VAT 653 Series Installation, Operating, & Maintenance Instructions page 60

Pendulum control & isolation valve with devicenet® interface
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Required information for support:
Go to 'Tools / Create Diagnostic File' in 'Control Performance Analyzer' and save file
Pressure / flow / gas conditions to be controlled
Chamber volume
Pumping speed (l/s) and pump type (e.g. turbo pump)
System description
Problem description
Send diagnostic file with and all required information to tuning-support@vat.ch
60/110
INSTALLATION
Edition 2019-06-05
Series 65
982156EB

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This manual is also suitable for:

653 gq series653 aq series653 hq series653 cq series

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