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Table of Contents
Related Manuals for Ulvac TM-2
Summary of Contents for Ulvac TM-2
- Page 1 SK00-6714-DI-002-04 INSTRUCTION MANUAL OIL MIST TRAP (CARTRIDGE FILTER ELEMENTS) MODEL TM-2 TM-3 TM-4 TM-4S Read this manual before operation and keep it at your hand for immediate reference ULVAC, Inc. Components Division http://www.ulvac.co.jp/ －i－...
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Page 2: Table Of Contents
5.3 Exhaust of Inflammable Gas and Gas having property of increase the susceptibility of substances to bum ..........................14 6. Warranty ........................... 15 7. Major Replacement Parts ....................16 Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination SERVICE CENTER －ii－... - Page 3 Attached Tables and Illustrations Fig.1 TM-2, TM-3, TM-4, TM-4S dimensional drawing ........... 4 Fig.2 TM-2F, TM-3F, TM-4F dimensional drawing ............5 Fig.3 Structures ....................... 6 Fig.4 Oil return mechanism A installation (VD, VS) ............9 Fig.5 Oil return mechanism A installation (PKS) ............. 9 Fig.6 Oil return mechanism B installation (VD, VS) ............
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Page 4: Before Using This Product
1. Before Using This Product Thank you for purchasing the oil mist trap (hereafter, "this trap") made by ULVAC (hereinafter, "we"). To ensure safety, upon receiving the trap, confirm that it matches the details of your order and has not been damaged in transit or for another reason. -
Page 5: Warning Label Types And Display Positions
Do not exhaust gas that has these characteristics. Before use, read through the instruction manual and fully understand its contents. 1.2 Warning Label Display Positions TM-2 TM-4S TM-3 TM-4 Fig.0 Warning label display positions... -
Page 6: General Description
(2) Adoption of cartridge filter elements The cartridge filter elements have facilitated the replacement of filter elements when clogged or corroded. 2.2 Specifications Table.1 Specifications Model TM-2 TM-3 TM-4 TM-4S Adopted filter element TM-2E TM-3E... -
Page 7: Dimensional Drawings
2.3 Dimensional Drawings Fig.1 TM-2, TM-3, TM-4, TM-4S dimensional drawing －4－... - Page 8 Fig.2 TM-2F, TM-3F, TM-4F dimensional drawing －5－...
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Page 9: Structure
2.4 Structure (1) Gas (air, nitrogen, etc.) exhausted from an oil sealed rotary vacuum pump blows up the oil inside and enters an oil mist trap along with particles of misted oil. These fine oil particles (oil mist) get trapped when going through a filter element. Rather large aggregated oil particles are collected between the main body of the oil mist trap and the filter element, and get exhausted from an oil returning port. -
Page 10: Method Of Use
3. Method of use 3.1 Examination The products are delivered with maximum care, but for reassurance, confirm the followings after unpacking. (1) That the product is what you have ordered. (2) That it has proper accessories (an instruction manual, other ordered parts, etc.) (3) That there was no damage, or loosening of screws or nuts during the transportation. -
Page 11: Oil Return Mechanism (Option)
3.5 Oil return mechanism (Option) Oil return mechanism is designed to return the trapped oil in oil mist trap to the pump. 3 models of oil return mechanism are available according to the operating pressure and conditions. Table.2 Oil return mechanism models Oil return mechanism A Oil returns into the pump case through the oil filling plug. - Page 12 Oil return mechanism installation Parts list Parts list Oil return mechanism A installation (VD, VS) Fig.4 Oil return mechanism A installation (PKS) Fig.5 Parts list Parts list Oil return mechanism B installation (VD, VS) Fig.6 Fig.7 Oil return mechanism B installation (PKS) －9－...
- Page 13 Parts list Parts list Oil return mechanism C installation (VD) Fig.8 Oil return mechanism C installation (VS) Fig.9 －10－...
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Page 14: Inspection And Maintenance
4. Inspection and Maintenance 4.1 Periodical Inspection Install a pressure gauge (option) to the pressure monitor installation port to measure the pressure inside pump. The filter element is recommended to be replaced under the following conditions. (1) If the pressure is constantly 0.03MPa (0.3kg/cm ) (gauge pressure) or higher. - Page 15 Fig.10 Exploded view of filter element －12－...
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Page 16: Continuity Check Of The Filter Element
4.2.2 Continuity check of the filter element The filter element has a leaf spring that conducts with the lower lid of the main body to prevent static electricity. After replacing the filter element, check the continuity between the following parts with a tester. (1) Filter holding plate ~ Main body lower lid (2) Filter element upper plate ~ main body lower lid Fig.11 Continuity check of the filter element... -
Page 17: Caution
5. Caution 5.1 Clogging of Filter Element Clogged filter elements will raise the pressure inside the pump, and cause damage to pump parts or filter elements. The pressure must be watched with a pressure gauge (option) in usage such (3) When making the pump operate under high intake pressure, or evacuating high temperature gas continuously. -
Page 18: Warranty
6. Warranty (1) The equipment is guaranteed against defects in material or workmanship for one year after delivery. (2) Should any failure occur by normal operating procedure as defined below within this period, replacement of defective parts or repair shall be done at no charge. a) Temperature of operating atmosphere is 10~40℃. -
Page 19: Major Replacement Parts
7. Major Replacement Parts Table.3 Major replacement parts list (TM-2) Description Material Q'ty Remarks Filter element TM-2E O-ring (G240) JIS B 2401 Seal washer (M10) DT-1-10 Table.4 Major replacement parts list (TM-3) Description Material Q'ty Remarks Filter element TM-3E O-ring (G300) - Page 20 This mark is applied to the electronic information product sold in the ・ People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed.