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7.9.1 Selecting recommended operating modes
Fig. 19:
Fig. 20:
Using "Ion Source Tuning"
The "Mass Mode: SCAN-N" is highly suitable for optimization tasks, as it shows the unfiltered peaks.
1. Use "Autorange Mode": AUTO.
2. Select a small "Width" (5 – 10 u).
3. Set "First" to a value where the peaks of interest are in the middle of the displayed range.
4. For the optimization, first use "Detector Type: FARADAY" and then "SEM".
5. Set the deflection voltage at "Inner Deflection"
6. Prior to the optimization, let the device warm up for 30 minutes with the emission switched on.
8)
Default parameters of the Ion Source Tuning program of the Quadera software
Optimized ion source parameters for spectrum with nitrogen and oxygen, using a
CB-IQ as an example
– The logarithmic 3-decade visualization of the ion current makes it possible to clearly see the
resolution, the peak shape and peak height. Depending on the aim of the optimization, a line-
ar or logarithmic visualization across e.g. 6 decades can be more advantageous.
– Wait for the initial outgassing process.
Only in the case of detector type SEM
8)
and readjust "Field Axis" slightly, if necessary.
Operation
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