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Ulvac VPC-051A User Manual

Vacuum pump unit
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No.30420-2-02-1
User's Manual
Vacuum Pump Unit
(Semi-Automatic Type)
VPC-051A
Please read this manual thoroughly to ensure safe and effective
operation of this equipment. Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described
in this manual is subject to changes in dimensions and specifications
without prior notice.
Ulvac Kiko, Inc.

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Summary of Contents for Ulvac VPC-051A

  • Page 1 Please read this manual thoroughly to ensure safe and effective operation of this equipment. Keep this manual in a safe place. Please note that due to performance upgrade, the equipment described in this manual is subject to changes in dimensions and specifications without prior notice. Ulvac Kiko, Inc.

  • Page 2: Table Of Contents

    Table of Contents Items with shade include description on safety. To Safely Use This Equipment (1) Before Using................1 1. Target Users ..............1 2. Read the Manual Thoroughly ..........1 3. Keep This Manual in a Safe Place ........1 4. Warranty................1 5. Statutory Requirements for Disposal.........1 6.
  • Page 3 (5) Maintenance and Repair ............12 1. Risks and Safety Measure upon Maintenance and Repair ..12 2. Maintenance and Repair that Can be Made by User ..12 3. Removal, Maintenance, and Installation of Devices..13 3-1 Oil-sealed rotary vacuum pump.......13 3-2 Oil diffusion pump............13 3-3 Oil mist trap .............14 4.

  • Page 4: To Safely Use This Equipment

    The copyright of this user’s manual and safety guides are reserved by Technical Division of Ulvac Kiko. No part of this document, in whole or part may be reproduced without permission of Ulvac Kiko Inc.
  • Page 5 Warning Label The warning labels are pasted on the following parts. 1) Left back of the rack (PL004) 2) Main valve handle 3) Around the oil-sealed rotary vacuum pump (PL008) 4) Around the oil diffusion pump (D. P) (PL007) 5) Roughing piping 6) Foreline solenoid valve Check labels Caution...
  • Page 6 Environment This product does not have explosion-proof design, and thus use in environments where inflammable substances are present should be avoided. Avoid this Otherwise, explosion could occur, causing fire and burns. action Temperature at a lower part of the oil diffusion pump is extremely high during operation.
  • Page 7 Operations Please make sure to ventilate the room when using liquid nitrogen. The nitrogen can potentially reduce the oxygen in the room. Avoid this This may cause an oxygen deficiency accident. Warning action When using liquid nitrogen, wear gloves to protect your hands.
  • Page 8 Maintenance, Repair, and Disposal Maintenance and Repair that Can be Made by User. 1) Replacement of oil for the sealed vacuum pump and oil diffusion pump. 2) Replacement of the element of oil mist trap (sold separately) Maintenance 3) O-ring replacement (except for oil-sealed rotary vacuum and repair range pump) To make repair or maintenance other than the above, contact us.

  • Page 9: Before Using

    (1) Before Using 1. Target Users Only persons who have used vacuum deposition equipment or trained based on this manual may operate this equipment. 2. Read the Manual Thoroughly Please read this manual thoroughly in order to use the equipment in a safe and correct manner.

  • Page 10: Product Overview

    (2) Product Overview 1. Purpose of This Product and Actions that are Prohibited This product is a system that evaporates substances in a vacuum space by means of resistance heating evaporation source to form a thin film. It is comprised of a 25A suction inlet, 25A oil diffusion pump, a 20 L/min oil-sealed rotary vacuum pump as well as various valves and pipes.

  • Page 11: Product Specifications

    3. Product Specifications Ultimate pressure 7.0 x 10 (Upon no-load cleaning in vacuum chamber) 1.5 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber) Evacuation time 15 minutes or less up to the 1.0 x 10 (Upon no-load cleaning in vacuum chamber) 10 minutes or less up to the 1.0 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber)

  • Page 12: Standard Accessories

    5. Standard Accessories 1) Power supply cable - For the main unit: 100 V single-phase, with plug, 2 m 1 pc. 2) Plug adapter - Plug with grounding wire for 100-V power supply 1 pc. 3) Gauge port cork - For φ18 2 pc.

  • Page 13: Layout Of Switches, Handles, And Operation Levers

    7. Layout of Switches, Handles, and Operation Levers Evacuation system drawing Electrical system drawing ５...

  • Page 14: Opening The Package And Installation

    (3) Opening the Package and Installation 1. General Cautions 1) Is the product what you requested? 2) Are the accessories and all necessary parts included? 3) Maintain a space of more than 0.1m from the equipment Confirm for safety upon installation. 2.

  • Page 15: Power Supply

    4. Power Supply Primary power supply Please prepare the following: Single-phase 100 V, 6.3 A or more Check the Smaller power supply capacity may cause the Warning capacity breaker to trip due to overcurrent during the operation. Specifications of Primary Cable Connection (Portions Connecting with the Equipment) For 100-V power supply, Cable length: 2 m End: 3P plug with ground (with adapter)

  • Page 16: Necessary Tool List

    5. Necessary Tool List Tool Where to be Used 13 Spanner Inspiratory port piping attachment 6. Replace Exhaust Cap on Oil-sealed Rotary Vacuum Pump 1. Turn the oil cap in a counterclockwise direction to remove. Oil cap 2. Turn the exhaust duct provided in a clockwise direction to attach. When selecting an oil mist trap (option), attach the OMT-050A.

  • Page 17: Operations

    (4) Operations 1. Risks and Safety Measures upon Operations Please make sure to ventilate the room when using liquid nitrogen. The nitrogen can potentially reduce the Avoid this oxygen in the room. Warning action This may cause an oxygen deficiency accident. When using liquid nitrogen, wear gloves to protect your hands.

  • Page 18: Device Operation Procedure

    2. Evacuation Device Operation Procedure 2-1 Preparation 1) Remove oil cap, and attach exhaust duct. 2) VENT. V, main valve: CLOSE. 3) Three-way valve: FORE 4) All switches on the operation panel: 5) Attach the probe to the gauge port when using the ionization gauge. 2-2 Operations Unit setup 1) User side breaker:...

  • Page 19: Measures Upon Abnormal Conditions

    Note In the case of with liquid nitrogen trap. Filling with liquid nitrogen After the warm-up is complete, fill with liquid nitrogen as necessary. If liquid nitrogen is already present when operation is stopped, it will evaporate naturally. Liquid nitrogen volume Max.

  • Page 20: Maintenance And Repair

    Do not make any modification of the product that is not permitted by Ulvac Kiko, Inc. Avoid this We do not assume any responsibility for any damage action due to such modifications.

  • Page 21: Removal, Maintenance, And Installation Of Devices

    3. Removal, Maintenance, and Installation of Devices 3-1 Oil-sealed rotary vacuum pump 1) Required tool: 8 mm Spanner x 1 2) Removal procedure - All devices of the coater stop.: Confirm - The primary power supply of the coater is removed.: Confirm - Remove the roughing piping by loosening the roughing piping fixing nut.

  • Page 22: Oil Mist Trap

    3. Removal, Maintenance, and Installation of Devices 3-3 Oil Mist Trap OMT-050A (Sold Separately) 1) Required tools Phillips screwdriver (Used for replacing element.) 2) Removal procedure - Rotate the lower portion of the oil mist trap counter-clockwise with both hands 3) Replace the element.

  • Page 23: Troubleshooting

    5. Troubleshooting Symptom Cause Troubleshooting Decrease the ambient The ambient temperature at temperature to 25°C by the installation site is high cooling. Operation time is too long Operate 24 hours to 48 after installation or long hours, and then perform termination.

  • Page 24: Consumable List

    7. Consumable List Replacement Location of Use Parts Specifications Material Quantity by user Rack Rubber Foot KP-5 O-ring for suction V-40 flange O-ring for exhaust P-12 flange O-ring for axis Main valve Rubber lining for valve seat O-ring for gauge port N-16 O-ring for leak port Gasket for suction...

  • Page 25: Disposal

    (6) Disposal 1. Cautions upon Disposal To dispose the oil (waste oil) for the pump and container, comply with industrial waste disposal rules. Comply with Comply with regulations upon disposal. Caution regulations For details on disposal, contact us. Applied regulations: Rules of waste disposal and cleaning Consign the disposal work to: 1) Transportation: Collector and carriers of industrial waste.

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