13. Cleanroom Specification
13.1 Suction Rate
Air inside the actuator must be suctioned to ensure that the actuator operates in conformance with the
requirements of cleanliness class 10.
Provide an air tube and connect it to a quick joint (outer diameter
connect the other end of the tube to a vacuum pump, blower, ejector, etc., to suction at an applicable flow
rate as specified below.
13.2 Suction Joint
Remove the plug from either quick joint and insert an air tube to suction air from either the motor side or
counter-motor side.
Remember to cover the unused joint with a plug.
Plug
Lead
2.5 mm/3 mm
5 mm/6 mm
10 mm/12 mm/16 mm
10 mm (SS8)
20 mm
Quick joint
6) provided at the suction section, and
Recommended suction rate
15 NI/min
30 NI/min
50 NI/min
40 NI/min
80 NI/min
SA4, SA5, SA6 Outer diameter 6
SA7 SS7
SS8
Air tube (provided by the customer)
Quick joint
Outer diameter 8
Outer diameter 12
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