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Ulvac VPC-051 User Manual

Vacuum pump unit
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No.30320-2-03-2
User's Manual
Vacuum Pump Unit
VPC-051
Please read this manual thoroughly to ensure safe and effective
operation of this equipment. Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described
in this manual is subject to changes in dimensions and specifications
without prior notice.
Ulvac Kiko, Inc.

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Summary of Contents for Ulvac VPC-051

  • Page 1 Please read this manual thoroughly to ensure safe and effective operation of this equipment. Keep this manual in a safe place. Please note that due to performance upgrade, the equipment described in this manual is subject to changes in dimensions and specifications without prior notice. Ulvac Kiko, Inc.

  • Page 2: Table Of Contents

    Table of Contents Items with shade include description on safety. To Safely Use This Equipment (1) Before Using ................1 1. Target Users ..............1 2. Read the Manual Thoroughly ..........1 3. Keep This Manual in a Safe Place ........1 4.
  • Page 3 (5) Maintenance and Repair ............11 1. Risks and Safety Measure upon Maintenance and Repair .. 11 2. Maintenance and Repair that Can be Made by User ..11 3. Removal, Maintenance, and Installation of Devices ..12 3-1 Oil sealed rotary vacuum pump ....... 12 3-2 Oil diffusion pump ............

  • Page 4: To Safely Use This Equipment

    The copyright of this user’s manual and safety guides are reserved by Technical Division of Ulvac Kiko. No part of this document, in whole or part may be reproduced without permission of Ulvac Kiko Inc.
  • Page 5 Warning Label The warning labels are pasted on the following parts. 1) Left back of the rack (PL004) 2) Main valve handle (PL008) 3) Around the oil diffusion pump (D. P) (PL007) When accompanied by a liquid nitrogen trap. 4) Liquid nitrogen trap (PL006) Check labels Caution Contact us if the label is contaminated or peeling off.
  • Page 6 Environment This product does not have explosion-proof design, and thus use in environments where inflammable substances are present should be avoided. Avoid this Otherwise, explosion could occur, causing fire and burns. action Temperature at a lower part of the oil diffusion pump is extremely high during operation.
  • Page 7 Operations Please make sure to ventilate the room when using liquid nitrogen. The nitrogen can potentially reduce the oxygen in the room. Check Warning ventilation This may cause an oxygen deficiency accident. When using liquid nitrogen, wear gloves to protect your hands.
  • Page 8 Maintenance, Repair, and Disposal Maintenance and Repair that Can be Made by User. 1) Replacement of oil for the sealed vacuum pump and oil diffusion pump. 2) Replacement of the element of oil mist trap (sold separately) 3) O-ring replacement (except for oil sealed rotary vacuum pump) Maintenance 4) Replacement of the heater of the oil diffusion pump.

  • Page 9: Before Using

    (1) Before Using 1. Target Users Only persons who have used vacuum deposition equipment or trained based on this manual may operate this equipment. 2. Read the Manual Thoroughly Please read this manual thoroughly in order to use the equipment in a safe and correct manner.

  • Page 10: Product Overview

    (2) Product Overview 1. Purpose of This Product and Actions that are Prohibited This product is a system that evaporates substances in a vacuum space by means of resistance heating evaporation source to form a thin film. To safely and correctly use this product, avoid the following actions that are prohibited.

  • Page 11: Product Specifications

    3. Product Specifications Ultimate pressure 7.0 x 10 (Upon no-load cleaning in vacuum chamber) 1.5 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber) Evacuation time 15 minutes or less up to the 1.0 x 10 (Upon no-load cleaning in vacuum chamber) 10 minutes or less up to the 1.0 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber)

  • Page 12: Standard Accessories

    5. Standard Accessories 1) Power supply cable - For the main unit: 100 V single-phase, with plug, 2 m 1 pc. 2) Gauge port cork - For φ18 2 pc. 3) Flange cap - For 25A 1 pc. - Hexagon head bolt 4 pc.

  • Page 13: Layout Of Switches, Handles, And Operation Levers

    7. Layout of Switches, Handles, and Operation Levers Evacuation system drawing Electrical system drawing 1φ100V 0.63kVA...

  • Page 14: Opening The Package And Installation

    (3) Opening the Package and Installation 1. General Cautions 1) Is the product what you requested? 2) Are the accessories and all necessary parts included? 3) Maintain a space of more than 0.1m from the equipment Confirm for safety upon installation. 2.

  • Page 15: Power Supply

    4. Power Supply Primary power supply Please prepare the following: Single-phase 100 V, 6.3 A or more Check the Smaller power supply capacity may cause the breaker Warning capacity to trip due to overcurrent during the operation. Specifications of Primary Cable Connection (Portions Connecting with the Equipment) For 100-V power supply, Cable length: 2 m End: 3P plug with ground (with adapter)

  • Page 16: Necessary Tool List

    5. Necessary Tool List Tool Where to be Used 13 Spanner Inspiratory port piping attachment (4) Operations 1. Risks and Safety Measures upon Operations Please make sure to ventilate the room when using liquid nitrogen. The nitrogen can potentially reduce the oxygen in the room.

  • Page 17: Device Operation Procedure

    2. Evacuation Device Operation Procedure 2-1 Preparation 1) VENT. V, three-way valve, main valve: CLOSE 2) All switches on the operation panel: 3) Attach the probe to the gauge port when using the ionization gauge. 4) User side breaker: 2-2 Operations Unit setup 1) MAIN.SW: 2) BACK.

  • Page 18: Measures Upon Abnormal Conditions

    Note In the case of with liquid nitrogen trap. Liquid nitrogen volume Max. fill-in volume: Approx. 0.4 liters (including vaporization volume upon fill-in) The liquid nitrogen lasts approx. 4 hours when a volume of 0.4 liters is filled. If all of the liquid nitrogen is vaporized, the trapped condensable gases are released, which causes an adverse effect on the pressure for about 30 minutes.

  • Page 19: Maintenance And Repair

    Work by two or Otherwise, you could injure your back. more people Do not make any modification of the product that is not permitted by Ulvac Kiko, Inc. Avoid this We do not assume any responsibility for any damage action due to such modifications.

  • Page 20: Removal, Maintenance, And Installation Of Devices

    3. Removal, Maintenance, and Installation of Devices 3-1 Oil sealed rotary vacuum pump 1) Required tool: 8 mm Spanner x 1 2) Removal procedure - All devices of the coater stop.: Confirm - The primary power supply of the coater is removed.: Confirm - Remove the roughing piping by loosening the roughing piping fixing nut.

  • Page 21: Oil Mist Trap

    3. Removal, Maintenance, and Installation of Devices 3-3 Oil Mist Trap OMT-050A (Sold Separately) 1) Required tools None 2) Removal procedure - Rotate the lower portion of the oil mist trap counter-clockwise with both hands 3) Replace the element. Please refer to Oil Mist Trap OMT-050A User’s Manual 4) Order of attachment - Place the attached O-ring on the lower face of the oil mist trap body.

  • Page 22: Troubleshooting

    5. Troubleshooting Symptom Cause Troubleshooting Decrease the ambient The ambient temperature at temperature to 25°C by the installation site is high. cooling. Operation time is too long Operate 24 hours to 48 after installation or long hours, and then perform termination.

  • Page 23: Consumable List

    7. Consumable List Location Replacement Parts Specifications Material Quantity of Use by user Rubber Foot KP-5 Warning Label PL004 Rack Warning Label PL007 Warning Label PL008 O-ring for suction V-40 flange O-ring for exhaust P-12 flange O-ring for axis Main valve Rubber lining for valve seat...

  • Page 24: Disposal

    (6) Disposal 1. Cautions upon Disposal To dispose the oil (waste oil) for the pump and container, comply with industrial waste disposal rules. Comply with Comply with regulations upon disposal. Caution regulations For details on disposal, contact us. Applied regulations: Rules of waste disposal and cleaning Consign the disposal work to: 1) Transportation: Collector and carriers of industrial waste.

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