Ulvac EGO-40M Instruction Manual page 38

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-40M～
３） Hearth Positioner
No PART No
1 200000603500
2 200000502100
3 200000502400
4 200000502200
5 200000503000
6 200000502700
7 200000502600
8 200000502500
9 200000502300
10 200000502900
11 200000502800
12 200000503100
13 200003019800
14 200003029600
15 200003032000
16 200003032100
17 200003324700
DESCRIPTION
Switch cover
Base
Pin(1)
Mount
Static contact
Bush
Washer
Spring
Arm
Pin(2)
Roller
Moving Contact
Allen screw
Allen screw
Cross recess pan head screw
Cross recess pan head screw
Washer
31
５．ASSEMBLY AND DISASSEMBLY OF EBGUN
SUS304
SUS304
SUS304
SUS304
SUS304
Fluorine
Fluorine
SUS304
SUS304
SUS304
SUS304
SUS304
SUS304
M3×6
SUS304
M4×10
SUS304
M3×6
SUS304
M3×8
SUS304
M3
Qty
1
1
4
4
4
8
8
4
4
4
4
4
2
4
4
8
8