Pfeiffer Vacuum PrismaPlus QMG 220 Operating Instructions Manual
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Pfeiffer Vacuum PrismaPlus QMG 220 Operating Instructions Manual

Compact mass spectrometer system
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Operating Instructions
incl. Declaration of Conformity
PrismaPlus™
Compact Mass Spectrometer System
QMG 220
BG 5214 BE / A
(2007-06)
1

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Summary of Contents for Pfeiffer Vacuum PrismaPlus QMG 220

  • Page 1 Operating Instructions incl. Declaration of Conformity PrismaPlus™ Compact Mass Spectrometer System QMG 220 BG 5214 BE / A (2007-06)

  • Page 2: Product Identification

    Product Identification In all communications with Pfeiffer Vacuum, please specify the information on the product nameplate. For convenient reference copy all system information into the spaces provided (→ Pfeiffer Vacuum, D-35614 Asslar Model: Read through the operating instructions carefully before operating the QMG 220.

  • Page 3: Validity

    Validity This document applies to products with part numbers listed Analyzers (All analyzers type QMA 200) Detector Filaments Additional technical data Remarks Part number Extraction Iridium, Molybdenum Faraday Tungsten Closed 300 °C orifice yttriated wiring ∅2 mm PT M25 250 PT M25 251 PT M25 252 PT M25 253...

  • Page 4: Inteded Use

    The QMG 220 is not intended to produce measurement results on which the safety of persons or large assets depend. For such applications the safety must be en- sured by additional measures. Trademarks PrismaPlus™ Pfeiffer Vacuum GmbH ® QUADERA INFICON AG BG 5214 BE / A (2007-06) QMG220.oi...

  • Page 5: Table Of Contents

    Content Product Identification Validity Inteded Use Trademarks Content 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 1.5 Training 2 Technical Data 2.1 System Overview 2.2 System Data 3 Installation 3.1 Unpacking 3.2 Assembly 3.2.1 Space Requirements 3.2.2 Required Tools 3.2.3 QMA 200 Installation...

  • Page 6: Safety

    1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Consultation of operating instructions required (symbol printed on equipment housing).

  • Page 7: General Safety Instructions

    Communicate the safety instructions to all other users. 1.4 Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document •...

  • Page 8: Technical Data

    SP 220 Vacuum gauges Mains In all communications with Pfeiffer Vacuum please specify the informa- tion given on the nameplate. For convenient reference transfer this in- formation of all assemblies into the nameplate replicas in this manual. Electronic unit QME 220 Electronic unit QME 220 with 90°...
  • Page 9 Input/output module IO 220 (option) Analyzer QMA 200 F, Faraday detector Analyzer QMA 200 M, secondary electron multiplier (C-SEM) Power supply SP 220 Mains cable ® Software QUADERA → [1]. Accessories → BG 5214 BE / A (2007-06) QMG220.oi...

  • Page 10: System Data

    2.2 System Data QME 220 front panel elements VACUUM VACUUM VACUUM GAUGE 24V= 24V= Front panel QME 220 without IO 220 Front panel QME 220 with IO 220 installed Front panel element Description → Connectors < 24 V= > Connector for QME 220-power supply SP 220 (1) = connector on the IO 220 for an additional power supply...
  • Page 11 QMG 220 F, Faraday detector General data Detector type Faraday Unit resolution (valley, entire mass range) <10 at 10 % peak height adjustable to 0.5 … 2.5 Max. operating pressure mbar 1×10 Reproducibility of the peak ratio (con- stant conditions during 8 h, N Ar from air) ±0.5 QMA 200 operating temperature...
  • Page 12 QMG 220 M (C-SEM detector) General data Detector type C-SEM / Faraday Unit resolution (valley, entire mass range) <10 at 10 % peak height adjustable to 0.5 … 2.5 Max. operating pressure mbar 1×10 Reproducibility of the peak ratio (con- stant conditions during 8 h, N Ar from air) ±0.5...
  • Page 13 Measuring system QME 220 Measurement channels Measurement modes Scan analog, Scan Bargraph, MID Measurement cycles mono- / multichannel 1 … 9999 cycles or repeat MID-dwell 2 ms … 60 s Measurement speed scan analog + bargraph peak 20 ms/u … 60 s/u scan bargraph stair 2 ms/u …...
  • Page 14 Digital inputs, Digital inputs digital outputs, Connector (<DIGITAL I/O>) X2, 25 pin D-Sub connector (male) EXTERNAL_PROTECTION Number of channels 4 (+ EXT_PROT Input voltage <+5 V (low) nominal +24 V (high), max. +28 V Input current 1.9 mA Supply voltage for floating contact +24V via 1.2 kOhm (I 10 mA) max.
  • Page 15 Digital interface Digital interface for vacuum gauges Connector (<SERIAL>) X1, 9 pin D-Sub connector (female) Interface type RS485 utilization of vacuum gauges with digital interfaces (suitable gauges → 31). Vacuum gauge interface Analog vacuum gauge interface (analog) Connector (<TP GAUGE>) X5, 6 pin Amphenol C91 socket Interface type analog...
  • Page 16 Electronic unit QME 220 90°+ analyzer QMA 200 A with (60) Faraday detector DN 40 CF-F ø37 Electronic unit QME 220 90°+ analyzer QMA 200 M with (60) C-SEM detector DN 40 CF-F ø37 Electronic unit QME 220 (55) + input/output module IO 220 (X2) Power supply SP 220 BG 5214 BE / A...

  • Page 17: Installation

    3 Installation 3.1 Unpacking Store the transport fastening devices and re-install them before trans- porting the product again. DANGER Putting a product which presents a visible damage into operation can be extremely hazardous. If the product presents a visible damage do not put it into operation and make sure it is not inadvertently put into operation.

  • Page 18: Space Requirements

    3.2.1 Space Requirements WARNING The QMA 200 F may only be installed in flanges or tubes with an internal diame- ter ≥37 mm, otherwise short circuits to the wall can occur. The diameter of the extension tube for the QMA 200 M must be at least 40.5 mm.

  • Page 19: Qma 200 Installation

    3.2.3 QMA 200 Installation DANGER The analyzer flange must be properly grounded. • By connecting with all 6 screws to the properly grounded vacuum system. • If the mounting flange is not grounded, the QMA 200 flange (grounding screw M4) must be connected to the protective ground by means of a separate ground conductor.

  • Page 20: Qme 220 Installation

    3.2.4 QME 220 Installation DANGER The QME 220 may be mounted only to a correctly installed QMA 200 as the only ground connection is via the QMA 200 flange. The 24 V supply line from the SP 220 must never be connected if QMA 200 is not screw fastened to the QME 220.
  • Page 21 Remove the three transport nuts at the back of the IO 220. Carefully place the IO 220 module onto the front panel of the QME 220. Use both hands and make sure the D-Sub connection between IO 220 and QME 220 is engaged correctly. Fasten the three M3×40 mm Torx screws delivered with the IO 220.
  • Page 22 Re-install the extended QME 220 following the procedure described above (→ 20) and continue with chapter 'Electrical Connections' (→ 24). Procedure, de-installation Steps … are the same as in section 'Procedure, installation'. Loosen and remove screws 1 … 3 as shown. Carefully pull off the IO 220 module from the QME 220 front panel using both hands.
  • Page 23 Insert and fasten the short Torx screws 1 … 3. Re-install the QME 220 following the procedure described above (→ and continue with chapter 'Electrical Connections' (→ 24). BG 5214 BE / A (2007-06) QMG220.oi...

  • Page 24: Electrical Connections

    3.3 Electrical Connections 3.3.1 QME 220 Connection WARNING All electrical connections must have cable strain relief. Route the cables sepa- rately from EMI sources. WARNING For reasons of electromagnetic compatibility (EMI) (external interference) a sin- gle central grounding point is strongly recommended for all connected units (pumping station, SP 220, computer, recorders, etc.).

  • Page 25: Pc Connection

    3.3.3 PC Connection Since the QMG 220 does not have a local control panel, it is operated via a PC interface or as a device in a network. There are various ways to interconnect a QME 220 and a PC: Ethernet interface •...
  • Page 26 LAN connection indicators The interface status is indicated by two LEDs integrated in the RJ45 connector: Status Meaning data transfer rate 100 Mbit/s green dark data transfer rate RJ45 10 Mbit/s data transfer in (flickering) progress yellow green yellow dark no data transfer (or no connection) I/O interface...

  • Page 27: Io 220 Analog Input And Output Connections

    Pin assignmentX3 Pin No. Description IO 220 bus IO 220 bus IO 220 bus EXTERNAL_PROTECTION IO 220 bus IO 220 bus IO 220 bus 0 V, GND reference IO 220 bus The EXTERNAL_PROTECTION input (→ 14) requires a floating contact 'S' between pin 4 and GND (pin 8).
  • Page 28 Connection diagram X7 Channel 1 IO 220 1 k Ω – 1 k Ω 1 nF 1 nF – Channel 2 – Analog inputs Channel 3 – Channel 4 – Channel 5 Channel 1 100 Ω 100 Ω 10 nF Channel 2 Analog outputs Channel 3...

  • Page 29: Io 220 Digital Input And Output Connections

    3.3.5 IO 220 Digital Input and The digital inputs and outputs are available on a 25 pin D-Sub connector (<DIGITAL I/O>, X2). Output Connections VACUUM VACUUM GAUGE 24V= An appropriate cable is made up as follows: Cable type The number of cores depends on the functions used. WARNING For reasons of electromagnetic compatibility (EMI) (external interference) a screened cable has to be used.
  • Page 30 Connection diagram digital outputs (X2) IO 220 Channel 1 DO_V+ DO_0V Channel 2 Channel 3 Channel 4 Channel 5 Channel 6 Channel 7 Channel 8 Channel 9 Channel 10 Channel 11 Channel 12 Channel 13 Channel 14 Channel 15 Channel 16 DO_V+ 30 V DO_V...

  • Page 31: Vacuum Gauge Connection

    Pin assignment X2 Pin No. Description digital output, channel 1 digital output, channel 2 digital output, channel 3 digital output, channel 4 digital output, channel 5 digital output, channel 6 digital output, channel 7 digital output, channel 8 GND reference for digital outputs (DO_0V) supply voltage for digital outputs (DO_V+, external) digital input, channel 1 digital input, channel 2...
  • Page 32 The type of gauge connected to the QME 220 is automatically identified by the QME 220 after the power on sequence. After a change of gauges the 24 VDC power supply of the QME 220 has to be disconnected from the mains.

  • Page 33: Connection Of The Additional Power Supply

    3.3.7 Connection of the Addi- Some of gauges have higher supply power requirements (→ 31) which can not be satisfied by the primary QME 220 power supply (SP 220 (1)). In these cases a tional Power Supply second SP 220 (SP 220 (2)) is required. WARNING Do not connect the mains cables of both SP 220 supplies to the mains socket yet.

  • Page 34: Using The Analog And Digital Interfaces

    3.3.8 Using the Analog and Digital Interfaces VACUUM VACUUM Analog I/O (X7) Digital I/O (X2) GAUGE 24V= Analog Analog Digital inputs Digital outputs inputs outputs • • • • Reading of Measurement Software Switching measurement values control points values e.g. e.g.

  • Page 35: Operation

    4 Operation 4.1 Initial Start Up DANGER DANGER: cleaning agents Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling cleaning agents and disposing of them. Consider pos- sible reactions with the product materials (→ 51).
  • Page 36 Switching on After the conclusion of the checks listed above, the system can be switched on. WARNING The QME 220 may only be turned on and off by inserting or detaching the power plug of the SP 220. The 24 VDC connector of the SP 220 must always remain connected to the QME 220.

  • Page 37: Maintenance

    5 Maintenance 5.1 QMA 200 (Filament Replacement) Skilled personnel Filaments are supplied as preassembled units. They should only be changed by qualified personnel. Preparation Detach all electrical connections to the QME 220. (applies to all ion source types) Separate the QME 220 from the analyzer by performing the same steps described in chapter 3.2.4 but in reverse order.
  • Page 38 Remove the replacement filament assembly from its transport box. WARNING Do not touch the filament, not even with gloved hands. Mount the replacement filament on the ion source. Slide the filament as- sembly toward the setscrews so that the plate of the filament assembly is parallel to the plate of the ion source.

  • Page 39: Closed Hs Ion Source

    5.1.2 Closed HS Ion Source Required tools • Open-end wrench AF 10 • Flat-nosed pliers • Screwdriver size 0 • Special socket wrench AF 3/3.2 (→ Required material Replacement filament assembly (→ 49). Procedure mounting tool Remove the ceramic tube (including the spring) from the ion source by twisting it clockwise and pulling it off at the same time.
  • Page 40 Remove the replacement filament assembly from its transport box. WARNING Do not touch the filament, not even with gloved hands. Mount the replacement filament on the ion source. Slide the filament as- sembly toward the setscrews so that the plate of the filament assembly is parallel to the plate of the ion source.

  • Page 41: Cross-Beam Ion Source

    5.1.3 Cross-Beam Ion Source Required tools • Open-end wrench AF 10 • Flat-nosed pliers • Screwdriver size 0 • Special socket wrench AF 3/3.2 (→ Required material Replacement filament assembly (→ 49). Procedure Mounting tool Loosen the screws of the filament contacts and remove the U-sections. Grip the U-sections with flat-nose pliers while loosening the screws in order to counteract the torque applied with the screw- driver.
  • Page 42 Open the packing tube take out the replacement filament assembly after removing the retaining nut. 2 Replacement filament assemblies WARNING Do not touch the filament, not even with gloved hands. Carefully place the new filament assembly on the ion source. Make sure the ceramic sleeve and the rectangular washer are seated cor- rectly and fasten holder nut.

  • Page 43: Grid Ion Source

    5.1.4 Grid Ion Source Required tools • Tweezers • Screwdriver size 0 Required material Replacement filament (→ 49). Procedure Mounting tool Loosen and remove the 3 screws holding the filament. Bend the supply wires away slightly. Remove and dispose of the used filament. Open the box of the replacement filament.
  • Page 44 Place the new filament on the filament holder. The holes in the connector tabs must be precisely aligned above the tapholes. Do not bend the filament. Push the supply wire loops over the tapholes, taking care not to shift the connector tabs of the filament.

  • Page 45: Qme 220

    5.2 QME 220 5.2.1 Cleaning WARNING Do not forget this cleaning, even if the unit is installed in such a way that the con- tamination cannot be easily seen. For cleaning the housing use only a piece of cloth lightly moistened with water, and possibly some dishwashing detergent.
  • Page 46 Loosen the screws 1 … 4 and remove the front panel. Replace the filter mat. Dispose of the old filter mat. If it is contaminated, adhere to the applicable regulations (→ 51). … Re-assemble the product (→ steps in reverse order). BG 5214 BE / A (2007-06) QMG220.oi...

  • Page 47: Tuning The Rf Generator

    5.2.3 Tuning the The RF circuit has to be tuned: when the unit is put into service for the first time, when the analyzer is changed (especially from Faraday to C-SEM), or when a RF Generator corresponding error message is displayed on the screen. Correct tuning assures optimum measurement accuracy across the entire mass range.

  • Page 48: Accessories

    6 Accessories Ordering number Special socket wrench AF 3/3.2 BK 370 096 Screw kit (25 pieces) PF 505 001 -T Cu seal, DN 40 CF (10 pieces) PF 501 404 -T QMA 200 mounting tool BG 444 456 UTP patch cable, 3 m, 1:1, grey 45-0006 UTP patch cable, 3 m, crossed, red 45-0007...

  • Page 49: Spare Parts

    8 Spare Parts When ordering spare parts, always indicate: • all information on the product nameplate • description and ordering number according to the spare parts list Ordering no. Ordering no. Filament QMA 200 ion source filament material Detector Additional technical data PT M25 250 BN 846 137 -T BN 846 138 -T...

  • Page 50: Storage

    Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment. Products returned to Pfeiffer Vacuum should preferably be free of harmful substances. Adhere to the forwarding regulations of all in- volved countries and forwarding companies and enclose a duly com- pleted declaration of contamination (→...

  • Page 51: Disposal

    11 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contami- nated. Adhere to the relevant regulations and take the necessary pre- cautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environment Products or parts thereof (mechanical and electric components, oper-...

  • Page 52: Appendix

    Appendix Software ® Online Help of QUADERA software (CD-ROM). BG 5214 BE / A (2007-06) QMG220.oi...

  • Page 53: Declaration Of Contamination

    Declaration of Contamination The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff. Description of product Reason for return Type...

  • Page 54: Declaration Of Conformity

    Declaration of Conformity We, Pfeiffer Vacuum hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use within certain voltage limits 73/23/EEC and the Directive relating to electromagnetic compatibility 89/336/EEC.
  • Page 55 Notes BG 5214 BE / A (2007-06) QMG220.oi...
  • Page 56 Berliner Strasse 43 D–35614 Asslar Deutschland Tel +49 (0) 6441 802-0 Fax +49 (0) 6441 802-202 info@pfeiffer-vacuum.de Original: German BG 5214 BD / A (2007-06) bg5214be/ a www.pfeiffer-vacuum.net...

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