Pfeiffer Vacuum OMNISTAR Operating Instructions Manual
  1. Manuals
  2. Brands
  3. Pfeiffer Vacuum Manuals
  4. Measuring Instruments
  5. OMNISTAR
  6. Operating instructions manual

Pfeiffer Vacuum OMNISTAR Operating Instructions Manual

Gsd 320 gas analysis system
Hide thumbs
Table of Contents

Advertisement

Quick Links

OPERATING INSTRUCTIONS
EN
Translation of the original instructions
OMNISTAR™
THERMOSTAR™
GSD 320 Gas Analysis System

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the OMNISTAR and is the answer not in the manual?

Questions and answers

Related Manuals for Pfeiffer Vacuum OMNISTAR

Summary of Contents for Pfeiffer Vacuum OMNISTAR

  • Page 1 OPERATING INSTRUCTIONS Translation of the original instructions OMNISTAR™ THERMOSTAR™ GSD 320 Gas Analysis System...

  • Page 2: Trademarks

    The information contained in this manual is believed to be accurate and reliable. However, Pfeiffer Vacuum assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.

  • Page 3: Table Of Contents

    Contents Contents Trademarks............2 Disclaimer .
  • Page 4 Initial start up ..........58 Vari OmniStar maintenance ....... . . 60 Overview of all parts in the inlet system .

  • Page 5: Introduction

    Introduction Introduction Product identification In all communications with Pfeiffer Vacuum, please specify the information on the product name plate. For convenient reference, copy that information into the parentheses provided below. Figure 1-1 Product Nameplate Pfeiffer Vacuum, D-35614 Asslar Model: (Model Number) (YYYY/MM)

  • Page 6: Intended Use

    Furthermore, the system is not explosion-proof according to ATEX. Contact your local Pfeiffer Vacuum representative for consultation regarding corrosive or flammable gases. NOTE If you have any questions, please do not hesitate to contact your local Pfeiffer Vacuum representative.

  • Page 7: Safety

    Safety Safety Instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO3864 and DIN4844. In...

  • Page 8: General Safety Instructions

    Any use of this equipment for purposes other than originally intended (including sampling of corrosive or flammable gases or sampling of liquids) requires the prior written approval by the Pfeiffer Vacuum parent company. Any use of the GSD 320 not corresponding to the (extended) scope of application is considered to be non-conforming and the manufacturer declines all liability resulting from such use.

  • Page 9: Gases

    If toxic or combustible gases are sampled with the GSD 320, the exhaust gases shall be treated and disposed of in conformity with the applicable regulations. Liability and warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the owner or third parties: ...

  • Page 10: Instrument Overview

    Instrument overview Instrument overview Front view Figure 3-1 Front View of GSD 320 Front panel controls Configurable and indicators capillary/heater (left/right/top) Arrow Keys Removable front panel for inlet access. Connections Figure 3-2 Connection to the GSD 320 Purge gas pressure switch User control (corrosive only) connection...

  • Page 11: Front Panel Controls And Indicators

    Instrument overview Front panel controls and indicators Figure 3-3 OmniStar front panel controls and indicators Arrow Keys Push buttons on the front panel can be used to operate the GSD 320 locally. The arrow keys can be used to highlight a specific option on the LCD Screen. When the desired option is highlighted, push OK SEL to confirm.
  • Page 12 Instrument overview Heaters Table 3-1 Heater Information Default Heater Type Max Temp Temp Additional Information 200°C Capillary Heater 200°C 200°C 350°C Capillary Heater 350°C 350°C Inlet Heater 150°C 120°C A warning appears above 120°C due to possible degradation of solenoid lifetime.

  • Page 13: Technical Data

    Analog scan: 20 ms/amu - 60 s/amu Bargraph scan: 20 ms/amu - 60 s/amu Capillary gas connection Material: stainless steel (OmniStar) or Quartz (ThermoStar) Sample pressure: 1000 mbar (Standard version) Gas flow rate: 1-2 sccm Length: 1 m (2 m available) ®...

  • Page 14: Process Gas (Measuring Gas)

    Technical data Process gas (measuring gas) Pressure: 500 … 1500 mbar Gas flow rate: 1 … 2 sccm OmniStar Capillary: outside ø1/16", inside ø0.125 mm ThermoStar Capillary: outside ø0.22 mm, inside ø0.15 mm  Impurities: particle size 1 Corrosive Service...

  • Page 15: Ambient Conditions

    Technical data 4.12 Ambient conditions Storage/transport: 5 … 45°C Operation: 12 … 35°C Relative humidity: maximum 80% up to 31°C, linearly decreasing to 50% at 40°C Application: indoors only Altitude: up to 2000 m Protection category: IP30 Pollution degree: 2 4.13 Noise level <50 dB in full operation 4.14 Power connection...

  • Page 16: Dimensions

    Technical data 4.18 Dimensions L x W x H: 545 x 305 x 395 mm Figure 4-1 Dimensions (mm) 545 mm 305 mm...

  • Page 17: Installation

    Installation Installation Carrying and transporting the unit Product weight > 25 kg. Always transport the GSD 320 with two persons by placing hands under the front and rear portion of the chassis. WARNING Physical injury can result if the product is lifted and carried by only one person. Adhere to the local regulations and take the necessary precautions when lifting and transporting the product.

  • Page 18: Ventilation Requirements

    Installation NOTE Store locking bolts and front panel transport locking rod and remount them if the GSD 320 is to be transported again. Ventilation requirements For adequate ventilation, maintain at least 25 mm clearance around the GSD 320. If the GSD 320 is inside an enclosure, the enclosure must be large or ventilated to provide adequate cooling by fan on the GSD 320.

  • Page 19: Connecting The Exhaust Gas Line

    Installation Connecting the exhaust gas line Extend the exhaust tube with a suitable coupling piece and tube and connect it to the exhaust duct. NOTE For corrosive or flammable applications, exhausting the GSD 320 C is required. For non-corrosive non-flammable applications, exhausting can be done in accordance to the facilities requirements.

  • Page 20: Connecting The Purge Gas

    Installation Connecting the purge gas Figure 5-4 Connecting the purge gas Digital purge gas pressure switch (corrosive version) Purge gas input (corrosive version) On corrosive pumping systems, the purge gas provides a continuous flow of dry gas to the bearings of the turbo molecular pump. The GSD 320 C has an internal regulator that is preset in the factory using a flow meter to produce the proper flow of nitrogen purge.

  • Page 21: Connecting The Capillary

    Installation Connecting the capillary OmniStar 1 Remove the cap. See Figure 5-5. Figure 5-5 Removing the cap 2 Connect the capillary to the measurement point. See Figure 5-6. Figure 5-6 Connecting the capillary to the measurement point CAUTION Firmly connect the front tip of the capillary heater tube to the measurement equipment.
  • Page 22 Installation ThermoStar DANGER DANGER: Hazardous gases. Process gases can cause health and environmental damage. Before admitting the process gas, make sure the gas connection is leak-tight. DANGER DANGER: Flammable gases. If incorrectly handled, flammable gases can cause health, environmental and material damage.
  • Page 23 Installation Removing the front 1 Grab the front cover at the top corners and gently pull the cover away from the frame until the top and middle spring pins release from the frame. See Figure 5-8. cover Figure 5-8 Removing the cover 2 Next grab the cover between the middle and bottom spring pins and pull the cover until the spring pins release from the frame.
  • Page 24 Installation 3 Disconnect the ribbon cable from the front panel circuit board. See Figure 5-10. Figure 5-10 Disconnect ribbon cable Pin 1 Red stripe oriented as shown 4 Use a 3 mm hex key (included in the ship kit) to remove the socket head cap screws (2) from the inlet oven.
  • Page 25 Installation Removing the 1 Remove the foam insulation from the inlet oven. If necessary, insert the short leg of the hex key through the insulation and gently pull the foam back. It's recommended insulation and to start at the top and work towards the bottom when pulling the foam insulation from adjusting the the oven.

  • Page 26: Connecting The Interfaces

    Installation Connecting the interfaces The GSD 320 has a TCP/IP ethernet interface for communication and two input/output (I/O) connectors, User I/O and Aux I/O, that allow GSD 320 interaction with customer supplied peripheral devices. Figure 5-14 User control and ethernet interface User I/O connection Aux I/O...
  • Page 27 Installation Aux I/O connection The Aux I/O connector provides an interface for electronic inputs to, and outputs from, the GSD 320, in addition to those of the User I/O connector. Number Description Analog Output, Channel 3 (+) Reference GND of the analog outputs Analog Input, Channel 3 (-) Analog Input, Channel 4 (-) Analog Input, Channel 5 (-)
  • Page 28 Installation User I/O and Aux I/O Details Digital Inputs are ACTIVE LOW. These inputs are pulled high internal to the GSD 320 Digital Inputs Controller Module, allowing a simple contact closure or TTL input to activate them. A contact closure is preferred to maintain ground isolation. Total Number of channels: 4 User I/O connector: Channel 1 Aux I/O connector: Channels 2-4...

  • Page 29: Power Connection

    Installation Power Connection Figure 5-15 Connecting the input power Mains switch Power input Voltage: 100, 120, 230 VAC Frequency: 50 … 60 Hz Power consumption: 550 VA 1 Turn off the mains switch. 2 Connect the power cord to source power. Refer to Figure 5-15.

  • Page 30: Initial Start Up

    Initial start up Initial start up Precondition Installation completed as described in Chapter Installation. Procedure 1 Turn the mains switch on. 2 Start the pumping system (as described in section 7.1 on page 31 for front panel operation or section 7.2 on page 44 for QUADERA).

  • Page 31: Operation

    Operation Operation Front panel operation The following section briefly describes the operation of the GSD 320 using the Front Panel interface. Figure 7-1 GSD 320 LEDs, keypad, and LCD  LEDs indicate the state of the sub-systems.  A keypad is used for navigating the menu (UP, DOWN, LEFT, or RIGHT) as well as selecting tasks and modifying data parameters.
  • Page 32 Operation  FUNCTIONS menu Select Setup FUNCTIONS.  Figure 7-4 Setup FUNCTIONS FUNCTIONS  Arrow pointing right is the current PARAMETERS selection SYSTEM STATUS The menu choices shown in Figure 7-5 Figure 7-6 are available. Figure 7-5 FUNCTIONS menu choices PUMP DOWN ...
  • Page 33 Operation Select FUNCTIONS  PUMP DOWN to pump the system down. PUMP DOWN  Figure 7-8 FUNCTIONS PUMP DOWN PUMP DOWN  SHUT DOWN TURN HEATERS ON TURN HEATERS OFF  The status line shows the System Pumping until the turbo pump is turned on. Figure 7-9 System Pumping 6.8E+02 mbar Capillary...
  • Page 34 Operation Select FUNCTIONS  SHUT DOWN to shut the system down. SHUT DOWN  Figure 7-11 FUNCTIONS Shut Down PUMP DOWN SHUT DOWN  TURN HEATERS ON TURN HEATERS OFF  The following Warning screen is displayed. Figure 7-12 Shut down warning screens **** WARNING **** Turning off Vacuum with Sensor ON...
  • Page 35 Operation  PARAMETERS menu Figure 7-14 Setup Screen PARAMETERS choices FUNCTIONS PARAMETERS SYSTEM STATUS The PARAMETERS menu screens are displayed. See Figure 7-15 Figure 7-16. Figure 7-15 PARAMETERS menu screen 1 INLET HTR SETPT  CAP HTR SETPT BAKEOUT START BAKEOUT DURATION ...
  • Page 36 Operation 1 Select PARAMETERS  INLET HTR SETPT. Example: changing the inlet heater set point  Figure 7-17 PARAMETERS INLET HTR SETPT INLET HTR SETPT  CAP HTR SETPT BAKEOUT START BAKEOUT DURATION  2 Press OK SEL. . The INLET HTR SETPT is displayed. Figure 7-18 INLET HTR SETPT display 150 C ...
  • Page 37 Operation  SYSTEM menu Figure 7-19 Setup SYSTEM choices FUNCTIONS PARAMETERS SYSTEM STATUS  Selecting Setup SYSTEM will display the following message regarding access to advanced functionality. Figure 7-20 SYSTEM menu screen **** NOTICE **** Service Access Not Authorized Press OK NOTE For assistance with advanced system functionality, please contact your local Pfeiffer Vacuum representative.
  • Page 38 Operation  STATUS-SYSTEM menu Figure 7-23 STATUS SYSTEM choices SYSTEM  TURBO GSD320 Info  Figure 7-24 STATUS-SYSTEM menu screen 1 TURBO INLET BYPASS  Figure 7-25 STATUS-SYSTEM menu screen 2 CAL VLVE  INLET HTR CAP HTR MAN HTR ...
  • Page 39 Operation Figure 7-29 menu screen 3 BottomPlate 34 C  Bearing 34 C Controller 45 C Motor 42 C  Figure 7-30 menu screen 4 Turbo Errors  Errors NONE Press any key to exit  Figure 7-31 STATUS GSD320 Info GSD 320 info menu choices SYSTEM...
  • Page 40 Operation Error Turbopump If a Turbo Pump error occurs, an error message will display. The error number can be referenced in the Turbo Pump User’s Manual. Figure 7-34 TURBO pump error screen 9.2E+00 mbar Turbo 898 Hz (52200 RPM) Turbo Err006 ...
  • Page 41 Operation Reminder to clean the The filters on the side of the GSD 320 must be cleaned or replaced every three months. After three months has elapsed, the following reminder to clean or replace the filters is GSD 320 filters displayed.
  • Page 42 Operation Changing the IP address NOTE The GSD 320 is shipped with default addresses in the 192.168.x.x range. Do not change these addresses until instructed so in System setup on page  1 Select PARAMETERS GSD320 IP Address, press OK SEL. ...
  • Page 43 Operation 5 If the IP configuration fails, a Failure screen is displayed. The IP address is reset to its previous setting. Figure 7-45 IP Address configuration failure *** FAILURE*** IP Configuration of GSD320 failed 010.211.070.109 Can not bakeout if If the System is not under vacuum, the Manifold Heater cannot be turned ON. If the Bake Out selection is made, an Attention message is displayed, and Bake Out is not permitted.

  • Page 44: Operation From Quadera

    Operation Operation from QUADERA This chapter provides instructions for setting up the GSD 320 system and the QMG 220, which is internal to the system, and running the GSD 320 using the QUADERA Add-in. These instructions assume that QUADERA 4.00 or higher is installed, that QUADERA is licensed to use the GSD 320 Add-in, and that the computer and GSD 320 are connected via a network or Ethernet crossover cable.
  • Page 45 Operation System setup To use the GSD 320 with QUADERA, the QMG 220 and GSD 320 Controller must be configured. Both devices are Ethernet based, so they each require a unique IP Address on the same network. The factory default IP Addresses are: QMG 220 .
  • Page 46 Operation NOTE If the IP Address is changed using the step above then you must wait at least 6 minutes before continuing. 8 Close the Configure dialog. 9 Press OK in the Device Setup dialog. Ignore any error message that is displayed and press OK.
  • Page 47 Operation 15 Select the GSD 320 check box and press the OK button to load the Add-in (see Figure 7-50). The main form of the GSD 320 Add-in will load. See Figure 7-51. Figure 7-50 Selecting the GSD 320 Add-in to Start Figure 7-51 GSD 320 Add-in Main Form...
  • Page 48 Operation 16 Pick the GSD 320 Device from the Device drop down shown in Figure 7-51. If no Device is shown, press the Refresh button multiple times until the Device is shown in the drop down list. If the GSD 320 appears in the Device list, then continue with step 22 on page 50.
  • Page 49 Operation 18 Press the Find by IP button shown in Figure 7-52. 19 Manually enter the GSD 320 IP address that is appropriate for your computer or network application. 20 Click on the Retrieve button as shown in Figure 7-53. Figure 7-53 Configuration Dialog Showing the Retrieve Button 21 After clicking on the Retrieve button Figure 7-54...
  • Page 50 Operation 22 Press the Config button as shown in Figure 7-51 to open the Configure dialog shown below in Figure 7-52. 23 Press the Edit button shown in Figure 7-54. Figure 7-54 Configuration Dialog showing the Edit Button 24 Change the QMG 220 IP Address to the same IP Address set in step 7 on page This step is not actually changing the QMG 220 IP Address;...
  • Page 51 Operation 28 Press the Verify button. QUADERA will connect to the Device and verify the GSD 320 and QMG 220. NOTE This step is critical because it establishes the system relationship between the GSD 320 and QMG 220. 29 Close the Configure dialog. The system is now ready to operate.
  • Page 52 Operation Connect ......Connects QUADERA to the GSD 320 for communications and control. When connected, this button will display and function as 'Disconnect'.
  • Page 53 Operation ......Electron Multiplier On Figure 7-55 Bake Out Configuration The following settings are for configuring the Bake Out. These settings are interdependent, i.e.
  • Page 54 Operation The following settings are displayed to show the current Bake Out configuration. The current Bake Out configuration is contained within the GSD 320 and remains in effect until it is changed with the Set New Values button: Begin in ......A count down in hours and minutes until the Bake Out will start.

  • Page 55: Vari Omnistar

    Safety. Intended Use The GSD 320 Vari OmniStar with control valve EVR 116 and RVC 300 valve controller is designed for manual control as well as automatic analysis of non-corrosive and non- flammable gases (subject to the material compatibility, TLVs as well as Ex-limits).

  • Page 56: Design

    The Vari OmniStar is designed to track gradual changes in pressure and may not be able to handle extreme pressure changes or bursts.

  • Page 57: Installation

    Installation Connecting the Vari The Vari OmniStar is connected to the measurement point with the DN 16 KF flange on the tube. The connecting line should be as short as possible to minimize additional dead OmniStar to the volume and to obtain minimum response time.

  • Page 58: Initial Start Up

    For changing parameter settings, refer to the RVC 300 Controller Operating Manual. Temperature control The inlet of the Vari OmniStar may be heated to a temperature of up to 70°C to prevent condensation of gases. Turn the inlet heater on using the front panel of the Vari OmniStar.
  • Page 59 Vari OmniStar Pressure Regulation The REGULATION operation screen when pumped down is shown in Figure 8-5. Screen The symbols >+25+< are shown on the front panel to demonstrate how open or closed the valve is, and whether or not the analyzer pressure is in or out of regulation. The plus signs and inward arrows indicate the pressure as being in regulation.

  • Page 60: Vari Omnistar Maintenance

    The control valve has a finite reaction time to compensate for pressure changes at the measurement point of the Vari OmniStar. If the pressure increases too fast, then the control valve may not be quick enough to reduce the conductance. This may result in an overpressure condition in the analysis chamber of the Vari OmniStar.

  • Page 61: Overview Of All Parts In The Inlet System

    Vari OmniStar Overview of all parts in the inlet system Figure 8-9 shows a completely disassembled inlet system. Figure 8-9 Main components of the inlet system Control Valve EVR 116 Special Interface Mini Valve Electromagnetic with EVI 005 MI (Bypass) Valve...
  • Page 62 Vari OmniStar 1 Remove the front and main covers from the GSD 320. See Figure 8-10. Figure 8-10 Removing the covers Top and Right Panel Guards Front Panel and Insulation 2 Remove left, right, and top access guards. 3 Remove the front panel.
  • Page 63 Vari OmniStar Figure 8-12 Left side panel Assembly Heat-Sink Block Heat-Shield Plate 11 Remove the top solenoid by removing the nut and two washers. See Figure 8-13. Figure 8-13 Removing top solenoid. Solenoid EVR116 Assembly 12 Remove the internal and external foam insulation from the bottom of the oven box.
  • Page 64 Vari OmniStar 14 Remove and replace the EVR 116 by following the steps below. Be sure to keep the removed parts for the EVR116 replacement. 15 Uninstall the tube from the EVR 116 pressure-regulated valve. 16 Uninstall the pressure-regulating valve from the gas inlet block by removing three screws.

  • Page 65: Care Of The Gsd 320

    Care of the GSD 320 Maintenance courses Pfeiffer Vacuum offers maintenance courses for this product. Thorough examples and more detailed documentation from these courses enable the user to keep the equipment in proper working condition. For additional information, please contact your local Pfeiffer Vacuum service center.

  • Page 66: Maintenance

    Maintenance Maintenance 10.1 Shortening the Capillary (Omnistar) Preconditions  System switched off Capillary detached from measurement point   Length of capillary still adequate after shortening Required tools  Tube cutter, capillary cutting tool or knife file. Procedure 1 Make two opposing small indentations. See Figure 10-1.

  • Page 67: Shortening The Capillary (Thermostar)

    Maintenance 4 Check the pressure in the analysis chamber. The total pressure of the analysis chamber is displayed on the front panel of the GSD 320, or you can determine the total pressure by using the software program. The displayed pressure should be 1 x 10 mbar ...

  • Page 68: Capillary Replacement Instructions

    Maintenance 2 Break the capillary at the point notched previously. See Figure 10-4. Figure 10-4 Breaking the capillary 3 Turn on the system. Wait for 10 minutes (turbo pump acceleration time). 4 Check the pressure in the analysis chamber. The total pressure of the analysis chamber is displayed on the front panel of the GSD 320, or you can determine the total pressure by using the software program.
  • Page 69 Maintenance 4 Remove the front cover of the GSD 320 as described in Removing the front cover on page 23. Next remove the heater box cover from the inlet oven, as described in Removing the inlet heater box on page 5 Remove the insulation as described in Removing the insulation and adjusting the capillary on page...
  • Page 70 50 mm of the quartz capillary extends beyond the end of the heater. Coil the excess capillary in the oven. 7 Changing a stainless steel capillary (OmniStar) only: If necessary, cut off the fitting used to attach the capillary to the measurement point.
  • Page 71 Maintenance With the J shaped tube and hex union still attached to the capillary, pull the capillary out of the heater through the front oven. See Figure 10-8. Figure 10-8 Remove stainless steel capillary assembly J Shaped Tube Union Disconnect the hex union from the old capillary. NOTE Ensure that the shape of J shaped capillary is not modified.
  • Page 72 Maintenance 8 Install the foam insulation in the oven. Insert the bottom edge of the foam first so that the foam is held in place between the oven wall and plate. Next, insert the top half of the foam into the oven. Ensure that the quartz capillary is not pinched or kinked while installing the insulation.

  • Page 73: Inlet Heater Orientation Instructions

    Maintenance 10 Connect the ribbon cable to the front panel. See Figure 10-12. Figure 10-12 Re-install front panel ribbon cable Pin 1 Red stripe oriented as shown 11 Re-install the front panel in the following manner: 11a Insert the top spring pins into the frame so they engage slightly in their mating holes.
  • Page 74 6 Remove the front panel and disconnect the capillary as described in step 6 on page for ThermoStar or step 7 on page 70 for OmniStar. 7 Proceed as follows to change the heater inlet orientation from side to top. See Figure 10-14 Figure 10-15.
  • Page 75 Remove the blank panels from the top and side of the oven by removing (4) socket head cap screws from each panel. For OmniStar units, the inlet solenoid valve must be rotated 180 degrees so that the electrical terminals are opposite of the heater line. Use a 13 mm wrench to remove the hex nut on the solenoid valve.
  • Page 76 Maintenance Move the panel with the heater to the side of the GSD 320 and fasten in place with four socket head cap screws. NOTE There is slack in the length of the heater power cords for moving the panel, but it might be necessary pull additional length from inside the GSD 320.

  • Page 77: Removing The Prismaplus From The Gsd 320

    Maintenance 10.5 Removing the PrismaPlus from the GSD 320 The PrismaPlus must be removed from the GSD 320 to replace the filament. Tools Required  M2 Hex Key  M4 Hex Key M5 Hex Key  Procedure 1 Execute the GSD <Shutdown> function. 2 Remove mains power connection from GSD 320.
  • Page 78 Maintenance 5 Slide the cover back and off the GSD 320. As shown in Figure 10-18. Figure 10-18 Sliding the cover back and off of the GSD 320 6 Loosen the (2) socket head cap screws with the M5 hex key. The screws are shown Figure 10-19.
  • Page 79 Maintenance 7 Slide the sensor away from the GSD 320 as seen in Figure 10-20. Figure 10-20 Removing the PrismaPlus Sensor 8 Disconnect the ethernet, analog input, digital input, and power supply cables shown Figure 10-21. Figure 10-21 Removing the Cables Power Supply Analog Input Cable...

  • Page 80: Filament Replacement

    Maintenance 10.6 Filament replacement NOTE Instructions for replacing the filament for a Closed HS Ion Source can be found in the PrismaPlus Operating Manual BG 5214. 10.7 Filter Mat Cleaning the The filter mat at the air entrance has to be cleaned if a substantial layer of dust has accumulated.
  • Page 81 Maintenance 11 Put the GSD 320 back into service. 12 Dispose of the used filter mat in accordance with the local regulations. Figure 10-22 Cleaning and replacing the filter mats. Filter Mat Holder Filter Mat Lower Screws...

  • Page 82: Replacing The Orifice Of The Omnistar

    When working in a vacuum area, always use clean tools, and wear lint free gloves. Tools required NOTE The OmniStar gas inlet kit is required for orifice replacement on the GSD 320 OmniStar. Ordering Number: PT 162 001  Special tool for GSD 320 ...
  • Page 83 Maintenance 7 Detach the capillary from the gas inlet valve using a 1/4 in open-end wrench. 8 Use the M2.5 hex key to remove the (2) fixing screws from the gas inlet flange. The two fixing screws are shown in Figure 10-23.
  • Page 84 Maintenance 13 Replace the plunger with spring, seal, and O-ring 12.42 X 1.78 (Refer to Figure 10-24). Check the sealing surfaces and clean them if necessary. Figure 10-24 Removing the plunger 1 ..O-Ring 2 .
  • Page 85 Maintenance Figure 10-25 Valve Assembly 1 ..O-ring 9.25 x 1.78 2 ..Retaining Screw 3 ..Orifice 4 ..O-ring 12.42 X 1.78 5 .

  • Page 86: Replacing The Orifice Of The Thermostar

    Maintenance 10.9 Replacing the orifice of the ThermoStar WARNING When working in a vacuum area, always wear lint free gloves and use clean tools. Tools required NOTE A ThermoStar gas inlet kit is required for orifice replacement on the GSD 320 ThermoStar.
  • Page 87 Maintenance 11 Replace the O-rings 9.25 x 1.78 and 18.77 x 1.78 (See Figure 10-26). Check the sealing surfaces of the gas inlet flange and clean them if necessary. Figure 10-26 Gas inlet ThermoStar 1 ..Orifice 2 .

  • Page 88: Diaphragm Pump Maintenance

    Change the turbo pump bearing at least every four years. Contact your Pfeiffer  Vacuum service location.  Clarify shorter change intervals for extreme loads or impure processes with your local Pfeiffer Vacuum Service.  For all other cleaning, maintenance or repair work, please contact your Pfeiffer Vacuum service location.

  • Page 89: Maintenance And Service Schedule

    Maintenance...
  • Page 90 Maintenance...

  • Page 91: Accessories

    (or compatible products of 7 Argent Place, other manufacturers) Ringwood Vic 3134, Australia or any of their national distributors Capillary heater adapter BG 442 778 -T Pfeiffer Vacuum Figure 11-1 Capillary heater adapter Capillary heater adapter Capillary heater tube Capillary Fitting...

  • Page 92: Spare Parts

    12.2 Parts for both systems Description Ordering Number Tungsten Filament (standard) BN 846 281 -T Iridium yttriated BN 846 395 -T 12.3 OmniStar Description Ordering Number Gas inlet consumables set, consisting of: PT 162 001 Stainless steel capillary 0.12 mm...

  • Page 93: Service

    Service Service Pfeiffer Vacuum offers first-class service!  Operating fluid and bearing change on the spot by Pfeiffer Vacuum Field Service  Maintenance / repair in the nearby Service Center or Serviceability  Fast replacement with exchange products in mint condition ...

  • Page 94: Disposal

    Disposal Disposal DANGER Danger: Contaminated parts. Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING Warning: Substances detrimental to the environment.

  • Page 95: Appendix Arvc 300 Settings

    RVC 300 Settings Appendix A RVC 300 Settings Settings for the RVC 300 Valve Controller, Firmware Version 2.11 Configuration Mode ... . Pressure Valve ... . EVR 116 STD Sensor .

  • Page 96: Serial Interface

    RVC 300 Settings AO1 ..Signal sensor AO2 ..Valve signal AO 3 ..Valve position AO 4 .

  • Page 97: Declaration Of Conformity

    ICES-001 Issue 4 ISM emission requirements (Canada) Immunity: EN 61326-1:2013 (General EMC) Class A EMC - Measurement, Control & Laboratory Equipment RoHS: Fully Compliant Signatures: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany (Dr. Ulrich von Hülsen) 2016-08-17 Managing Director...
  • Page 98 VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio.

This manual is also suitable for:

Thermostar

Table of Contents

Save PDF