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No.32500-2-02-5
User's Manual
High Speed Vacuum Coater
VPC-1100
Please read this manual thoroughly to ensure safe and effective operation
of this equipment.
Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described in
this manual is subject to changes in dimensions and specifications without
prior notice.
ULVAC KIKO, Inc.
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Summary of Contents for Ulvac VPC-1100
- Page 1 Please read this manual thoroughly to ensure safe and effective operation of this equipment. Keep this manual in a safe place. Please note that due to performance upgrade, the equipment described in this manual is subject to changes in dimensions and specifications without prior notice. ULVAC KIKO, Inc.
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Page 2: Table Of Contents
Table of Contents Sections marked with a gray background ( ) are those which are concerned with the safe use of this product. Safety Precautions (1) Introduction ------------------------ ------------------------------------------------ 1 1. Intended users ------------------------------------------------------------- 1 2. How to use this manual --------------------------------------------------- 1 3. - Page 3 4. Using the evaporator ------------------------------------------------------ 17 4-1 Opening the bell jar ------------------------------------------------ 17 4-2 Bell jar evacuation -------------------------------------------------- 18 5. Using the coating equipment -------------------------------------------- 18 5-1 Preparation ----------------------------------------------------------- 18 5-2 Coating ---------------------------------------------------------------- 18 6. Handling emergencies ---------------------------------------------------- 19 6-1 Temporary power failure ------------------------------------------ 19 6-2 Prolonged power failure------------------------------------------- 19 6-3 When power is restored------------------------------------------- 19 6-4 Water supply temporarily cut off -------------------------------- 19...
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Page 4: Safety Precautions
No part of this document, in whole or part may be reproduced without permission of Ulvac Kiko Inc. Read this section before using the VPC-1100. Follow the instructions below to safely use the device and prevent personal injuries from occurring. - Page 5 Power Supply Primary power capacity Three-phase 200 V 30 A+ Single phase 100 V 10 A+ Check If the power capacity is too low, a sudden power surge may trip the capacity breaker. The primary power supply should be used only for this device, and should not be connected to any other machinery.
- Page 6 Environment This device does not employ an explosion-proof construction, and therefore cannot be used with any flammable materials. Prohibited May result in a fire or explosion. Under part of the oil diffusion pump produces a lot of heat while in operation. Do not leave any flammable materials nearby.
- Page 7 Installation This device should be installed in a location that meets the following criteria: 1) Flat, level surface 2) Strong flooring 3) Well-ventilated 4) Not exposed to direct sunlight 5) Room temperature between 7-30°C 6) No fire hazards Check Warning 7) No gases or chemicals which may affect the device environment 8) No noise or other electrical interference...
- Page 8 Operation Make sure the vaporization power output is switched OFF before using the electrode switch. May cause sparks or damage to the switch. Check Do not strike the glass bell jar or heat it to above 50°C. Damaging the inner mechanism while there is a vacuum can cause fragments to fly out.
- Page 9 Maintenance, Repair and Disposal Wear a dusk mask and gloves when cleaning the thin film of the feed through collar of the bell jar. The thin film can turn into a fine dust and may be inhaled. protective equipment The glass bell jar weighs approximately 13 kg. It should only be installed or removed by at least two people.
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Page 10: Introduction
(1) Before Using 1. Target Users Only persons who have used vacuum deposition equipment or trained based on this manual may operate this equipment. 2. Read the Manual Thoroughly Please read this manual thoroughly in order to use the equipment in a safe and correct manner. -
Page 11: Product Overview
(2) Product Overview 1. Uses of this product and prohibitions This device is a vacuum coater which uses resistance heating evaporation in a vacuum to evaporate materials and create a thin film. In order to use this device properly, please do not put it to any of the prohibited uses outlined below. -
Page 12: Specifications
Weight About 313 kg Coating JIS S-5-462 printing (Munsell 5GY8/0.5) Listed above are the standard specifications. Please refer to the VPC-1100 (Special) specifications for details of special configurations. 4. Individual equipment specifications Equipment Name Type / Specifications Number 1) Glass bell jar ･Dimensions Inner diameter Ø... - Page 13 Equipment Name Type / Specifications Number 3) Oil diffusion pump ･Type ULK-06A ･Evacuation speed 1100L/sec. ･Max. pressure < 2.6 x 10 ･Exhaust port VG100, VG40 ･Power consumption 1.2 kW Hydraulic oil D-31 0.35 L Cooling water 1.5 L/min. 4) Oil-sealed rotary ･Type GLD-202A vacuum pump...
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Page 14: Standard Accessories
5) Vacuum ･Paper performance test table ･For GLD-202A suction port 6) Cap ･Ø 10 7) Hose cap ･3 mm 8) Hexagonal wrench Listed above are the standard specifications. Please refer to the VPC-1100 (Special) specifications for details of special configurations. ５... -
Page 15: How To Use The Switches, Handle And Operation Lever
6. How to use the switches, handles and operation lever Please check the position of the switches, handles and operating lever before using, and make sure they are secure. Check Name Operation Main breaker Manual ON—OFF Power surge or short circuit trip RP switch Manual ON—OFF ON: lamp is lit up. -
Page 16: Layout Of The Switches, Handle And Operation Lever
7. Layout of the switches, handle and operation lever ７... -
Page 17: Flow Chart
Flow chart Wiring diagram GLD-202A ８... -
Page 18: Unpacking And Installation
(3) Unpacking and installation 1. General precautions 1) When the device is delivered, please install it as instructed representative, representative of our sales agent. 2) Installation should be performed by two or more people. 3) For your safety during installation, please clear a space of at least 1 m around the device. -
Page 19: Power Supply
4. Power supply Primary power capacity Three-phase 200 V 30 A+ Single phase 100 V 10 A+ Warning If the power capacity is too low, a sudden power Check capacity surge may trip the breaker. Primary power cable connector specifications (included with device) 100 V cable length 4 m with three-prong plug with ground lead (with adapter) -
Page 20: Water
5. Water Water capacity 1.5 L/min. Water temperature 20°C Water pressure 200-300 kPa (Gauge pressure) We recommend that you use pH-controlled purified water, either from the water mains or from a cooling water circulation system. Primary piping connector specifications (included with the device) Hose bore diameter Outer diameter 11 mm Inner diameter 7 mm... -
Page 21: Attaching The Hoist
7. Attaching the hoist Attaching or removing the hoist should be done by two or more people. May cause back pains or other injuries. Do not attempt Caution alone Attachment 1) Preparation Remove the hexagonal bolts, flat washers and spring washers (4 sets) from the hoist mounting plate on the rear left of the top panel. -
Page 22: Attaching The Liquid Nitrogen Intake
Attaching the hoist continued 6) Adjusting the hoist main body position Temporarily loosen the hoist’s fixing bolts, and adjust the main body by moving it forwards, backwards, left or right, until wire rope hangs perpendicular from the arm. Once you have adjusted the hoist, tighten the hexagonal bolts to fix the hoist in place. -
Page 23: Checking The Direction Of The Oil-Sealed Rotary Vacuum Pump
9. Checking the direction of the oil-sealed rotary vacuum pump Since a three-phase motor is used, be sure to check the direction of rotation of the oil-sealed rotary vacuum pump when the device is installed or whenever the input power cable is Caution changed. -
Page 24: Operating
(4) Operating 1. Dangers and safety precautions during operation Make sure the vaporization power output is switched OFF before using the electrode switch. Check May cause sparks or damage to the switch. Do not strike the glass bell jar or heat it to above 50°C. -
Page 25: Inspecting The Device Before Use
2. Inspecting the device before use The fixing clip at either end of the hoist’s wire rope should be inspected daily to make sure they have not come loose. Inspection May cause the glass bell jar to fall. Warning Make sure the hoist’s weight and the glass bell jar cover’s eyebolt have not come loose. -
Page 26: Shutting Down
3. Using the exhaust system 3-3 Shutting down Exhaust system shut down 1) Vacuum evacuation to retain vacuum inside the bell jar 2) If using an ionization vacuum gauge, filament 3) Main valve Completely closed 4) DP 5) FAN 6) Wait 15 minutes ･cooling water ･Three-way valve CLOSE... -
Page 27: Bell Jar Evacuation
4. Using the evaporator 4-2 Bell jar evacuation 1) Bell jar vent Completely closed 2) Glass bell jar Attach 3) Three-way valve ROUGH 4) Pirani vacuum gauge 10Pa or less Check 5) Three-way valve FORE 6) Main valve Completely closed 5. -
Page 28: Handling Emergencies
6. Handling Emergencies 6-1 Temporary power failure All machinery will automatically return to its state prior to the power failure. 6-2 Prolonged power failure Immediately 1) Main valve Completely close 2) Three-way valve CLOSE 3) RP VENT Open 4) All switches on the operation panel 5) One hour later, turn off the cooling water 6-3 When power is restored Please refer to the following subsections of Section 3, Using the Exhaust System... -
Page 29: Maintenance And Repairs
(5) Maintenance and repairs 1. Dangers and safety guidelines during maintenance and repairs Wear a dusk mask and gloves when cleaning the thin film of the feed through collar of the bell jar. The thin film can turn into a fine dust and may be inhaled. Use protective equipment The glass bell jar weighs approximately 13kg. -
Page 30: Maintenance And Repairs By The Customer
2. Maintenance and repairs by the customer 1) Replacing the oil in the oil-sealed rotary vacuum pump and oil diffusion pump. 2) Replacing the element in the oil mist trap (sold separately). 3) Replacing the O-rings (except for the oil-sealed rotary vacuum pump) 4) Cleaning the feed through collar and inside the glass bell jar. -
Page 31: Oil Diffusion Pump
3. Removing, maintaining and installing equipment 3-2 Oil diffusion pump 1) Tools needed 13mm, 17mm spanner (1 each) 2) Removal ・ Make sure all equipment is turned off and the cooling water has been shut off. ・ Open the bell jar vent. ・... -
Page 32: Oil Mist Trap
3. Removing, maintaining and installing equipment 3-3 Oil mist trap (sold separately) 1) Tools needed none 2) Removal Using both hands, rotate the underside of the oil mist trap in a counter-clockwise direction. 3) Replacing the element Please refer to the separate oil mist trap user manual. 4) Attachment ・... -
Page 33: Maintenance And Inspection Checklist
4. Maintenance and inspection checklist Part name Details Period Hoist Make sure the fixing clip and eyebolt at either Daily, before end of the wire rope have not come loose. Oil-sealed rotary Make sure the oil level on the oil level gauge is Daily, before vacuum pump within the line shown. -
Page 34: Troubleshooting
5. Troubleshooting Situation Cause Countermeasure Max. pressure low Room temperature is too high. Adjust the room temperature to 25°C or less. Max. pressure unsteady Used for a short time directly Let the device run for 24 to 48 Evacuation power reduced after installation after... -
Page 35: Handling The Oil-Sealed Rotary Vacuum Pump During Repairs (When Only 1 Is In Use)
6. Handling the oil-sealed rotary vacuum pump during repairs (when only 1 is in use) Two oil-sealed rotary vacuum pumps are normally run simultaneously. However, if two cannot be run together, due to a malfunction or for other reasons, then it is possible to run the device with only one pump while the other is being repaired, if the following procedures are followed. -
Page 36: List Of Consumable Supplies
8. List of consumable supplies Location used Name Specification Material Number customer replace? Feed through Flange O-ring P-400 collar Hermetic O-ring P-26 Gauge port O-ring N-16 Service port S O-ring P-30 Service port L O-ring P-44 Shutter port O-ring N-32 Shutter shaft O-ring Base plate stopper P-22A... -
Page 37: Disposal
8. List of consumable supplies Location used Name Specification Material Number customer replace? Oil diffusion pump Intake flange gasket For ULK-06A Evacuation flange V-55 O-Ring Hydraulic oil D-31 0.35 L 1.1 L per Oil-sealed rotary SMR-100 vacuum pump Special RP1 vacuum hose Ø... -
Page 38: Optional Parts
(7) Optional parts Do not modify this product using any parts other than the standard optional parts specified by us. Caution Prohibited We will not be responsible for any consequences. 1. Table of standard optional parts Location for Optional parts name fitting Factory Evaporator electrode... - Page 39 Location for Optional parts name fitting Power supply out cables for Evaporation power supply cables Factory deposition. For heating the inside of the Metal bell jar Factory bell jar. Metal bell jar For heating the inside of the Factory (with water-cooling coil) bell jar.
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