Ulvac VPT-060 User Manual
  1. Manuals
  2. Brands
  3. Ulvac Manuals
  4. Water Pump
  5. VPT-060
  6. User manual

Ulvac VPT-060 User Manual

High vacuum pumping system
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
No.30210-2-01-3
User Manual
High Vacuum Pumping System
VPT-060
Please read the following before using this product.
Keep this manual in a safe place ready for use.
The content of this manual is liable to change without prior notice
due to changes in product specifications, product improvements,
and revision.
ULVAC KIKO, Inc

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the VPT-060 and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for Ulvac VPT-060

Summary of Contents for Ulvac VPT-060

  • Page 1 Please read the following before using this product. Keep this manual in a safe place ready for use. The content of this manual is liable to change without prior notice due to changes in product specifications, product improvements, and revision. ULVAC KIKO, Inc...

  • Page 2: Table Of Contents

    Contents ‘*’ indicates a page with safety-related content. * For safe use of the product (1) Introduction ···························································································· 1 *1. Users ································································································ 1 2. Reading and Understanding the Manual ··················································· 1 3. Storing the Manual ··············································································· 1 4. Warrantee ·························································································· 1 5.
  • Page 3 *3. Handling Malfunctions ········································································ 10 3-1 Instantaneous power failure ····························································· 10 3-2 Long-term power failure ·································································· 10 3-3 Overload operation ········································································ 10 3-4 Emergency stop ············································································ 11 3-5 Errors that cannot be reset ······························································ 12 (5) Maintenance and Repairs ······································································· 13 *1.

  • Page 4: For Safe Use Of The Product

    Please read the information provided and make sure you understand correctly so as to prevent a serious accident. Technical Division of ULVAC KIKO ,Inc. holds the copyright for this manual and the safety guide. Reproduction of all or part of this manual without the permission of the Technical Division of ULVAC KIKO, Inc.
  • Page 5 Power Supplies Primary power supply capacity Prepare a single-phase, 100V power supply of at least 3.0A. Check If the capacity of the power supply is insufficient, breakers may trip capacity when a current surge occurs in operation. Prepare a separate primary power supply. Do not connect other equipment to it.
  • Page 6 Environment This equipment is not explosion-proof, and therefore cannot be used in environments where there is a danger of explosion. Use in such environments may result in ignition and explosion, with Warning Prohibited consequent fire and burns. The area around the pump may become hot during operation of this equipment.
  • Page 7 Operation Do not apply sudden gas loads (e.g. inflow of atmosphere to the high-vacuum side) during operation of the equipment. Do not apply Application of a sudden gas load may damage the turbomolecular sudden gas loads pump. Do not operate the pump near or inside a magnetic field. Operating the pump inside a magnetic field may result in equipment Magnetic failure or malfunction.
  • Page 8 Maintenance, Repair, and Disposal The customer is able to perform the following maintenance and repairs. 1) Maintenance of the diaphragm vacuum pump. 2) Fitting and removing the turbomolecular pump Customer controller. maintenance and repairs Contact the manufacturer for repairs other than the above. Replace the diaphragm in the diaphragm vacuum pump every 6,000 hours.

  • Page 9: Introduction

    (1) Before Using 1. Target Users Only persons who have used a vacuum exhaust unit or trained based on this manual may operate this equipment. 2. Read the Manual Thoroughly Please read this manual thoroughly in order to use the equipment in a safe and correct manner.

  • Page 10: Product Outline

    (2) Product Outline 1. Purpose of Use and Prohibitions This equipment is a turbomolecular pump exhaust unit, with all necessary components mounted on the base. It is comprised of a turbomolecular pump, a controller and a diaphragm, dry vacuum pump. Follow the prohibitions below to ensure that the equipment is used correctly.

  • Page 11: Product Specifications

    3. Product Specifications Ultimate pressure Exhaust speed 60L/sec. Power requirements 100V, single phase, 0.3kVA Dimensions 340mm (W) x 340mm (D) x 355mm (H) Mass 17kg (approx.) Color Baked Finish (6Y 8/0.8) 4. Individual Component Specifications Component Model and specifications Quantity 1) Diaphragm vacuum * Model: DAU-20 pump...

  • Page 12: Switch Operation And Description Of Led Display

    6. Switch Operation & Description of LED Display Check safety and status of switches before operation. Check Name Details and operation TMP: Turbomolecular pump DAU = Diaphragm dry vacuum pump LOCAL REMOTE select Select switch: Manual operation and remote control switch The select switch can be used on this equipment only when LOCAL is selected.

  • Page 13: Switch Layout

    7.Switch Layout Switch Flow Sheet Electrical System Diagram...

  • Page 14: Opening The Packaging And Installation

    (3) Opening the Packaging and Installation 1. General Precautions 1) Verify that the contents are as requested. 2) Verify that the accessories are as required. 3) Clear a space at least 0.1m around the equipment to Check ensure safety during installation. 2.

  • Page 15: Power Supply

    4. Power Supply Primary power supply capacity Prepare a single-phase, 100V power supply of at least 0.3kVA. Check Warning If the capacity of the power supply is insufficient, capacity breakers may trip when a current surge occurs in operation. Primary cable connection specifications (cable supplied with equipment) 2m long, 100V cable fitted with 3-pin plug (with adapter) Prepare a separate primary power supply.

  • Page 16: Operation

    (4) Operation 1. Risks During Operation, and Associated Safety Measures Do not apply sudden gas loads (e.g. inflow of atmosphere to the high-vacuum side) during operation of the equipment. Do not apply Application of a sudden gas load may sudden gas loads damage the turbomolecular pump First, run the back pump, and then start the main pump when using this equipment.

  • Page 17: Operation

    2-2 Operation 1) The exhaust system is connected to the inlet flange: Confirm VENT V. (option): Confirm closure 2) Customer breaker: Controller LED POWER display: TMP cooling fan: Simultaneous start 3) DAU-20 switch: 4) START ■ : Press Turbomolecular pump TMP: Start LED ACCELERATION display during acceleration: TMP operates normally after approximately 2.5 minutes.

  • Page 18: Handling Malfunctions

    3. Handling Malfunctions 3-1 Instantaneous power failure All devices are automatically restored to the status prior to the power failure. 3-2 Long-term power failure Remove the primary cable plug from the socket to restore the status prior to operation. Restoration procedure after power failure After turning on the power again, press the STOP / RESET ■...

  • Page 19: Emergency Stop

    3. Handling Malfunctions (continued) 3-3 Overload operation (continued) Errors that can be reset Controller LED FAILURE display: ON Name of error / Description Controller overheat / When the temperature inside the controller rises above 80°C. *Cause 1) The surrounding temperature is hot. *Solution 1) Keep the surrounding temperature below 45°C.

  • Page 20: Errors That Cannot Be Reset

    Disconnect the power temporarily, and then turn on the power again after a few minutes. If the error persists, it is a malfunction or failure. Return the unit to ULVAC. Repair is performed at the TMP manufacturer after the equipment is received.

  • Page 21: Maintenance And Repairs

    (5) Maintenance and Repairs 1. Risks During Maintenance and Repairs, and Associated Safety Measures The turbomolecular pump and controller employ high-voltages. This has associated dangers, and the possibility of serious accidents. Maintenance Ensure that only qualified personnel perform and repair inspections and maintenance.

  • Page 22: Removing, Maintaining And Fitting The Device

    3. Removing, Maintaining and Fitting the Device 3-1 Turbomolecular pump controller 1) Tools required: Phillips screwdriver 2) Removal (1) Remove the primary power cable plug from the socket. (2) Remove the MOTOR, FAN and INPUT connectors (3) Remove the two small pan head screws on the front of the controller rack.

  • Page 23: Diaphragm Vacuum Pump (Dau)

    3. Removing, Maintaining and Fitting the Device 3-3 Diaphragm Dry Vacuum Pump (DAU) 1) Tools required: Box wrench (7 mm) and Phillips screwdriver 2) Removal (1) Remove the primary side cable plug from the socket. (2) Remove the DAU-20 power cord from the terminal block. (3) Remove the silicon tube.

  • Page 24: Troubleshooting

    5. Troubleshooting Symptoms Cause Solution Ultimate pressure is poor High ambient temperature in Use air conditioning to reduce area of installation. ambient temperature to 25ºC or lower. Ultimate pressure is Short operation time following Run for 24 – 48hrs and check unstable installation or long-term again.

  • Page 25: Storing The Equipment

    6. Storing the Equipment Refer to the following instructions when storing the equipment for a long period of time. 1) Storage location • Floor with sufficient strength. • Good ventilation. • Protect from direct sunlight. • Protect from effects of corrosion due to chemicals and gases etc.

  • Page 26: Disposal

    (6) Disposal 1. Precautions to be taken for Disposal The operator is legally obliged to dispose of the equipment and accessories as industrial waste. Please dispose according to the rules or Caution Legal obligations regulations established under law and by the local governing body.

Table of Contents