Consumable List - Ulvac VPC-051A User Manual

7. Consumable List

Location of Use
Rack
Main valve
Rubber lining for valve
O-ring for gauge port
Oil diffusion
pump
Oil-sealed
rotary vacuum
pump
Three-way
valve
O-ring for gauge port
O-ring for connecting
Foreline
solenoid valve
Flexible piping
flange
Specifications and quantity is different for special models.
Parts
Rubber Foot
O-ring for suction
flange
O-ring for exhaust
flange
O-ring for axis
seat
O-ring for leak port
Gasket for suction
flange
Oil for use
Mica heater
Vacuum hose for
MAIN.P
Oil
Vibration-control
rubber
Vacuum hose for
BACK.P
Packing set for
re-grease
O-ring for suction
flange
pipe
O-ring for solenoid
valve
O-ring for flexible
piping flange
Specifications Material Quantity
KP-5 NR
V-40 NBR
P-12 NBR
N-7 NBR
--- NBR
N-16 NBR
N-8 NBR
---
φ57×φ48×t5
---
SY
Single-phase
---
100 V, 0.25
kW
Special
φ12×φ30
L=80 rubber
---
SMR-100
---
ME-15
Special
φ15×φ30
L=195 rubber
---
Accessory
V-24 NBR
N-16 NBR
P-12 NBR
P-5.P-21.V-24
NBR
S-3.S-35
V-24 ---
１６
Replacement
by user
4 OK
1 OK
1 OK
1 NG
1 NG
1 OK
1 OK
1 OK
0.02L OK
1 NG
1 OK
0.18L OK
4 OK
1 OK
1 NG
1 OK
1 OK
2 OK
Each 1 NG
1 OK