Optimizing The Ion Source Parameters Omnistar; Omnistar™ With Test Gas Air; Omnistar™ With Test Gas Argon - Pfeiffer Vacuum OmniStar GSD 300 O1 Operating Manual

4.3 Optimizing the Ion Source Parameters
OmniStar™
Optimize the ion source parameters in regular intervals, in parti-
cular during the first time operation and after all service work on
the ion source.
The optimization procedure differs, depending on the existing
configuration, measurement task, and available test gas.
• Optimizing with test gas air → section 4.3.1
• Optimizing with test gas argon → section 4.3.2
4.3.1 OmniStar™ with Test Gas Air
Optimize with air if no special test gas is available.
Start the <TuneUp> program
•
Open the inlet valve:
−
In the menu bar chose <Manual>
−
Choose <DI/DO...>
−
To activate double click Valve
−
Close window with <OK>
•
In the menu bar choose <Tune>
•
Choose <Ion Source>
Adjust all parameters as shown in the picture below:
Choose <Display/Measure Data > for displaying the peak
groups of nitrogen and oxygen.
Optimize:
•
Test at which RF Polarity the better peak shapes are
obtained and choose the corresponding polarity.
•
Set Field-Axis in such a way that a useful resolution
and peak shape are obtained.
•
Alternatingly optimize Extraction and Focus to
maximum peak height
Quit:
•
Close <Tune Ion Source QMA 200>
•
Save the changes by confirming the prompt with <YES>
•
Close <TuneUp>
20 Initial start up
4.3.2 OmniStar™ with Test Gas Argon
Optimize with the test gas argon if argon is subsequently to be
analyzed. Setting of "Cathode" to 40 V prevents formation of Ar
ions and allows detection of low H
Make sure that argon is connected to the GSD 300 and
that the feeder lines are thoroughly purged.
Start the <TuneUp> program
•
Open the inlet valve:
−
In the menu bar chose <Manual>
−
Choose <DI/DO...>
−
To activate double click Valve
−
Close window with <OK>
•
In the menu bar choose <Tune>
•
Choose <Ion Source>
Adjust all parameters as shown in the picture below:
Choose <Display/Measure Data > for displaying the peak
groups of argon.
Optimize:
•
Test at which RF Polarity the better peak shapes are
obtained and choose the corresponding polarity.
•
Set Field-Axis in such a way that a useful resolution
and peak shape are obtained.
•
Alternatingly optimize Extraction and Focus to
maximum peak height.
Quit:
•
Close <Tune Ion Source QMA 200>
•
Save the changes by confirming the prompt with <YES>
•
Close <TuneUp>
O concentrations on mass 18.
2
BG 805 071 BE (9904) GSD300.om
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