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Installation
5.3 Connecting the gas inlet system
Health risks and environmental damage due to the process gases used
Gases used (process gases) represent a health risk and damage to the environment.
► Check the leak tightness of the connections before introducing the process gas.
► Make sure that the exhaust gas system is suitable for the gases supplied.
► Consider potential interactions between the materials and process gases.
► When handling the gases used, observe the applicable guidelines.
► Observe the protective measures.
Procedure
► In the case of ion sources with gas inlet system, professionally connect the gas inlet system.
► Electrically insulate the conductor against the ion source.
5.4 Installing HF generator QMH 40x
You can find information on how to install HF generator QMH 40x in the corresponding operating in-
structions for QMH 40x.
5.5 Installing EP 422 electrometer pre-amplifier on analyzer
For information on installing the EP 422 electrometer pre-amplifier, refer to the QMG 700 HiQuad oper-
ating instructions.
5.6 Removing/installing SEM connector plate
Danger to life from electric shock
The voltages under the connector plates are life threatening. Operation is not permitted if the protec-
tive pipes have been removed.
► Re-install all removed protective pipes before connecting the cables.
► Pay attention to the additional information in the corresponding chapters for special ion sources.
Prerequisites
● Device is switched off
● All cables have been disconnected from the analyzer
Required tools
● Allen key, WAF 1.5
● Screwdriver
● Pin
Fig. 16:
1 Protective pipe
32/52
CAUTION
DANGER
1
2
Protective pipe
2
Large screws (2×)
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