Disposal

    7. Consumable List Location Replacement Parts Specifications Material Quantity of Use by user O-ring for leakage valve O-ring for gauge N-16 port Three-way valve O-ring for Piping P-12 roughing Packing set for re-grease Foreline O-ring for Solenoid P-5.P-21.V-24 solenoid Each 1 valve S-3.S-32 valve...

  • Page 29: Optional Parts

    (7) Optional Parts Do not use other manufacturer’s optional parts for modification. We do not assume any responsibility for any damage Avoid this action due to such modifications. Caution 1. Standard Optional Parts List Installation Name of optional parts Applications conditions Evaporation power Factory...

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