Pfeiffer Vacuum PrismaPlus QMG 220 Operating Instructions Manual
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Pfeiffer Vacuum PrismaPlus QMG 220 Operating Instructions Manual

Compact mass spectrometer
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QMG 220™
Compact Mass Spectrometer
Operating Instructions
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Summary of Contents for Pfeiffer Vacuum PrismaPlus QMG 220

  • Page 1 ® PrismaPlus QMG 220™ Compact Mass Spectrometer Operating Instructions...

  • Page 2: Trademarks

    Disclaimer The information contained in this manual is believed to be accurate and reliable. However, Pfeiffer Vacuum assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.

  • Page 3: Table Of Contents

    Contents Contents Trademarks............2 Disclaimer .

  • Page 4: Introduction

    Introduction Introduction Product Identification In all communications with Pfeiffer Vacuum, please specify the information on the product nameplate. For convenient reference copy all system information into the spaces provided. Pfeiffer Vacuum, D-35614 Asslar Model: CAUTION Read through the operating instructions carefully before operating the QMG 220. Keep this document in the vicinity of the equipment, accessible by all users.

  • Page 5: Validity

    Introduction Validity This document applies to products with part numbers listed. Analyzers (All analyzers type QMA 200) Detector Filaments Additional technical data Extraction Part Iridium, Molybdenum orifice 2 mm number Faraday C-SEM Tungsten yttriated Closed wiring 300 °C Remarks PT M25 250 ■...

  • Page 6: Intended Use

    Introduction IO 220 PT M28 699 I/O module IO 220 complete. QME 220 Part number Mass range, Analyzer connection IO 220 PT M28 601 1 … 100 straight without PT M28 602 1 … 200 straight without PT M28 603 1 …...

  • Page 7: Safety

    Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Communicate the safety instructions to all other users. Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties: disregard the information in this document ...

  • Page 8: Technical Data

    SP 220 Vacuum gauge Mains NOTE In all communications with Pfeiffer Vacuum please specify the information given on the nameplate. For convenient reference transfer this information of all assemblies into the nameplate replicas in this manual. Pfeiffer Vacuum, D-35614 Asslar...
  • Page 9 Technical Data Electronic unit QME 220 Electronic unit QME 220 with 90° connection Input/output module IO 220 (option) Analyzer QMA 200 F, Faraday detector Analyzer QMA 200 M, secondary electron multiplier (C-SEM)
  • Page 10 Technical Data Power supply SP 220 Mains cable ® ® Software QUADERA See the Online Help of QUADERA software (CD-ROM).

  • Page 11: System Data

    Technical Data System Data QME 220 front panel elements VACUUM VACUUM VACUUM GAUGE 24V= 24V= Front panel QME 220 without IO 220 Front panel QME 220 with IO 220 installed Front panel element Description Connectors < 24 V= > Connector for QME 220-power supply p.
  • Page 12 Technical Data QMG 220 F, Faraday detector General Data Detector type Faraday Unit resolution (valley, entire mass range) at 10 % peak height adjustable to <10 0.5 … 2.5 Max. operating pressure mbar 1×10 Reproducibility of the peak ratio (constant conditions during 8 h, N Ar from air) ±0.5 QMA 200 operating temperature...
  • Page 13 Technical Data Cross-Beam ion source Design principle, open design, suitable for molecular beam experiments, field of application 2 filaments (yttriated iridium or tungsten), degassing by electron bombardment (10 mA, 300 V) Mass range 1 … 100 1 … 200 1 … 300 Minimum detectable partial pressure mbar 3×10...
  • Page 14 Technical Data HS ion source (High sensitivity- ion source) Design principle, open design, radial symmetrical, suitable for residual gas field of application analysis, 2 filaments (yttriated iridium or tungsten), degassing by electron bombardment (10 mA, 300 V) Mass range 1 … 100 1 …...
  • Page 15 Technical Data QME 220 Measuring system Measurement channels Measurement modes Scan analog, Scan Bargraph, MID Measurement cycles mono- / multichannel 1 … 9999 cycles or repeat MID-dwell 2 ms … 60 s Measurement speed scan analog + bargraph peak 20 ms/u … 60 s/u scan bargraph stair 2 ms/u …...
  • Page 16 Technical Data Input/output module IO 220 Analog inputs Connector (<ANALOG I/O>) X7, 15 pin D-Sub connector (female) Number of channels Input configuration differential nominal 10 V, max. 14 V ref. to GND Input voltage range Input resistance 50 kOhm Resolution 14 bit Analog outputs Connector...
  • Page 17 Technical Data Digital outputs Connector (<DIGITAL I/O>) X2, 25 pin D-Sub connector (male) Number of channels Output configuration open collector (sink), optically isolated Output voltage nominal +24 V, max. +28 V +0.9 V Saturation voltage (low) All 16 channels used: 60 mA/channel Output current (sink) 250 mA/channel 4 channels used:...

  • Page 18: Dimensions [Mm]

    Technical Data Dimensions [mm] Electronic unit (60) QME 220 + QMA 200 F analyzer with Faraday detector DN 40 CF-F Electronic unit (60) QME 220 + analyzer QMA 200 M with C-SEM + Faraday detector DN 40 CF-F Electronic unit QME 220 90°+ (60) analyzer QMA 200 A...
  • Page 19 Technical Data Electronic unit QME 220 90°+ (60) analyzer QMA 200 M with C-SEM detector DN 40 CF-F ø37 Electronic unit (55) QME 220 + input/output module IO 220 (X2) Power supply SP 220...

  • Page 20: Installation

    Installation Installation Unpacking NOTE Store the transport fastening devices and re-install them before transporting the product again. DANGER Putting a product which presents visible damage into operation can be extremely hazardous. If the product presents visible damage do not put it into operation and make sure it is not inadvertently put into operation.

  • Page 21: Space Requirements

    Installation Space Requirements WARNING The QMA 200 F may only be installed in flanges or tubes with an internal diameter 37 mm, otherwise short circuits to the wall can occur. The diameter of the extension tube for the QMA 200 M must be at least 40.5 mm. NOTE Note the required installation depth (See ’Dimensions [mm]’...
  • Page 22 Installation Removing the transport brace and flanging the QMA 200 M QMA 200 F analyzer to the vacuum chamber Transport brace Guide groove Mounting tool 1 Set the QMA 200 into the supplied mounting tool. 2 Carefully remove the transport cover on the QMA 200 and save it for possible future use.

  • Page 23: Qme 220 Installation

    Installation QME 220 Installation DANGER The QME 220 may be mounted only to a correctly installed QMA 200 as the only ground connection is via the QMA 200 flange. The 24 V supply line from the SP 220 must never be connected if QMA 200 is not screw fastened to the QME 220.

  • Page 24: Input/Output Module Io 220 Installation/Removal

    Installation Input/Output Module IO 220 Installation/Removal The optional I/O module IO 220 makes the utilization of additional interfaces possible. The QME 220 can be ordered with the IO 220 already installed or it can be upgraded at a later time. Required tools Screwdriver Torx T10 I/O module IO 220...
  • Page 25 Installation 7 Fasten the three M340 mm Torx screws delivered with the IO 220. 8 Re-install the extended QME 220 following the procedure described above, and continue with section ’Electrical Connections’, p. Removal procedure 1 Disconnect the power supply from the mains and remove all electrical connections to the QME 220.
  • Page 26 Installation 5 Carefully pull off the IO 220 module from the QME 220 front panel using both hands. 6 Secure the three screws in the IO 220 with the M3 transport nuts. 7 Insert and fasten the short Torx screws 1 … 3. 8 Re-install the QME 220 following the procedure described above and continue with ’Electrical Connections’, p.

  • Page 27: Electrical Connections

    Installation Electrical Connections QME 220 Connection WARNING All electrical connections must have cable strain relief. Route the cables separately from EMI sources. WARNING For reasons of electromagnetic compatibility (EMI) (external interference) a single central grounding point is strongly recommended for all connected units (pumping station, SP 220, computer, recorders, etc.).
  • Page 28 Installation PC Connection Since the QMG 220 does not have a local control panel, it is operated via a PC interface or as a device in a network. There are various ways to interconnect a QME 220 and a PC: ...
  • Page 29 Installation The interface status is indicated by two LEDs integrated in the RJ45 connector: LAN connection indicators Status Meaning green data transfer rate 100 Mbit/s RJ45 dark data transfer rate 10 Mbit/s yellow lit data transfer in (flickering) progress green yellow dark no data transfer...
  • Page 30 Installation Pin assignment X3 Pin No. Description IO 220 bus IO 220 bus IO 220 bus EXTERNAL_PROTECTION IO 220 bus IO 220 bus IO 220 bus 0 V, GND reference IO 220 bus The pins marked 'IO 220 bus' are exclusively used for the data exchange between QME 220 and IO 220 and may not be used for anything else.
  • Page 31 Installation 1 Open the D-Sub connector. Procedure 2 Prepare the cable ends and solder/crimp the cable according to the diagram below. Connection diagram X7 IO 220 Channel 1 1 k  – 1 k  1 nF 1 nF – Channel 2 –...
  • Page 32 Installation Pin assignment X7 Pin No. Description analog input, channel 1 (–) analog input, channel 2 (–) analog input, channel 3 (–) analog input, channel 4 (–) analog input, channel 5 (–) analog output, channel 1 analog output, channel 2 GND reference of analog outputs analog input, channel 1 (+) analog input, channel 2 (+)
  • Page 33 Installation 1 Open the D-Sub connector. Procedure 2 Prepare the cable ends and solder/crimp the cable according to the diagram below. Connection diagram digital inputs (X2) IO 220 +24 V Channel 1 Channel 2 Channel 3 Channel 4 – Ext_Protection 100 ...
  • Page 34 Installation Pin assignment X2 Pin No. Description digital output, channel 1 digital output, channel 2 digital output, channel 3 digital output, channel 4 digital output, channel 5 digital output, channel 6 digital output, channel 7 digital output, channel 8 GND reference for digital outputs (DO_0V) supply voltage for digital outputs (DO_V+, external) digital input, channel 1 digital input, channel 2...
  • Page 35 Installation Vacuum Gauge The following vacuum gauges can be connected to the system provided that the IO 220 is installed: Connection Power Gauge Interface Connector Degas supply type analog X5, <TP GAUGE>, 6 pin internal PKR251/261 analog X5, <TP GAUGE>, 6 pin SP 220 PBR260 analog...
  • Page 36 Installation Connection of the Some of gauges have higher supply power requirements (which can not be satisfied by the primary QME 220 power supply (SP 220 (1)). In these cases a second SP 220 Additional Power (SP 220 (2)) is required. Supply WARNING Do not connect the mains cables of both SP 220 supplies to the mains socket yet.

  • Page 37: Software Installation

    Installation Using the Analog and Digital Interfaces VACUUM VACUUM Digital I/O (X2) Analog I/O (X7) GAUGE 24V= Analog Analog Digital Digital inputs outputs inputs outputs  Reading of  Measurement  Software  Switching measurement values control points values e.g. e.g.

  • Page 38: Operation

    Operation Operation Initial Start Up DANGER DANGER: Cleaning agents. Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling cleaning agents and disposing of them. Consider possible reactions with the product materials.
  • Page 39 Operation Switching on After the conclusion of the checks listed above, the system can be switched on. WARNING The QME 220 may only be turned on and off by inserting or detaching the power plug of the SP 220. The 24 VDC connector of the SP 220 must always remain connected to the QME 220.

  • Page 40: Maintenance

    Maintenance Maintenance QMA 200 (Filament Replacement) CAUTION Filaments are supplied as preassembled units. They should only be changed by qualified personnel. HS Ion Source Required tools  Open-end wrench AF 10  Flat-nosed pliers  Screwdriver size 0 Special socket wrench AF 3/3.2 ...
  • Page 41 Maintenance 8 Dispose of the used filament assembly. 9 Remove the replacement filament assembly from its transport box. WARNING Do not touch the filament, not even with gloved hands. 10 Mount the replacement filament on the ion source. Slide the filament assembly toward the setscrews so that the plate of the filament assembly is parallel to the plate of the ion source.
  • Page 42 Maintenance 1 Detach all electrical connections to the QME 220. 2 Separate the QME 220 from the analyzer by performing the same steps described in ’QME 220 Installation’, p. 23 but in reverse order. 3 Detach the analyzer from the vacuum chamber. 4 Place the analyzer into the supplied mounting tool.
  • Page 43 Maintenance Cross-Beam Ion Source  Open-end wrench AF 10 Required tools  Flat-nosed pliers Screwdriver size 0   Special socket wrench AF 3/3.2 Replacement filament assembly Required material Procedure Mounting tool 1 Detach all electrical connections to the QME 220. 2 Separate the QME 220 from the analyzer by performing the same steps described in ’QME 220 Installation’, p.
  • Page 44 Maintenance 2 Replacement filament assemblies WARNING Do not touch the filament, not even with gloved hands. 10 Carefully place the new filament assembly on the ion source. 11 Make sure the ceramic sleeve and the rectangular washer are seated correctly and fasten holder nut.
  • Page 45 Maintenance Grid Ion Source  Tweezers Required tools Screwdriver size 0  Required material Replacement filament Procedure Mounting tool 1 Detach all electrical connections to the QME 220. 2 Separate the QME 220 from the analyzer by performing the same steps described in ’QME 220 Installation’, p.
  • Page 46 Maintenance NOTE The holes in the connector tabs must be precisely aligned above the tapholes. CAUTION Do not bend the filament. 10 Push the supply wire loops over the tapholes, taking care not to shift the connector tabs of the filament. 11 Set the 3 screws in place and tighten carefully.

  • Page 47: Qme 220

    Maintenance QME 220 Cleaning WARNING Do not forget this cleaning, even if the unit is installed in such a way that the contamination cannot be easily seen. NOTE No liquid must seep into the unit. Do not operate the unit until it is completely dry. DANGER Disconnect the 24 V power supply (SP 220) of the QME 220 from the AC power source before any moist cleaning.
  • Page 48 Maintenance 4 Loosen the screws 1 … 4 and remove the front panel. 5 Replace the filter mat. NOTE Dispose of the old filter mat. If it is contaminated, adhere to the applicable regulations (Disposal, p. 56). … 4 in reverse order). 6 Re-assemble the product (steps 1 Tuning the The RF circuit has to be tuned: when the unit is put into service for the first time, when...
  • Page 49 Maintenance NOTE Turn carefully, no force is required. Do not fully tighten the tuning screw and do not turn it out completely. Optimizing the Ion The ion source sensitivity should be optimized when the unit is put into service for the first time or after a filament change.

  • Page 50: Accessories

    Accessories Accessories Ordering number Special socket wrench AF 3/3.2 BK 370 096 Screw kit (25 pieces) PF 505 001 -T Cu seal, DN 40 CF (10 pieces) PF 501 404 -T QMA 200 mounting tool BG 444 456 UTP patch cable, 3 m, 1:1, grey 45-0006 UTP patch cable, 3 m, crossed, red 45-0007...

  • Page 51: Options

    Options Options Ordering number I/O module IO 220 complete PT M28 699...

  • Page 52: Spare Parts

    Spare Parts Spare Parts When ordering spare parts, always indicate:  all information on the product nameplate  description and ordering number according to the spare parts list Ordering no. Ordering no. Filament QMA 200 ion source filament material Detector Additional technical data PT M25 250 BN 846 137 -T BN 846 138 -T...

  • Page 53: Storage

    Storage Storage CAUTION Caution: Electronic component. Inappropriate storage (static electricity, humidity etc.) can damage electronic components. Store product in antistatic bag or container. Observe the corresponding specifications in the Technical Data.

  • Page 54: Returning The Product

    Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment. Products returned to Pfeiffer Vacuum should preferably be free of harmful substances. Adhere to the forwarding regulations of all in-volved countries and forwarding companies and enclose a duly com-pleted declaration of contamination.

  • Page 55: Service

    Service Service Pfeiffer Vacuum offers first-class service!  Operating fluid and bearing change on the spot by Pfeiffer Vacuum Field Service  Maintenance / repair in the nearby Service Center or Serviceability  Fast replacement with exchange products in mint condition ...

  • Page 56: Disposal

    Disposal Disposal DANGER DANGER: Contaminated parts. Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: Substances detrimental to the environment.
  • Page 58 Vacuum solutions Pfeiffer Vacuum stands for innovative and custom from a single source vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range From a single component to complex systems: of products We are the only supplier of vacuum technology that provides a complete product portfolio.

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