Ulvac EGO-40M Instruction Manual page 16

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～
recommended.
DANGER
Never use in humid environment. It is possible to get a shock even if there is low voltage. If there is
water leakage, wipe away water and dry it before use.
CAUTION
1. The flow switch recommended by ULVAC uses a magnetic float, which may be deposited with
iron powder. Periodically disassemble and clean it.
2. The pressure switch has been so set that it is turned ON at 3 kg/cm
initial adjustment, but it will need re-adjustment if there is back pressure.
8) Wiring of deflection coils (See Fig. 3.4)
Glass-cloth sheathed wire or Teflon sheathed wire or ceramic beads-sheathed wire is suited to
wiring inside the vacuum chamber. Place this wiring as far away from the filament cables as
possible.
WARNING
If the distance between these wires is not more than 20 mm, arc discharge of the high voltage will
take place and the power supply may fail.
9) Wiring of flow switch
Connect the flow switch contacts to the GUN WATER interlock circuit of the EB Gun power supply.
CAUTION
If there is a heat source (for example, resistance evaporation source) near the EB gun, provide an
interlock such that the heat source is not activated unless cooling water is fed to the hearth and
coil.
10) Grounding
Class 1 grounding (ground resistance of 10
supply instruction manual.) Connect the ground terminal of the EB Gun chamber wall to Class 1
ground.
2
or less) is recommended. (See the EB Gun power
9
３．PREPARATION
2
and OFF at 2.5 kg/cm by