Balzers Quadstar™ 422 Setup - Pfeiffer Vacuum OmniStar GSD 300 O1 Operating Manual

4.2 Balzers Quadstar™ 422 Setup
The Balzers Quadstar™ 422 needs certain GSD 300 specific
adaptations which are to be performed or checked after the
installation. Therefore, carefully follow the instructions given
below before performing any measurements.
Precondition
•
Balzers Quadstar™ 422 installed (
Procedure
Define the QMS configuration
•
Start
•
In the menu bar choose <Config>
•
Choose <QMS>
•
Accept the following configuration:
Make sure that you set up the RF 20X in accordance
with the mass range of your GSD 300
•
Close this window with <OK>
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&
→
corresponding )
Define the labels for the digital inputs/outputs
•
Start
•
In the menu bar choose <Config>
•
Choose <DI/DO Identifications>
•
Define the following labels for DI00 and DO01:
•
•
Close the window with <OK>
•
Quit the parameter setup program
Define the switching threshold for SEM/Fil protection
The monitoring of the admissible maximum pressure for
Filament and SEM is performed as a standard feature by
the PKR 250 gauge. The maximum admissible pressure is
defined in the TuneUp program. If the gauge needs to be
switched off for special measurement functions, the
maximum pressure is monitored via the turbo pump speed
(fixed threshold at 90%) rather than via the total pressure.
•
Start
•
In the menu bar choose <Tune>
•
Choose <Ion Source>, the <Tune Ion Source QMA 200>
window is displayed
•
Choose the <OFF above> parameter
•
Enter the value <2.00E-4>
•
Close the <Tune Ion Source QMA 200> window
•
Answer the prompt whether or not the change is to be
saved with <YES>
•
Quit the <TuneUp> program
Initial start up 19