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(5) Maintenance and Repair
1. Risks and Safety Measure upon Maintenance and Repair
Warning
Caution
2. Maintenance and Repair that Can be Made by User
1) Replacement of oil for the sealed vacuum pump and oil diffusion
pump.
2) Replacement of the element of oil mist trap (sold separately)
3) O-ring replacement (except for oil-sealed rotary vacuum pump)
To make repair or maintenance other than the above, contact us.
Wear a dust-proof mask and gloves to
replace the oil of the oil diffusion pump.
This could cause risk to human health.
Wear
protective gear
To dispose the oil (waste oil) for the pump
and container, comply with industrial waste
disposal rules.
Comply with
Comply with regulations upon disposal.
regulations
For details on disposal, contact us.
Oil mist trap (sold separately) should be
replaced every six months to one year.
Clogging in the element increases evacuation
Replace
resistance, which may cause oil leakage from the
periodically
axis sealing area or oil level gauge damage.
Do not make any modification of the product
that is not permitted by Ulvac Kiko, Inc.
Avoid this
We do not assume any responsibility for any damage
action
due to such modifications.
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