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Pfeiffer Vacuum QMA 4X0 manual available for free PDF download: Operating Instructions Manual
Pfeiffer Vacuum QMA 4X0 Operating Instructions Manual (52 pages)
Quadrupole Analyzer for QMG 700 HiQuad
Brand:
Pfeiffer Vacuum
| Category:
Measuring Instruments
| Size: 3.89 MB
Table of Contents
Table of Contents
3
About this Manual
8
Validity
8
Applicable Documents
8
Variants
8
Target Group
8
Conventions
9
Instructions in the Text
9
Pictographs
9
Stickers on the Product
9
Abbreviations
9
Trademark Proof
10
Safety
11
General Safety Information
11
Safety Instructions
11
Safety Precautions
13
Proper Use
13
Foreseeable Improper Use
13
Responsibilities and Warranty
14
Owner Requirements
14
Personnel Qualification
14
Ensuring Personnel Qualification
14
Personnel Qualification for Maintenance and Repair
15
Advanced Training with Pfeiffer Vacuum
15
Operator Requirements
15
Product Description
16
Structure
16
Ion Sources
16
Fig. 1: QMA with 90° Off-Axis SEM
16
Axial Ion Source
17
Fig. 2: Electrode Arrangement and Potential Curve of the Axial Ion Source
17
Crossbeam Ion Source
18
Grid Ion Source
19
Fig. 3: Electrode Arrangement and Potential Curve of the Crossbeam Ion Source
19
Fig. 4: Electrode Arrangement and Potential Curve of the Grid Ion Source
20
Mass Filter
21
Qma 430
21
Qma 400
21
Qma 410
21
Secondary Electron Multiplier
21
Sev 217
21
Fig. 5: SEV 217
21
Detecting Negative Ions
22
Sev 218
22
Overview of the Variants
22
Cathode Materials
22
Fig. 6: Detecting Negative Ions
22
Fig. 7: SEV 218
22
Electron Collimation Magnet
23
90° Deflection
23
90° Deflection with Deflection Voltage
23
Faraday Cup
23
Vacuum-Annealed QMA
23
Fig. 8: 90° Deflection with Deflection Voltage
23
Identifying the Product
24
Scope of Delivery
24
Transport and Storage
25
Transporting the Product
25
Storing the Product
25
Installation
26
Preparing Analyzer for Installation
26
Choosing Mounting Orientation
26
Preparing Gas Inlet System
27
Installing Support Plate
27
Fig. 9: Correct Alignment on the Flange of the QMA with C/B Ion Source
27
Fig. 10: Installing Support Plate
27
Using Assembling Trestle
28
Removing Transportation Protection
28
Fig. 11: Analyzer on the Assembling Trestle
28
Removing Protective Pipe
29
Fig. 12: Removing Transportation Protection
29
Fig. 13: Removing Protective Pipe
29
Installing Electron Collimation Magnets
30
Fig. 14: Installing Electron Collimation Magnets
30
Installing Analyzer
31
Fig. 15: Holding Vertical Seal with Knife Blade
31
Connecting the Gas Inlet System
32
Installing HF Generator QMH 40X
32
Installing EP 422 Electrometer Pre-Amplifier on Analyzer
32
Removing/Installing SEM Connector Plate
32
Fig. 16: Protective Pipe
32
Mounting Ion Counter Pre-Amplifier CP 400
33
Establishing Cable Connections of Components
33
Fig. 17: SEM Connector Plate
33
Commissioning
34
Operation
35
Adjusting Ion Source
35
Adjusting the Axial Ion Source
35
Adjusting Crossbeam Ion Source
35
Adjusting Grid Ion Source
36
Operating Analyzer at High Temperature
36
Removing/Installing Connector Plates
36
Fig. 18: Connector Plates
36
Baking out Analyzer
37
Assessing Sensitivity
37
Secondary Electron Multiplier (SEM)
37
Surface Ions
38
Using Degas Function
38
Determining Optimal Parameter Values
38
Selecting Recommended Operating Modes
39
Fig. 19: Default Parameters of the Ion Source Tuning Program of the Quadera Soft
39
Fig. 20: Optimized Ion Source Parameters for Spectrum with Nitrogen and Oxygen
39
Optimization with Test Gas
40
Configuring "Emission" Ion Source Parameter
40
Configuring "Protection Current" Ion Source Parameter
40
Configuring "V1 Ion Reference" Ion Source Parameter
40
Configuring "V2 Cathode" Ion Source Parameter
41
Configuring "V3 Focus" Ion Source Parameter
41
Configuring "V4 Field Axis" Ion Source Parameter
41
Fig. 21: Frayed Peaks
41
Fig. 22: Reducing "Field Axis
41
Configuring "V5 Extraction" Ion Source Parameter
42
10Configuring "V6/V7 Inner Deflection" Ion Source Parameter
42
11Configuring "V8 Reserve" Ion Source Parameter
42
12Configuring "V9 Wehnelt" Ion Source Parameter
42
13Adjusting Resolution
42
14Adapting HF Cable Polarity
42
Shipping
43
Recycling and Disposal
44
General Disposal Information
44
Dispose of a Mass Spectrometer System
44
Service Solutions by Pfeiffer Vacuum
45
Ordering Information
47
Ordering Parts
47
Ordering Spare Parts
47
Technical Data and Dimensions
48
Technical Data
48
Fig. 23: Dimensions
49
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