Ulvac EGO-40M Instruction Manual page 4

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～
２．SAFETY DENOTATIONS
Safety denotations are used throughout this manual and labeled on the product to call operator s attention
to safety.
Safety denotations are classified as follows.
DANGER
WARNING
CAUTION
NOTE
It is hardly possible to predict all potential dangers in operation, inspection or maintenance under all
operating environments.
Warnings on the cautionary labels in this manual and on the equipment do not mean to meet all safety
requirements.
In operating or maintaining this product, the operator or the maintenance personnel must use every
care so that any serious accident like personal injury or damage to the equipment does not occur.
If operation, inspection or maintenance not described in this manual is performed, it is the user s
responsibility to take necessary care for safety.
Failure to comply with this involves the possibility of impending death or
serious personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously in high ratio.
Failure to comply with this involves the possibility of death or serious
personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously.
Failure to comply with this involves the possibility of a medium degree of
injury or of serious damage to the product.
If you disagree with this caution, it is possible that operator receives a minor
injury or that this product comes down or needs adjustment.
Although there isn't direct damage, the notice was described for operation
safety and correct operation.
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INTRODUCTION