Pfeiffer Vacuum OMNISTAR GSD 350 Operating Instructions Manual
Gas analysis system
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Summary of Contents for Pfeiffer Vacuum OMNISTAR GSD 350
- Page 1 OPERATING INSTRUCTIONS Translation of the Original GSD 350 OMNISTAR ∣ THERMOSTAR Gas analysis system...
- Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new gas analysis system is designed to support you in your individual application with full performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
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Page 3: Table Of Contents
Limits of use of the product Proper use Foreseeable misuse Personnel qualification 2.7.1 Ensuring personnel qualification 2.7.2 Personnel qualification for maintenance and repair 2.7.3 Advanced training with Pfeiffer Vacuum Product description Functional description 3.1.1 OmniStar 3.1.2 ThermoStar 3.1.3 Corrosive gas version Controls and indicators 3.2.1 Version with display... - Page 4 Table of contents 5.4.1 Trimming the exhaust gas hose 5.4.2 Connecting exhaust gas hose Connecting the sealing gas line 5.5.1 Trimming the sealing gas hose 5.5.2 Connecting the sealing gas line Connecting the capillary 5.6.1 Connecting the OmniStar stainless steel capillary 5.6.2 Connecting the ThermoStar quartz capillary Adapting position of the capillary hose Establishing a network connection...
- Page 5 Table of contents 10.2.2Removing/attaching side covers 10.2.3Removing/attaching housing cover 10.2.4Cleaning housing parts 10.2.5Cleaning the protection screens on the fans 10.3 Maintaining the high vacuum system 10.3.1Replacing operating fluid reservoir on turbopump 10.3.2Replacing the venting valve 10.4 Maintaining the fore-vacuum system 10.4.1Replacing diaphragm pump 10.4.2Replacing diaphragm pump diaphragm 10.5 Maintaining the gas analysis unit...
- Page 6 Table of contents Shipping Recycling and disposal 13.1 General disposal information 13.2 Dispose of a gas analysis system Service solutions by Pfeiffer Vacuum Spare parts Special tool Accessories 17.1 Accessory information 17.2 Ordering accessories Technical data and dimensions 18.1 General 18.2 Technical data...
- Page 7 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: Variants Tbl. 3: Features of variants Tbl. 4: Abbreviations used Tbl. 5: Permissible ambient conditions Tbl. 6: Symbols and colors of the status and components icons Tbl. 7: Status LEDs and their meanings Tbl.
- Page 8 List of figures List of figures Fig. 1: Position of the stickers on the product Fig. 2: Vacuum diagram of the OmniStar Fig. 3: Vacuum diagram of ThermoStar Fig. 4: Additionally sealing gas supply in corrosive gas version Fig. 5: Display with operator keys Fig.
- Page 9 List of figures Fig. 57: Replacing diaphragm pump Fig. 58: Connect the exhaust gas and intake hose, and draw off Fig. 59: PrismaPro Quadrupole mass spectrometer Fig. 60: Groove on analyzer Fig. 61: Total pressure gauge on the gas analysis unit Fig.
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Page 10: About This Manual
Declaration of conformity (part of these instructions) Tbl. 1: Applicable documents You can find these documents in the Pfeiffer Vacuum Download Center. Only for version with calibration unit only for corrosive gas version Only for version with calibration unit only for corrosive gas version... -
Page 11: Variants
Features of variants You can find the part number on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale. Dimensions are in mm unless stated otherwise. -
Page 12: Conventions
About this manual ● Transportation ● Setup (Installation) ● Usage and operation ● Decommissioning ● Maintenance and cleaning ● Storage or disposal The work described in this document is only permitted to be performed by persons with the appropriate technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac- uum. -
Page 13: Orientation Left/Right
About this manual Warning hot surface This sticker warns of injuries caused by high temperatures as a result of contact without protection during operation. VSM sticker This sticker contains links to Dreebit virtual service manage- www.vsm-cloud.com ment. Fig. 1: Position of the stickers on the product 1 "Warning hot surface"... -
Page 14: Trademark Proof
1.4 Trademark proof ● Windows ® ® and Internet Explorer are trademarks of Microsoft Corporation. ● OmniStar ® ® ® , ThermoStar and PrismaPro are trademarks of Pfeiffer Vacuum GmbH. ● Swagelok ® is a registered trade name of Swagelok Company. 14/118... -
Page 15: Safety
Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during transport WARNING Danger of serious injury due to falling objects Due to falling objects there is a risk of injuries to limbs through to broken bones. - Page 16 ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
- Page 17 Safety WARNING Danger of poisoning due to toxic process media escaping from the exhaust pipe During operation with no exhaust line, the vacuum pump allows exhaust gases and vapors to escape freely into the air. There is a risk of injury and fatality due to poisoning in processes with toxic process media.
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Page 18: Safety Precautions
Safety WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage. -
Page 19: Limits Of Use Of The Product
► Comply with the application limits. ► Observe the technical data. ► Contact Pfeiffer Vacuum for advice on corrosive or flammable gases. 2.6 Foreseeable misuse Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular: ●... -
Page 20: Personnel Qualification
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.7.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training. -
Page 21: Product Description
Product description 3 Product description 3.1 Functional description The GSD 350 can analyze multiple gas components simultaneously. The gas to be analyzed passes through a capillary to the mass spectrometer, which operates in a vacuum. The mass spectrometer ion- izes a portion of the gas and both separates and detects the different gas components based on their different mass/charge ratio. -
Page 22: Thermostar
Product description 3.1.2 ThermoStar Fig. 3: Vacuum diagram of ThermoStar 1 Analyzer QMA 250 M Turbopump 2 Ion source Diaphragm pump 3 Vacuum chamber heating Exhaust gas connection 4 Gas inlet heating Venting valve 5 Quartz capillary with heating Electronic unit QME 250 6 Shut-off valve EVI 005 M on calibration unit Total pressure gauge 7 Calibration unit (optional) -
Page 23: Version Without Display
Product description reflect the display. Unavailable functions are grayed. On the “Messages” screen, inactive message lev- els are also shown as gray buttons. Warning messages or fault messages In the event of a warning or malfunction message, a warning triangle appears at the top right of the display. -
Page 24: Layout Of The Unit
Product description Function Description Filament The LED is lit when there is a flow at the filament. Purge The LED is lit if the sealing gas is connected; it flashes if sealing gas monitor- ing is overridden (for service work only). Tbl. -
Page 25: Gas Inlet System
Product description www.vsm-cloud.com D-35614 Asslar Mod. GSD 350 PT Q..Input Made in Germany 2022/02 Fig. 7: Connection panel with interfaces and connections 1 Grounding connection (functional earth) Digital pressure switch for sealing gas 2 Mains connection with power switch Ethernet connection (RJ-45) 3 Exhaust gas connection "USER IO"... -
Page 26: Calibration Unit
PFTBA has the disadvantage that it can be traced in the unit's background signal for a very long time after shutting off the calibration valve. If this interferes with the intended gas anal- ysis, Pfeiffer Vacuum recommends baking out the vacuum chamber after calibration with PFTBA. -
Page 27: High Vacuum Side System
Product description Fig. 9: Calibration unit at the gas inlet 1 Gas inlet Shut-off valve EVI 005 M 2 1/8" stainless steel line Glass storage vessel for PFTBA calibration medium 3.3.5 High vacuum side system The turbopump functions according to the SplitFlow principle and maintains an operating pressure of <... -
Page 28: Sealing Gas System
Product description 3.3.7 Sealing gas system In the corrosive gas version, the sealing gas protects the turbopump's bearings and ensures that the corrosive gas is fed to the diaphragm pump in a diluted form. This improves the service life of the dia- phragm pump and prevents vapors condensing in the diaphragm pump. -
Page 29: Heating And Insulation
Product description ment in the pressure range from 1000 to 5 × 10 hPa independently of the mass spectrometer. The total pressure measured can be read off the display, the web UI, and in the PV MassSpec software. Fig. 12: Gas analysis unit components 1 Total pressure gauge Venting valve... -
Page 30: Fig. 13: Vacuum Chamber Heating And Insulation
Product description ● You can select a duration of 1 to 24 hours for baking out. The standard value for baking out is 4 hours. ● You can terminate the baking out process at any time via the control on the unit. ●... -
Page 31: 10Electronic Components
Product description Fig. 15: Capillary heating 1 Heating coil Temperature sensor PT100 2 Insulation Electrical connection for heating 3 Capillary guide Fastener on unit for 200 °C variant: PTFE hose for 350 °C variant: Stainless steel pipe 3.3.10 Electronic components Electronic unit QME 250 The QME 250 electronic unit is mounted on the QMA 250 M analyzer and contains the mass spectrom- eter interfaces. -
Page 32: Identifying The Product
4 Diaphragm pump electronic drive unit 3.4 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. 1. Read the data on the product rating plate. 2. Record this data. -
Page 33: Fig. 17: Assembly Aid For Analyzer Qma
Product description ● Ethernet cable, 3 m length, red ● Mains cable ● Operating instructions ─ GSD 350 OmniStar/ThermoStar ─ Components (see chapter “Applicable documents”, page 10) Fig. 17: Assembly aid for analyzer QMA 250 Fig. 18: Special tool for the orifice of the gas inlet system Fig. -
Page 34: Transport And Storage
Transport and storage 4 Transport and storage WARNING Danger of injury due to lifting heavy loads The product is heavy; it weighs up to 26 kg depending on the version. If one person lifts the product incorrectly without help, this will lead to injuries. ►... -
Page 35: Storing Product
Transport and storage 4. Always install all transport protection before transport. 5. Only remove the present protective cover immediately prior to installation. Installing transport protection for the diaphragm pump 1. Slightly raise the left side of the GSD 350. 2. Fully screw in the transport protection. 4.2 Storing product NOTICE Damage caused by improper storage... -
Page 36: Installation
Installation 5 Installation 5.1 Ensuring ventilation NOTICE Damage caused by overheating The ambient temperature must not exceed the permissible operating temperature of the device. ► Make sure there is unobstructed circulation of air when installing the device. ► Periodically check and clean the installed air filter, if necessary. Fig. -
Page 37: Establishing The Ethernet Connection
Installation Procedure The transport protection is located on the underside of the GSD 350. Pfeiffer Vacuum has marked the transport protection with a lug ex factory. 1. Set up the GSD 350 unit at the place of use. 2. Slightly raise the left side of the GSD 350 and reach under the unit. -
Page 38: Connecting The Sealing Gas Line
Installation Required material ● PE exhaust hose (exterior Ø = 6 mm) ● optional: additional IQS or Schott plug-and-socket connections IQS plug-and-socket connections IQS plug-and-socket connections have 2 pressure points: Holding claw and seal. The hose is properly connected when both pressure points are passed. Fig. -
Page 39: Connecting The Capillary
Installation Required material ● PE sealing gas hose (exterior Ø = 4 mm) ● optional: additional IQS or Schott plug-and-socket connections IQS plug-and-socket connections IQS plug-and-socket connections have 2 pressure points: Holding claw and seal. The hose is properly connected when both pressure points are passed. Fig. -
Page 40: Connecting The Omnistar Stainless Steel Capillary
To optimize the orientation of the capillary tube for specific applications, the capillary tube can be placed in 3 different positions. Pfeiffer Vacuum delivers the GSD 350 with the capillary hose on the right-hand side. Dummy caps are installed as seals on the two positions that are not used. -
Page 41: Establishing A Network Connection
NOTICE IP address conflicts when connecting several units Pfeiffer Vacuum supplies each GSD 350 with the same default IP address. If you want to connect several GSD 350 units, their IP addresses are initially not unique. Simultaneous connection of multi- ple GSD 350 units with identical standard IP address leads to IP address conflicts in the network. -
Page 42: Sub-Networks
Installation Using IP addresses Pfeiffer Vacuum recommends that static IP addresses are used for the GSD 350. Reserve a block of IP addresses for static use and ensure that these reserved IP address- es are prohibited on the DHCP server (host). This will prevent any conflicts with double IP addresses. -
Page 43: Changing Ip Address For The Gsd
Installation 5.8.3 Changing IP address for the GSD 350 Operating instructions for the web interface and PV MassSpec Information on operating the GSD 350 via the web interface and PV MassSpec is available in the separate operating instructions as document number DA 0106. IP addresses in the range 192.168.2.xxx IP addresses in the range 192.168.2.xxx are reserved for internal services. -
Page 44: Connecting The Functional Earth
Installation 8. Below IP Assignment, select the Edit option. 9. Below Edit IP settings, select the Manual option 10. Enable IPv4. 11. Enter the IP address, subnet prefix length and the settings for the IP address. – Do not change the Gateway. –... -
Page 45: Establishing Mains Connection
Installation 5.10 Establishing mains connection DANGER Danger to life from electric shock Inadequate or incorrect grounding of the unit leads to contact-sensitive voltage on the housing. When making contact, increased leakage currents will cause a life-threatening electric shock. ► Before the installation, check that the connection leads are voltage-free. ►... -
Page 46: Interfaces And Connections
External disruptive influences due to electromagnetic emissions cause malfunctions in the unit and lead to property damage. Pfeiffer Vacuum urgently recommends wiring the analog inputs (+) and (-) with twisted pair cables. ► A screened cable should be used due to the electromagnetic compatibility (EMC). -
Page 47: Aux Io" Connection
External disruptive influences due to electromagnetic emissions cause malfunctions in the unit and lead to property damage. Pfeiffer Vacuum urgently recommends wiring the analog inputs (+) and (-) with twisted pair cables. ► A screened cable should be used due to the electromagnetic compatibility (EMC). -
Page 48: Ethernet" (Lan) Connection
Interfaces and connections Digital inputs The digital inputs are highly active. The PV MassSpec software allows you to set the actions activated by digital inputs to low active. A pull-up resistor configures these inputs internally to +24 V. The inputs can be set to low via a contact or a transistor to ground. -
Page 49: Tbl. 10: Status Of The Ethernet Connection
Interfaces and connections RJ-45 green yellow Fig. 35: "Ethernet" (LAN) connection 1 Transmission data (TD+) Reception data (RD-) 2 Transmission data (TD-) 4, 5, 7, 8 Not used 3 Reception data (RD+) Status Meaning Green (link) lights up Hardware connection exists dark No hardware connection Yellow (activity) -
Page 50: Commissioning
Commissioning 7 Commissioning NOTICE Severe vibration will damage the turbopump Severe vibration and vibrations during operation and after switching off will damage the turbopump. ► Avoid knocks and vibration during operation, for example, as caused by driving over cables and door sills. ►... -
Page 51: Fig. 37: "Control" Screen
Commissioning Fig. 37: "Control" screen Pumping down the vacuum system 1. Switch to the “Control” screen. 2. Press the "Pump down" button (see chapter “Pumping down the vacuum system”, page 64). The unit is ready for measuring. 51/118... -
Page 52: Operation Via The Display
Operation via the display 8 Operation via the display Operating instructions for the web interface and PV MassSpec Information on operating the GSD 350 via the web interface and PV MassSpec is available in the separate operating instructions as document number DA 0106. The GSD 350 can be operated via the display or alternatively via the web interface. -
Page 53: Menu Structure With Functions
Operation via the display Fig. 38: "Dashboard" screen 1 Current pressure value in the vacuum chamber Heating status 2 Warning triangle in the event of a warning or malfunction message Vacuum system status 3 User settings Link to dashboard 4 System status 8.2 Menu structure with functions Menu Subprograms, functions and information... -
Page 54: Info" Menu
Operation via the display Menu Subprograms, functions and information 1st Level 2nd Level Settings Recipes Creating a new recipe (see page 55) Default recipes for air Heating units Capillary Gas inlet Vacuum chamber Sensors Gauges Sealing gas sensor User settings User name Roller Language... -
Page 55: Settings" Menu
Improper changes in the Service menu impair unit functions and cause damage to the unit and its components. The Service menu is reserved for use by Pfeiffer Vacuum Service and is only accessible after logging ► Contact Pfeiffer Vacuum Service. -
Page 56: Creating And Editing Measurement Recipes
Operation via the display Fig. 39: Example of parameter setting 1 Switch symbol (off) Editable numeric value Using a switch to change over parameters 1. Scroll to the desired parameter. 2. Press the switch symbol to toggle the switch. 3. Press the "Save" button to save the changes. Press the "Back"... -
Page 57: Fig. 41: Measurement Recipe For "Spectrum Scan" Measuring Mode
Operation via the display ● Measurement recipe for a scan (default SCAN AIR) ● Measurement recipe for measuring various masses over time (default Selected Masses Air) Fig. 41: Measurement recipe for "Spectrum Scan" measuring mode Editing the measurement recipe for "Spectrum Scan" measuring mode 1. -
Page 58: Adjusting The Heating Units
Operation via the display Fig. 43: Measurement recipe for “Selected Masses - Special” measuring mode Editing measurement recipe for " Selected Masses" measuring mode 1. Press the "New recipe" button. 2. Enter a name for the measurement recipe. 3. Select "Selected Masses" measuring mode. 4. -
Page 59: Adjusting Sensors
Operation via the display Fig. 44: Tempering mode of the vacuum chamber In normal cases, the GSD 350 does not heat the vacuum chamber during a measurement. For certain analytical measurements, you can activate the "Tempering mode" function in the "Vacuum chamber" submenu. -
Page 60: Changing User Settings
Operation via the display 8.4.4 Changing user settings Fig. 45: “User settings” submenu You can toggle the units for the pressure and temperature physical variables in the menu navigation in the “User settings” submenu. You can also set the language, date, and time. As-delivered condition ●... -
Page 61: Setting Network Parameters
Operation via the display Required vacuum in the vacuum chamber The "Heating" and "Inlet" autostart functions are only available in combination with the "Vacuum" autostart function, as the required vacuum must have been built up in the vac- uum chamber for these autostart functions. 8.4.6 Setting network parameters Fig. -
Page 62: Service" Submenu
Improper changes in the Service menu impair unit functions and cause damage to the unit and its components. The Service menu is reserved for use by Pfeiffer Vacuum Service and is only accessible after logging ► Contact Pfeiffer Vacuum Service. -
Page 63: Control" Menu
Operation via the display Fig. 50: Example of older messages Accessing warnings and malfunction messages ► Switch to the "Messages" menu or press the warning triangle. – The warnings and malfunction messages appear. ► Press the “History” button to access older messages. ►... -
Page 64: Pumping Down The Vacuum System
Operation via the display Fig. 51: "Control" menu 1 Pressure in the vacuum chamber (total pressure Status of mass spectrometer filament and gauge) electron multiplier 2 Turbopump rotation speed 8.6.1 Pumping down the vacuum system Prerequisite ● GSD 350 ready for operation Procedure 1. -
Page 65: Switching Heating Units On And Off
Operation via the display before starting “Venting,” the timer starts at 15 minutes. The remaining timer time is shown top right on the display. ● After the timer time has elapsed, the diaphragm pump stops and the turbopump shuts down. ─... -
Page 66: Baking Out The Vacuum Chamber
Operation via the display 8.6.5 Baking out the vacuum chamber After the timer preset, bake out is automatically disabled, or the user can select the "Bake out off" func- tion. Prerequisite ● GSD 350 ready to measure (vacuum ready) Baking out the vacuum chamber 1. -
Page 67: Opening And Closing Calibration Valve
Operation via the display Prerequisites ● GSD 350 ready to measure (vacuum ready) ● Emission on Switching on the electron multiplier 1. Switch to the “Control” menu. 2. Press the "EM on" button. Sequence for switching on ● The GSD 350 switches the electron multiplier on. Switch off the electron multiplier 1. -
Page 68: Fig. 52: Recipe Selection
Operation via the display Fig. 52: Recipe selection Starting the measurement 1. In the "Control" menu, switch on the filament and if applicable, also the electron multiplier. 2. In the "Measurement" menu, press the "Start" button. 3. If necessary, toggle the display between linear and logarithmic. Stopping the measurement 1. -
Page 69: Decommissioning
Decommissioning 9 Decommissioning NOTICE Severe vibration will damage the turbopump Severe vibration and vibrations during operation and after switching off will damage the turbopump. ► Avoid knocks and vibration during operation, for example, as caused by driving over cables and door sills. ►... -
Page 70: Maintenance
You can carry out maintenance work at maintenance level 1 yourself. We recommend Pfeiffer Vacuum Service for carrying out maintenance work at maintenance level 2 and maintenance level 3 (overhaul). If the required intervals listed below are exceeded, or if mainte- nance work is carried out improperly, no warranty or liability claims are accepted on the part of Pfeiffer Vacuum. - Page 71 Maintenance Group of components, module Interval Maintenance Spare part/spare part level and action Basic unit Replace the housing screws in case of loss Housing screws Clean the housing parts If required Replace the gas inlet cover If required Gas inlet cover Replace the side cover If required Side cover...
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Page 72: Maintaining The Basic Unit
Maintenance Group of components, module Interval Maintenance Spare part/spare part level and action Calibration unit (option) Refill the calibration medium (PFTBA) If required Calibration medium (PFTBA) Tbl. 12: Maintenance work and intervals 10.2 Maintaining the basic unit DANGER Danger to life due to electric voltage High voltages are present inside the device. -
Page 73: 2Removing/Attaching Side Covers
GSD 350 without removing a warranty seal: ● Gas inlet ● Turbopump operating fluid reservoir ● Service opening for the calibration medium (PFTBA) Contact the Pfeiffer Vacuum Service Center in the event of process-related shorter mainte- nance intervals. Fig. 54: Removing/attaching side covers 1 Side cover, right Interior hexagon socket screw (2×M3) -
Page 74: 3Removing/Attaching Housing Cover
GSD 350 without removing a warranty seal: ● Gas inlet ● Turbopump operating fluid reservoir ● Service opening for the calibration medium (PFTBA) Contact the Pfeiffer Vacuum Service Center in the event of process-related shorter mainte- nance intervals. Prerequisites ● GSD 350 switched off ●... -
Page 75: 4Cleaning Housing Parts
► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device. -
Page 76: 5Cleaning The Protection Screens On The Fans
Maintenance Cleaning housing parts 1. Use a soft, damp cloth to clean the outside of the housing. 2. Allow the surfaces to dry thoroughly after cleaning. 3. Remove dust layers inside the unit by blowing them out carefully with compressed air. 10.2.5 Cleaning the protection screens on the fans Cleaning interval Define the cleaning interval by visual inspections and as a function of the local dust inci-... -
Page 77: 2Replacing The Venting Valve
6. Carefully erect the GSD 350 again. 7. Remove the diaphragm pump’s transport protection. (see chapter “Removing transport protection for the diaphragm pump”, page 36) 10.3.2 Replacing the venting valve Pfeiffer Vacuum Service handles the replacement. ► Contact Pfeiffer Vacuum Service. 10.4 Maintaining the fore-vacuum system 10.4.1 Replacing diaphragm pump... -
Page 78: Fig. 57: Replacing Diaphragm Pump
Maintenance Fig. 57: Replacing diaphragm pump 1 Hexagon head screw M4×10 (4×) Spring damper (4×) 2 Lock washer (4×) Compression spring (4×) 3 Ground terminal Fixing plate 4 Allan head screw M4×12 (2×) Nut (4×) 5 Lock washer (2×) Diaphragm pump carrier 6 Transport protection lug Shoulder screw 7 Transport protection... -
Page 79: 2Replacing Diaphragm Pump Diaphragm
Maintenance 5. Disconnect the D-Sub plug from the diaphragm pump. 6. Loosen the grounding connection on the diaphragm pump. 7. Unscrew the hexagon socket screws with lock washers from the diaphragm pump carrier. 8. Remove the diaphragm pump and diaphragm pump carrier from the fastening plate by turning slightly. -
Page 80: Maintaining The Gas Analysis Unit
Maintenance 10.5 Maintaining the gas analysis unit 10.5.1 Maintaining QMA 250 M analyzer NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ►... -
Page 81: Tbl. 13: Determined Sensitivity Of The Mass Spectrometer
If you notice a loss of measuring sensitivity, the cause may be decreasing gain of the built-in electron multiplier (EM) or contamination of the ion source. In such a case, Pfeiffer Vacuum recommends deter- mining the sensitivity of the mass spectrometer with the electron multiplier switched off, i.e., only with the Faraday detector. -
Page 82: 2Maintaining Total Pressure Gauge
Maintenance 10. Tighten the black clamp collar on the electronics unit. 11. Connect all connection cables on the front panel of the QME 250 electronics unit. 10.5.2 Maintaining total pressure gauge Ignition duration of the cold cathode at low pressures If you switch off the gauge in “Ignore sensor errors” mode, a certain time may elapse before the GSD 350 displays valid pressure values when it is switched on again. -
Page 83: Maintaining Gas Inlet System Of Omnistar
Maintenance 10.6 Maintaining gas inlet system of OmniStar NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ►... -
Page 84: Fig. 63: Disassemble The Valve Block
Maintenance Prerequisites ● GSD 350 switched off ● Power cable disconnected ● Vacuum system at a standstill and vented to atmospheric pressure ● Gas inlet cover removed ● Insulating collar removed Required tools ● Allen key, WAF 2.5 ● Open-end wrench, WAF 5/16" ●... -
Page 85: 2Replacing Orifice
Maintenance 10.6.2 Replacing orifice Prerequisites ● GSD 350 switched off ● Power cable disconnected ● Vacuum system at a standstill and vented to atmospheric pressure ● Gas inlet removed Required tools ● Special tool for the orifice of the gas inlet system ●... -
Page 86: 4Installing Gas Inlet Flange
Maintenance Procedure 1. Unscrew and remove the gas guide from the valve block. 2. Turn the gas inlet so that the orifice drops out. 3. Drill the orifice manually using the special tool and pull the orifice out from the valve block if the orifice remains stuck. -
Page 87: Maintaining Gas Inlet System Of Thermostar
► Carry out all work in a well lit area. First shorten or replace the quartz capillary Pfeiffer Vacuum recommends first shortening or replacing the quartz capillary, and only then replacing the orifice if the work on the quartz capillary does not achieve the desired results. -
Page 88: 2Replacing Orifice
Maintenance Prerequisites ● GSD 350 switched off ● Power cable disconnected ● Vacuum system at a standstill and vented to atmospheric pressure ● Gas inlet cover removed ● Insulating collar removed Required tools ● Allen key, WAF 2.5 ● Open-end wrench, WAF 5.5 ●... -
Page 89: 3Replacing Interior Gas Guide And Orifice
Maintenance Spare part required ● Orifice, 50 μm (order number BK212576) Procedure 1. Unscrew and remove the gas guide from the gas inlet flange. 2. Turn the gas inlet so that orifice can drop out. 3. Push out the orifice from the capillary side with a thin mandrel. 4. -
Page 90: 4Installing Gas Inlet Flange
Contact Pfeiffer Vacuum Service is you have any questions. Shortening or replacing capillary Pfeiffer Vacuum recommends first shortening or replacing the capillary, and only replacing the orifice if the work on the capillary does not achieve the desired results. -
Page 91: 1Shortening Stainless Steel Capillaries
Maintenance 10.8.1 Shortening stainless steel capillaries Required length of stainless steel capillaries Capillary length = length of capillary tube + 15 cm + required length at the measuring point The capillary is part of the pressure reduction system. A capillary significantly longer than 2 m may result in lower pressures in the vacuum chamber. -
Page 92: 2Replacing Stainless Steel Capillary
Maintenance Checking pressure in the vacuum chamber 1. Check the pressure in the vacuum chamber. – The displayed pressure must be ≥ 1 × 10 hPa with the metering valve open. 2. If the displayed pressure is < 1 × 10 hPa, this can be due to the following: –... -
Page 93: 3Trimming Quartz Capillaries
Maintenance Procedure 1. Trim the length of the stainless steel capillaries. – Capillary length = length of capillary tube + 15 cm + required length at the measuring point 2. Open the cooling clamping collar fitting. 3. Remove the old stainless steel capillary. 4. -
Page 94: 4Replacing Quartz Capillary
Maintenance Commissioning unit 1. Start the pumping system. 2. Wait for the turbopump to run-up time to elapse (approx. 5 minutes). Checking pressure in the vacuum chamber 1. Check the pressure in the vacuum chamber. – The displayed pressure must be ≥ 1 × 10 hPa. -
Page 95: Maintaining The Heating Units
► Display warning signs. ► Make sure that the product has cooled down before performing work. ► Wear protective gloves (in accordance with EN 420). 10.9.1 Replacing the capillary hose Pfeiffer Vacuum Service handles the replacement. ► Contact Pfeiffer Vacuum Service. -
Page 96: Replacing The Poe Injector
6. Place the display in the GSD 350. During the run-up, the GSD 350 automatically synchronizes the display with the configuration of the GSD 350. 10.10.2 Replacing the PoE injector Pfeiffer Vacuum Service handles the replacement. ► Contact Pfeiffer Vacuum Service. -
Page 97: Replacing The Tc 110 Electronic Drive Unit On The Turbopump
For this step, you must pull the GSD 350 about 17 cm over the edge of the table in order to be able to open the cover on the housing base of the GSD 350. Pfeiffer Vacuum recom- mends that another person assist to prevent the GSD 350 from slipping during this step. -
Page 98: Replacing The Calibration Valve
Pfeiffer Vacuum Service handles the replacement and adjustment. ► Contact Pfeiffer Vacuum Service. 10.12.3 Replacing digital pressure switch Pressure switch presetting Do not change the presetting. Pfeiffer Vacuum has factory-preset the pressure switch. Pfeiffer Vacuum Service handles the replacement. ► Contact Pfeiffer Vacuum Service. 98/118... -
Page 99: Troubleshooting
Troubleshooting 11 Troubleshooting Notes on malfunction handling in the Help menus Further information on troubleshooting and malfunction messages when operating the unit via the web interface or when using the PV MassSpec software can be found in the corre- sponding Help menus. Problem Possible cause Remedy... - Page 100 Troubleshooting Problem Possible cause Remedy After the "Pump down" control command, Run-up time of tur- Wait for the run-up time of the turbopump fail to reach the nominal ro- bopump not com- < 8 minutes to complete. tation speed (icon remains dark green). pleted Inlet pressure too Reduce the pressure.
- Page 101 Troubleshooting Problem Possible cause Remedy Pressure in vacuum chamber is too high Inlet pressure too Reduce the pressure. on the in- high let side of the capillary to (> 3 × 10 hPa) (for ThermoStar and/or < 1200 hPa. OmniStar with open metering valve). Leakage Check the capillary seal in the gas inlet area.
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Page 102: Tbl. 14: Troubleshooting
Troubleshooting Problem Possible cause Remedy Poor peak form Mass spectrometer Read the mass spectrometer op- settings incorrect erating instructions for details. High noise level Mass spectrometer Read the mass spectrometer op- settings incorrect erating instructions for details. After the "Vent" control commands, the Delay time for vent- Wait for the delay time of vacuum pumps continue running and the... -
Page 103: Shipping
► Comply with the instructions for safe distribution. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Instructions for safe shipping ► Do not ship microbiological, explosive or radioactively contaminated products. -
Page 104: Recycling And Disposal
– Fluoroelastomers (FKM) – Potentially contaminated components that come into contact with media 13.2 Dispose of a gas analysis system Pfeiffer Vacuum gas analysis systems contain materials that you must recycle. 1. Dismantle the housing parts. 2. Dismantle all individual components. -
Page 105: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 106 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 107: Spare Parts
Spare parts 15 Spare parts Ordering spare parts ► Have the part number to hand, along with other details from the rating plate as required. ► Install original spare parts only. Designation Order number Description/scope of delivery Structure and housing parts Housing cover PT 167 000 Gas inlet cover... -
Page 108: Tbl. 15: Spare Parts And Components, Maintenance Level
Spare parts Designation Order number Description/scope of delivery Analyzer PT M25 451 1 – 100 u, with cross beam ion source, tungsten filament unit and PT M25 452 1 – 100 u, with cross beam ion source, Ir-Y filament unit and PT M25 453 1 –... -
Page 109: Tbl. 17: Components For Hose Connections
Spare parts Description Number per GSD 350 Order number (Tempel) Angled plug connector, long, 1/8" thread, 8 mm IQSLL 188 G Angled plug connector, 1/8" thread 4 mm IQSL 184 GL Angled plug connector, long, 1/4" thread, 8 mm IQSLL 148 G Angled plug connector, long, 1/8"... -
Page 110: Special Tool
Special tool 16 Special tool Designation Order number Usage Wrench for turbopump housing PV M40 813 (see chapter “Replacing operating fluid reservoir cover on turbopump”, page 76) Centering gauge for QMA PT 167 082 (see chapter “Maintaining QMA 250 M ana- lyzer”, page 80) Mounting aid for calibration gas PT 167 081... -
Page 111: Accessories
Accessories 17 Accessories View the range of accessories for ThermoStar and OmniStar on our website. 17.1 Accessory information Capillary hose adapter The capillary hose adapter is used to reliably connect the capillary hose. Fig. 78: Capillary hose adapter 17.2 Ordering accessories Description Order number Capillary hose adapter PT 167 070 -T Tbl. -
Page 112: Technical Data And Dimensions
Technical data and dimensions 18 Technical data and dimensions 18.1 General mbar Torr | mm Hg mbar 1 · 10 0.75 1000 1000 1 · 10 0.01 0.01 1 · 10 1 · 10 7.5 · 10 0.75 1 · 10 0.01 1000 Torr | mm Hg 1.33... - Page 113 Technical data and dimensions Configuration (mass range) 1 to 100 u 1 to 200 u 1 to 300 u Diameter OmniStar: OD = 1/16", ID = 0.12 mm ThermoStar: OD 0.23 mm, ID = 0.14 mm Operating temperature of capillary 200 °C (350 °C also available) Exhaust gas Permissible pressure...
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Page 114: Dimensions
Technical data and dimensions Configuration (mass range) 1 to 100 u 1 to 200 u 1 to 300 u Digital inputs 4× nominal +24 V Analog outputs 4× 0 to 10 V, I = 10 mA, resolution 16 bit Digital outputs 6×... -
Page 115: Certification
The product GSD 350 OmniStar/ThermoStar - conforms to the UL standards UL 61010-1:2012 R4.16 Safety requirements for electrical equipment for measurement, control and laboratory use Part 1: General requirements UL 61010-2-010:2014 Safety requirements for electrical equipment for measurement, control and laboratory use Part 2-010: Particular requirements for laboratory equipment for the heating of materials - is certified to the CAN/CSA standards CAN/CSA No. -
Page 116: Declaration Of Conformity
Harmonized standards and applied national standards and specifications: IEC 61010-1:2010+A1 IEC 61010-2-010:2019 EN ISO 12100:2010 EN 61326-1:2013 EN 55011:2009 + A1:2011 EN 61000-3-2:2014 EN 61000-3-3:2013 IEC 60529:1989 + A1:1999 + A2:2013 Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany (Daniel Sälzer) Asslar, 2022-03-09 Managing Director... - Page 117 117/118...
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