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Summary of Contents for Pfeiffer Vacuum FullRange PKR 36 Series
- Page 1 OPERATING INSTRUCTIONS Translation of the Original PKR 36X ∣ IKR 36X Pirani/cold cathode gauge ∣ Cold cathode gauge...
- Page 2 Dear customer, Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support you in your individual application with maximum performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
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Page 3: Table Of Contents
Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Transportation and storage Product description Identifying the product Scope of delivery... - Page 4 Table of contents Shipping Disposal Service solutions from Pfeiffer Vacuum Ordering information 13.1 Ordering parts 13.2 Spare parts 13.3 Accessories Technical data and dimensions Appendix 15.1 Units of pressure 15.2 Gas throughputs ETL Listed PKR ETL Listed IKR Declaration of Conformity PKR...
- Page 5 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: PKR variants low voltage Tbl. 3: PKR variants high current Tbl. 4: IKR variants low voltage Tbl. 5: IKR variants high current Tbl. 6: Abbreviations used Tbl. 7: Illuminating diodes PKR Tbl.
- Page 6 List of figures List of figures Fig. 1: PKR measuring configuration Fig. 2: Establishing the vacuum connection Fig. 3: Removing/installing the electronic unit (recommended for CF-F) Fig. 4: Connection diagram Fig. 5: Measurement cable and Hirschmann cable socket Fig. 6: Status display Fig.
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Page 7: About This Manual
About this manual 1 About this manual IMPORTANT Read carefully before use. Keep the manual for future consultation. 1.1 Validity This document describes the function of the products listed in the following and provides the most im- portant information for safe use. The description is written in accordance with the valid directives. The information in this document refers to the current development status of the products. -
Page 8: Target Group
The part number is found on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale (dimensions in mm). -
Page 9: Pictographs
About this manual Sequence of multi-part action steps The numerical list indicates an action with multiple necessary steps. 1. Step 1 2. Step 2 3..1.3.2 Pictographs The pictographs used in the document indicate useful information. Note Wear laboratory gloves Perform a visual inspection 1.3.3 Stickers on the product This section describes all the stickers on the product along with their meaning. -
Page 10: Trademarks
About this manual 1.4 Trademarks ● FullRange ® is a trademark of Pfeiffer Vacuum GmbH. 10/62... -
Page 11: Safety
Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during transportation NOTICE... - Page 12 ● Requirements of the earthed protective extra-low voltage (PELV) ● Limited power source (LPS) Class 2 ► Secure the line to the product. – Pfeiffer Vacuum measuring and control equipment complies with this requirement. DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault.
- Page 13 ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
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Page 14: Safety Precautions
Safety NOTICE Damage caused by unsuitable cleaning agents Unsuitable cleaning agents damage the product. ► Do not use solvents as they attack the surface. ► Do not use any aggressive or abrasive cleaning agents. Risks when shipping WARNING Risk of poisoning from contaminated products Where products that contain harmful substances are shipped for maintenance or repair purposes, the safety of service personnel is at risk. -
Page 15: Proper Use
The gauge provides a vacuum measurement of gases within the range of 1 × 10 up to 1 × 10 hPa. Both gauges can be operated with a Pfeiffer Vacuum total pressure measuring and control unit or with an evaluation unit provided by the customer. Using the product according to its intended purpose 1. -
Page 16: Ensuring Personnel Qualification
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical training. For more information, please contact Pfeiffer Vacuum technical training. -
Page 17: Operator Requirements
4. Comply with the application limits. 5. Observe the technical data. 6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance of the product are not answered by this operating manual. – You can find information in the Pfeiffer Vacuum service area. -
Page 18: Transportation And Storage
Transportation and storage 3 Transportation and storage NOTICE Damage caused by incorrect transportation Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod- uct. ► Comply with the instructions for safe transportation. NOTICE Damage caused by improper storage Improper storage will lead to damage to the product. -
Page 19: Product Description
4 Product description 4.1 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. Recording rating plate data 1. Read the data on the product rating plate. 2. Record this data. -
Page 20: Installation
Installation 5 Installation 5.1 Establishing the vacuum connection DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010. -
Page 21: Removing/Installing The Electronic Unit
Installation Fig. 2: Establishing the vacuum connection 1 Seal with centering ring Seal with centering ring and filter 2 Protective cap Tensioning piece Procedure 1. Ensure that the permissible operating temperature of the gauge is not exceeded. 2. Observe space required for the electrical connection (e.g. permissible bending radii for the ca- bles). -
Page 22: Fig. 3: Removing/Installing The Electronic Unit (Recommended For Cf-F)
Installation NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ► During assembly and maintenance work on high or ultra high vacuum systems, always wear clean, lint-free and powder-free laboratory gloves. -
Page 23: Establishing The Electrical Connection
► Always connect the supply earth (Pin 5) with the earth for the supply unit. ► Always connect the shielding (Pin 6) with the earth for the supply unit. To operate the gauge with a Pfeiffer Vacuum total pressure measuring and control unit, you will require a corresponding measurement cable from the ActiveLine Accessories. -
Page 24: Fig. 5: Measurement Cable And Hirschmann Cable Socket
Installation Fig. 5: Measurement cable and Hirschmann cable socket Manufacturing a measurement cable 1. Observe the following steps to ensure optimum signal quality, whereby ground loops, differences in potential or EMC will influence the measuring signal. – Use a cable with braided shield and metallic connector housing. –... -
Page 25: Operation
Controlling the IKR gauge with a Pirani gauge For Pfeiffer Vacuum total pressure measuring and control units with at least 2 gauge con- nections, the IKR gauge can be controlled with a Pirani gauge, for example. -
Page 26: Relation: Measuring Signal And Pressure
Operation Meaning "ST" "HV-ST" Lights up yellow Flashes green Supply voltage OK, pressure in cold cathode range, cold cath- ode not ignited Lights up green Lights up green Cold cathode ignited Flashes red EEPROM error Lights up yellow Lights up green Measuring range not reached or exceeded Tbl. -
Page 27: Tbl. 10: Constants Pkr
Operation 1E+00 1E–01 1E–02 torr 1E–03 1E–04 1E–05 1E–06 1E–07 1E–08 1E–09 1E–10 0.0 0.5 1.0 1.5 10.0 U [V] Fig. 8: Relation: measuring signal and pressure IKR p Pressure Measuring signal [V] Calculation PKR Validity range: ● 1 × 10 hPa <... -
Page 28: Gas Type Dependence
The measuring signal is gas type dependent. The characteristics apply for nitrogen (N ), oxygen (O dry air and carbon monoxide (CO). When operating the gauge with a Pfeiffer Vacuum total pressure measuring and control unit (TPG), you can enter a calibration factor to adjust the displayed measured value. -
Page 29: Fig. 10: Pressure Range From 10 To 0.1 Hpa Pkr
Operation p [hPa] –1 –2 –3 –4 –5 –6 –6 –5 –4 –3 –2 –1 4 6 8 [hPa] Fig. 10: Pressure range from 10 to 0.1 hPa PKR 29/62... -
Page 30: Fig. 11: Displayed Pressure Ikr
Operation p [hPa] Xe Kr Ne He –3 –4 –5 –6 –7 –7 –6 –5 –4 –3 –2 [hPa] Fig. 11: Displayed pressure IKR Calibration factors Within the pressure range < 10 hPa, the display is linear. For other gases as air, you can determine the pressure by applying a simple conversion: Calculation: P = C ×... -
Page 31: Ignition Delay
Operation Gas type Calibration factor (C) Krypton (Kr) Xenon (Xe) The calibration factors provided are mean values. Tbl. 12: Calibration factors for the pressure range < 10 hPa PKR and IKR 6.4 Ignition delay Cold cathode measuring systems have an ignition delay upon activation. This ignition delay is longer for lower pressures and is typically in clean, degassed units: ●... - Page 32 Operation Complete quenching of the gas discharge is also possible in the event of contamination resulting from insulating layers (display: "underrange"). Influencing the degree of contamination It is possible to influence the level of contamination to a certain extent. Particular care should be afford- ed for vapors which are separated in the plasma (e.g.
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Page 33: Disassembly
Disassembly 7 Disassembly DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010. - Page 34 Disassembly 3. Loosen the locking screw of the Hirschmann cable socket on the gauge. 4. Disconnect the measurement cable from the gauge. 5. Recommendation: Remove the electronic unit of the gauge temporarily if disassembling is only possible with the electronic unit removed. –...
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Page 35: Maintenance
The dominant cold cathode measuring circuit for the low pressure range (< 1 × 10 hPa) has been cali- brated by Pfeiffer Vacuum to a fixed value at the factory. The HV calibration of the Pirani measuring circuit is performed automatically during operation at pressures < 1 × 10 hPa. -
Page 36: Maintaining The Ikr Gauge
– The calibration was not successful this time. 8.2 Maintaining the IKR gauge Pfeiffer Vacuum has calibrated the gauge to standard values at the factory. The gauge is maintenance- free. Replacing faulty components ► Replace the ionization chamber and the ignition aid or the complete measurement chamber (re- placement sensor) only if the unit is faulty. -
Page 37: Disassembling The Gauge
Maintenance 8.3 Disassembling the gauge NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ► During assembly and maintenance work on high or ultra high vacuum systems, always wear clean, lint-free and powder-free laboratory gloves. -
Page 38: Replacing The Ignition Aid
Maintenance 8.4 Replacing the ignition aid NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ► During assembly and maintenance work on high or ultra high vacuum systems, always wear clean, lint-free and powder-free laboratory gloves. -
Page 39: Fig. 16: Inserting The Ignition Aid In The Mounting Tool
Maintenance Fig. 16: Inserting the ignition aid in the mounting tool 1 Ignition aid Mounting tool 2 Serrated end of ignition aid Inserting the ignition aid in the mounting tool Required tool ● Mounting tool for the ignition aid Spare part required ●... -
Page 40: Cleaning Of Components
► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device. -
Page 41: Identifying Errors At The Measurement Chamber
Maintenance 3. Ensure that all work on the sealing surfaces is performed concentrically. 4. Do not bend the anode. 5. Rub the inside walls of the measurement chamber up to the groove of the circlip with the polishing cloth until shiny. 6. -
Page 42: Assembling The Gauge
Maintenance 8.7 Assembling the gauge DANGER Risk to life due to electric shock If no earth connection is established, voltage flows become hazardous to the touch and could lead to electronic components sustaining damage. ► Always tighten the electronic unit with the grub screw. ►... -
Page 43: Fig. 20: Assembling The Gauge
Maintenance Fig. 20: Assembling the gauge 1 Circlip Measurement chamber (complete) 2 Ionization chamber Grub screw 3 Measurement chamber Electronic unit Assembling the PKR gauge Required tools ● Allen key (2 WAF) ● Pincers for circlip ● Tweezers 1. Replace the ignition aid as required (see chapter “Replacing the ignition aid”, page 38). -
Page 44: Malfunctions
Malfunctioning of the equipment as a direct result of wear or wear parts (e.g. ionization chamber) is not covered by the warranty. Rectifying malfunctions (reset) In the event of a malfunction, Pfeiffer Vacuum recommends disconnecting the supply volt- age, and then reconnecting after 5 seconds. Problem... -
Page 45: Tbl. 16: Malfunctions Ikr
Malfunctions Problem Possible Remedy cause "ST" "HV-ST" Voltage at signal output Flashes EEPROM error Switch off the gauge and constantly < 0.3 V then switch on again after 5 seconds (reset) Replace gauge Signal constant with ap- Lights up Lights Measurement Replace complete measure- green... -
Page 46: Shipping
► Comply with the instructions for safe shipping. Shipping the product safely Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. 1. Do not ship microbiological, explosive or radioactively contaminated products. 2. Observe the shipping guidelines for the participating countries and transport companies. -
Page 47: Disposal
Disposal 11 Disposal WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage. -
Page 48: Service Solutions From Pfeiffer Vacuum
We are consistently striving to perfect our core competence, service for vacuum components. And our service is far from over once you’ve purchased a product from Pfeiffer Vacuum. It often enough really just begins then. In proven Pfeiffer Vacuum quality, of course. - Page 49 Service solutions from Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the details in the declaration of contamination. a) Neutralize the product with nitrogen or dry air. b) Close all openings with airtight blank flanges. c) Seal the product in appropriate protective film.
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Page 50: Ordering Information
Ordering information 13 Ordering information 13.1 Ordering parts Ordering spare parts, accessories or optional components ► Always specify the following details when ordering spare parts, accessories or optional compo- nents: ● all details according to the rating plate ● description and order number according to the parts list 13.2 Spare parts The complete measurement chamber (replacement sensor) is preassembled. -
Page 51: Accessories
Ordering information 13.3 Accessories Installation and operation of accessories Pfeiffer Vacuum offers a series of special, compatible accessories for its products. ● Information and ordering options for ActiveLine accessories can be found online. Description Order number Measurement cable, 3 m PT 448 250 -T... -
Page 52: Technical Data And Dimensions
Technical data and dimensions 14 Technical data and dimensions Parameter Value Measuring range (air, N 1 × 10 up to 1000 hPa Maximum pressure (absolute) 10 000 hPa, limited to inert gases and temperatures < 55 °C Burst pressure (absolute) > 13 000 hPa Measuring principle Pirani/cold cathode Accuracy (N... -
Page 53: Tbl. 20: Electrical Data Pkr
● Measurements with constant volt- age: Measurement voltage within the range 2 to 3 V The minimum voltage for the supply unit must be increased proportional to the cable length. Pfeiffer Vacuum measuring and control equipment complies with this requirement. 53/62... -
Page 54: Tbl. 21: Electrical Data Ikr
Only in indoor areas Installation altitude max. 6000 m MSL Protection category IP40 Tbl. 23: Ambient conditions The minimum voltage for the supply unit must be increased proportional to the cable length. Pfeiffer Vacuum measuring and control equipment complies with this requirement. 54/62... -
Page 55: Tbl. 24: Temperatures
Technical data and dimensions Parameter Value Operation 5 to 55 °C Pirani filament (PKR only) 120 °C Storage -40 to +70 °C Bake out ≤ 150 °C Tbl. 24: Temperatures Parameter Value Flange Stainless steel (1.4435) Measurement chamber Stainless steel (1.4435) Pirani filament (PKR only) Tungsten (W) Feedthrough (insulation) -
Page 56: Appendix
Appendix 15 Appendix 15.1 Units of pressure Unit mbar Torr / mm Hg mbar 0.75 1 · 10 1000 1000 1 · 10 0.01 0.01 1 · 10 1 · 10 7.5 · 10 0.75 1 · 10 0.01 1000 Torr / mm Hg 1.33 133.32 1.33... -
Page 57: Etl Listed Pkr
ETL LISTED The products PKR 360, PKR 360 C, PKR 361 and PKR 361C - conform to the UL standard UL 61010-1. - are certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1-12. 3103457... -
Page 58: Etl Listed Ikr
ETL LISTED The products IKR 360, IKR 360 C, IKR 361 and IKR 361C - conform to the UL standard UL 61010-1. - are certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1-12. 3103457... -
Page 59: Declaration Of Conformity Pkr
PKR 360, PKR 360 C, PKR 361, PKR 361 C Harmonized standards and applied national standards and specifications: DIN EN 61000-6-2:2006-03 DIN EN 61000-6-3:2011-09 DIN EN 61010-1:2011-07 DIN EN 61326-1:2013-07 Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Aßlar Germany (Dr. Ulrich von Hülsen) Aßlar, 2018-06-14 Managing Director... -
Page 60: Declaration Of Conformity Ikr
IKR 360, IKR 360 C, IKR 361, IKR 361 C Harmonized standards and applied national standards and specifications: DIN EN 61000-6-2:2006-03 DIN EN 61000-6-3:2011-09 DIN EN 61010-1:2011-07 DIN EN 61326-1:2013-07 Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Aßlar Germany (Dr. Ulrich von Hülsen) Aßlar, 2018-06-05 Managing Director... - Page 61 61/62...
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