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1.
Overview
1.1 Standard Specifications
IM 11M10A01-03E
The OX102 Current limit Oxygen Analyzer is an advanced oxygen analyzer which is
capable of measuring a wide range of oxygen concentrations, from ppm level to percent-
age level. The OX102 is best suited to ppm-level oxygen measurement - for example,
monitoring the furnace gas of nitrogen reflow furnaces and the atmosphere of semicon-
ductor plants. This analyzer uses a compact zirconia current limiting sensor. The sensor
is designed for direct insertion type installation. Where the furnace gas of a nitrogen
reflow furnace contains organic solvent at a few ppm to percentage level, the sensor
should be used with the K9424GA sampling system, to avoid contact with the solvent.
Note that the OX102 cannot measure oxygen concentration if combustible or corrosive
gases are present in the atmosphere to be measured.
This equipment needs to be returned to the factory for repair. Contact your Yokogawa
representative.
(1) Measurement principle : Zirconia current limiting method
(2) Sampling system
(3) Measured gas
: O
(4) Measuring range : 0 to 25%
(5) Output range
: 0-100 ppm/0-1000 ppm/0-10000 ppm/0-25%, automatic/fixed
(6) External output
: a. 4-20 mA DC automatic/manual switching mode
Output Range
0-100 ppm
Range
4 V DC
Identification Signal
(7) Repeatability:
Measuring Range
20 - 100 ppm
100 - 1000 ppm
1000 - 5000 ppm
5000 - 10000 ppm
1 - 25%
: Natural diffusion system
If the sampled gas may include organic solvents, use a
sampling unit.
in N
or mixed gases; cannot be used with silicone vapor,
2
2
combustible gases and organic solvents
switching mode
b. 1-5 V DC fixed (0-100 ppm/0-1000 ppm/0-10000 ppm/0-
25%)
c. 4-20 mA DC identification signal for automatic switching
(See below)
0-1000 ppm
3 V DC
Repeatability
15 ppm O
2
25 ppm O
2
0.3 of reading
7.5% of reading
0.25%O
2
0-25%
0-10000 ppm
2 V DC
1 V DC
T101E.EPS
T102E.EPS
1. Overview
1-1
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