Ulvac VS1501 Instruction Manual
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Ulvac VS1501 Instruction Manual

Oil sealed rotary vacuum pump
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SK00-4390-DI-002-11
INSTRUCTION MANUAL
OIL SEALED ROTARY VACUUM PUMP
VS1501
VS2401
Before using this product, be sure to read this operation
manual. Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/

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  • Page 1 SK00-4390-DI-002-11 INSTRUCTION MANUAL OIL SEALED ROTARY VACUUM PUMP VS1501 VS2401 Before using this product, be sure to read this operation manual. Keep this manual with care to use at any time. ULVAC, Inc. Components Division http://www.ulvac.co.jp/...
  • Page 3 The performance and safety of the product might not be ensured if any of the devices put together did not conform to same regulations or the product itself was modified. ULVAC shall be not liable to guarantee performance and safety in such cases above. Any modification of the product by the user is out of the scope of guarantee by us and not be guaranteed in any manner.

  • Page 4: Safety Symbol Marks

    IMPORTANT It is prohibited to use this instruction manual except for explanation when using the VS1501, VS2401 and other purpose Components Division of ULVAC, Inc. agreed. It is prohibited to hand over and disclose this instruction manual to third parties without agreement by Components Division of ULVAC, Inc.

  • Page 5: Safety Precautions

    SK00-4390-DI-002-11 0.3 Safety Precautions Descriptions are given as the method to keep away from danger and actions that must be restricted on the use of the product. Use of this product and this Instruction Manual. Please read this Instruction Manual before starting installation, operation check or maintenance of this product to use it in long term.
  • Page 6 SK00-4390-DI-002-11 You are kindly requested to acknowledge that specifications and/or price of the product and description of the Instruction Manual are subject to change without prior notice for improvement. Any change shall update the version number at the top right of the Instruction Manual cover and issue the revised version.
  • Page 7 Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. VS1501 ： 232kg VS2401 ： 271kg WARNING Be sure to use the loading machinery (such as mobile crane) to lift up the Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its transfer.
  • Page 8 SK00-4390-DI-002-11 Coolant piping <Mounting> Check and ensure that any of hazardous energy is blocked before starting the operation. WARNING Power Supply wiring <Mounting> Check and ensure that any of hazardous energy is blocked before starting the operation. Entitled staff should conduct the wiring operation. Erroneous wiring work might cause a fire.
  • Page 9 SK00-4390-DI-002-11 Be sure to turn OFF the Power Supply to execute check and repair. You have a risk of getting electrical shock or injury by accidental sudden move. Person other than Repair technician should not be in charge of dismantling, repairing or remodeling the product. You have a risk of getting injured or electrical shock by a fire or erroneous move.
  • Page 10 SK00-4390-DI-002-11 Ensure to flow the Coolant during operation. Required Coolant volumes hall be; Coolant volume VS1501 : 4~6 L/min VS2401 : 5~7 L/min CAUTION Water pressure:0.5 MPaG (Gauge pressure) Outlet/inlet differential pressure: 0.1MPaG (Gauge pressure) or more Coolant temperature : 5°C ~ 30°C The water included little impurities (ex.
  • Page 11 Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. VS1501 ： 232kg VS2401 ： 271kg WARNING Be sure to use the loading machinery (such as mobile crane) to lift up the Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its transfer.

  • Page 12: Types And Descriptions Of Warning Labels Displayed On This Machine And Displayed Positions

    SK00-4390-DI-002-11 0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions Warning labels are attached on the warning locations in this system. Be sure to check them before starting operation of the Pump. Before use, read through the instruction manual and fully understand its contents.
  • Page 13 SK00-4390-DI-002-11 Fig. 1 Warning Label display position...

  • Page 14: Acceptance And Storage Of The Pump

    SK00-4390-DI-002-11 0.5 Acceptance and Storage of The Pump 0.5.1 Unpacking/Acceptance of The Pump This product is packed with the wooden frame. Please ask the special agency for dismantling it. Advise the dismantling agent to wear leather gloves and use appropriate tools such as pinch bar as they have a risk of cutting the hand by nail or chip.

  • Page 15: Ambient Condition For Storage, Install And Operation

    0.5.2 Transfer You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. VS1501 ： 232kg VS2401 ：271kg WARNING Be sure to use the loading machinery (such as mobile crane) to lift up the Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its transfer.

  • Page 16: Protective Device

    Fix the Pump horizontally so that there is not a wobble. Refer to “3.1 Storage/ Installation”, too. Anti-vibration Model Foot print Bolt Rubber mount Kurashiki Kako., Ltd. VS1501 More than Model： VS2401 “M12 x 40mm” KLB-8030 (Recommended) * NOT included The Pump has four holes.
  • Page 17 SK00-4390-DI-002-11 It is imperative to put the Overload protection device. Otherwise it would cause the motor burn out and/or fire. WARNING...

  • Page 18: Table Of Contents

    SK00-4390-DI-002-11 Table of Contents 0. Before Using This Product .......................... i 0.1 Safety Symbol Marks ........................... ii 0.2 Meanings of Safety Symbol Marks ...................... ii 0.3 Safety Precautions..........................iii 0.4 Types and Descriptions of Warning Labels Displayed on This Machine and Displayed Positions ..x 0.5 Acceptance and Storage of The Pump ....................
  • Page 19 9.2 Duration of guarantee ........................52 9.3 Warrantee scope ..........................52 9.4 Response procedure ........................52 9.5 Disclaimer ............................53 9.6 Others ............................... 53 10. Main Displacement Parts ........................54 Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination SERVICE CENTER Contents-2...
  • Page 20 Fig. 7 Electrical wiring diagram ......................17 Fig. 8 Show the relationship between the suction pressure and pumping speed - MODEL VS1501 . 29 Fig. 9 Show the relationship between the suction pressure and pumping speed - MODEL VS2401 . 29 Fig.

  • Page 21: Table Of Contents

    There is a risk that the Pump might drop or lay down when attempted unreasonable Pump weight operation or machinery setup was not VS1501 : 232kg sufficient. You are strictly restricted from entering beneath the Pump. VS2401 : 271kg...

  • Page 22: Warning Electric Shock

    SK00-4390-DI-002-11 1.1.3 Warning Electric shock Factors Avoidance methods and measures Be sure to cut the electricity to do electrical connection. Never fail take grounding. Never fail to take the earth connection. Ensure to close the cover of motor terminal box and never open it during operation. Getting electrical shock on touching the current-carrying part of the motor.

  • Page 23: Caution High Temperature

    SK00-4390-DI-002-11 1.1.5 Caution High temperature Factors Avoidance methods and measures The Pump gets high temperature during operation. Pump unit :70°C(during unloaded operation) :80°C (when used the Gas ballast) Motor :70°C As the surface temperature is high, you have a risk of getting burnt by accidentally touching it with the hand or the like.

  • Page 24: Chemical Material Safety Data Sheet（Sds

    SK00-4390-DI-002-11 1.2 Chemical Material Safety Data Sheet（SDS） Chemical material used for this Pump; (1) ULVOIL R-72 (Standard) (2) ULVOIL R-42 (For cold district in winter) The Chemical Material Safety Data Sheet introduces the chemical IMPORTANT material potential to use or touch on operating this machine. Please contact our Sales division if you are in need.

  • Page 25: Pump Outline

    SK00-4390-DI-002-11 2. Pump Outline 2.1 Characteristics VS series pumps are Rotary wing type (Goethe type) single stage vacuum pumps designed to apply to such process like vacuum packaging, suction transfer, electronic device, thermal process and so on that use the vacuum. This machine is equipped with functions as described below;...

  • Page 26: Performance Specifications

    *3) The type of rotary pump oil differs depending on vapor pressure, viscosity, etc. The use of a wrong type of oil can lower the pump performance. So use the pump oil recommended ULVAC. recommended type of oil: (1) ULVOIL R-72 (standard oil), (2) ULVOIL R-42 (oil for use in...
  • Page 27 SK00-4390-DI-002-11 Fig. 2 VS1501 Dimensional drawing...
  • Page 28 SK00-4390-DI-002-11 Fig. 3 VS2401 Dimensional drawing...

  • Page 29: Mounting

    SK00-4390-DI-002-11 3. Mounting You are requested to install and operate the product in compliance with the laws and regulations relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country and region you use the product.

  • Page 30: Lubrication

    Do not start the pump with the minimum level oil. CAUTION Ensure to use the vacuum pump oil designated by ULVAC. Operation using oil other than designated shall be out of our scope of guarantee as it might impair the pump performance and shorten the life cycle.

  • Page 31: Water Piping

    SK00-4390-DI-002-11 3.3 Water Piping Take out the R3/8 plug on the Coolant inlet/outlet and put the joint (of nylon tube) for the water piping. (Refer to the “Fig. 4 Lubrication and water piping drawing”.) Be sure to flow the Coolant with the volume indicated on the Table 1 Performance specifications or more.
  • Page 32 SK00-4390-DI-002-11 The machine is designed not to cause any leakage under restricted condition and demonstrated by the Leak test. However, it still has a risk of leaking under any abnormal condition other than specified, for example abnormal water pressure rise. In such a case, the leakage shall remain unstopped unless the supply from the system stops.

  • Page 33: Inlet Port Piping

    Provide main valve, vacuum gauge and leak valve between the vacuum chamber and pump, as shown in Fig. 5. Use the flange for connection between the Pump Inlet and the piping. MODEL Flange at the pipe JIS B 2290:1998 VS1501 Vacuum technology-Flange dimensions; VF80 Attachment book (Reference) VS2401...

  • Page 34: Outlet Port Piping

    Use the flange for connection between the Pump Outlet and the piping. It is recommended to provide an oil mist trap to reduce oil consumption and to trap oil mist. MODEL Flange at the pipe JIS B 2290:1998 VS1501 Vacuum technology-Flange dimensions; VF50 Attachment book (Reference) VS2401 Flange dimensions for maintenance Exhaust piping is classified mainly to following three types;...
  • Page 35 SK00-4390-DI-002-11 Use of the toxic, combustible or combustion susceptible gas other than inactive gas is not allowed as there is a risk of leakage of the gas from the Pump unit if it was exhausted by the vacuum pump. Use of the toxic, combustible or combustion susceptible gas and substance other than inactive gas is not allowed as there is a risk of causing fire or explosion inside the Pump unit if it was exhausted by the vacuum pump.
  • Page 36 SK00-4390-DI-002-11 Fig. 5 Suction/Exhaust piping connection diagram...

  • Page 37: Electrical Connection

    SK00-4390-DI-002-11 3.6 Electrical Connection Conduct the electrical connection referring to the Fig. 6, Fig.7 and Table 3. Without changing motor, it is possible to run the Pumps both with 200V and 400V class utilities by changing wire connection in the motor terminal box because multi voltage motor, for both 200V and 400V classes, is used for this pump.
  • Page 38 SK00-4390-DI-002-11 Use crimping terminals for the connection and tighten screws. Check also screws fixing the connector tighten. Motor rotation direction is clockwise viewed from the motor side. Refer to the arrow mark castled on the Motor flange Be sure also to put a safety circuit such as MCCB(Molded Case Circuit Breaker), MC(Magnetic Contactor) and THR(Thermal Relay) for the electrical connection.
  • Page 39 SK00-4390-DI-002-11 Turn OFF the Power Supply to do the electrical connection. Never try to work on it on keeping the electricity turned ON. A correct wiring work must observe the law and the rule that relates safely. A wrong wiring work might start a fire. The measures such as lockout/tag out should be executed not so as to turn the power switch by mistakes during working.

  • Page 40: Miscellaneous Connection Port

    SK00-4390-DI-002-11 Table. 3 Rated current value of the VS series standard motor 型　　番 VS1501 VS2401 使用モーター 全閉外扇フランジ型3相交流モーター Motor Totally-Enclosed Fan-Cooled Flange Induction Motor 5.5　(4) 7.5　(4) kW　（極数） ※12 端子箱内結線　　　 デルタ(Δ) スター(Ｙ) デルタ(Δ) スター(Ｙ) the connection inside delta star delta star the terminal box 21.0A (200V-50Hz)

  • Page 41: Operation

    ULVAC pump. There is a risk that the pressure inside the rises up as far as the Pump unit and/or Oil level gauge breaks or the Motor gets overloaded.
  • Page 42 SK00-4390-DI-002-11 The Pump oil might deteriorate in a shorter time depending on the use. It is recommended to replace the first Pump oil within ten days after operation start and see how it got dirty to determine the oil replacement cycle.

  • Page 43: Operation Start

    Add the oil if it was around the minimum level. (3) Coolant volume Ensure that the Coolant flows 4~6 L/min for the VS1501 and 5~7 L/min for the VS2401. Check also that there is no leakage of the Coolant.
  • Page 44 SK00-4390-DI-002-11 Ensure to flow the Coolant with the specified volume. Lack of the Coolant might give damage to the Pump unit or evaporate the water remained in the Pump to raise the pressure inside the Cooling system resulting in accidentally jetting out the hot steam. CAUTION Follow the process described below if the rotation at start was not smooth;...

  • Page 45: Operation Stop

    SK00-4390-DI-002-11 4.3 Operation Stop (1) Close the Vacuum valve at the Suction inlet and stop the Pump unit. (2) After the Pump stop, open the Leak valve and return the pressure inside the Pump to the atmospheric pressure. The Vacuum pump gets high temperature (70°C ~ 80°C) during operation. Refrain from touching the Motor and Pump unit until the Pump cools down after having stopped operation.

  • Page 46: Gas Ballast Function

    SK00-4390-DI-002-11 4.4 Gas Ballast Function This product is installed with the Gas ballast function as standard. Connect the Needle valve, pipe and the like with the Gas ballast port (G3/8) subject to the purpose to use the function. It is applicable to breathe in the condensed gas such as the steam and solution vapor.

  • Page 47: The

    SK00-4390-DI-002-11 The guaranteed pressure resistance of this pump is 0.03 MPa (0.3 kg / cm2) (gauge pressure). Operate the supply pressure of the gas ballast gas to be introduced within the following range. WARNING Supply pressure: Atmospheric pressure to 0.03 MPa (0.3 kg / cm2 (gauge pressure)) or less.

  • Page 48: Pump Performance

    (no load operation).” ULVAC measures the value by the Pirani gauge connected to the Pump suction inlet using the specified vacuum pump oil after having completely blocked out the Pump unit from the system.
  • Page 49 Motor current 50Hz Motor current 60Hz 1000 10000 100000 Pressure（Pa） Fig. 8 Show the relationship between the suction pressure and pumping speed - MODEL VS1501 Pumping Speed Type : VS2401 Power : 50/60Hz AC200V 3φ7.5kW Pumping speed 60Hz Oil : ULVOIL R-72...

  • Page 50: Required Motive Energy

    Pump temperature shall rise as it goes through operation. IMPORTANT For VS1501, the motor output may exceed its capacity during operation at above 30kpa. In such case, please refrain from continuous operation or adjust the flow volume, in order to prevent burn out or other defects.

  • Page 51: Maintenance And Check

    SK00-4390-DI-002-11 6. Maintenance and Check 6.1 Maintenance (1) You should check following points at least once per three days while you continue operation. (2) Whether the Vacuum oil pump oil volume is between two level lines or not. (3) Check the machine much more frequently during high overload operation (continuous operation 1kPa or more, repeated exhaust atmospheric pressure –...

  • Page 52: Pump Oil Level Check

    SK00-4390-DI-002-11 6.2.1 Pump Oil Level Check The pump oil level should be between the two level lines (MAX and MIN on the pump case) on the oil level gauge. (Refer to the ” Fig. 4 Lubrication and water piping drawing”.) 6.2.2 Vacuum Pump Oil Check The vacuum pump oil will be gradually deteriorated not only by contamination with sucked gas, but also by temperature rise during pump operation.

  • Page 53: Replace Vacuum Pump Oil

    SDS. CAUTION Ensure to use the vacuum pump oil designated by ULVAC. Operation using oil other than designated shall be out of our scope of guarantee as it might impair the Pump performance and shorten the life cycle.

  • Page 54: Oil Leak Check

    SK00-4390-DI-002-11 6.2.4 Oil Leak Check The Pump system needs repair if occurred any oil leak from the Shaft sealing or Pump unit. Type of the seals and O-rings are listed at the end of this document. Please contact the Service Center close to you for purchase and repair.

  • Page 55: Checking The Oil Mist Trap

    SK00-4390-DI-002-11 (5) Put the new coupling spider in one of the coupling. Meet the ratchet of both couplings and mount the pump unit in the medium case. (6) Put the M12 hexagon head bolt x 4 and spring washer x 4 and plain washer x 4 removed in the item (2) above (Recommended tightening torque: 45N・m).

  • Page 56: Adjusting The Slow Leak Valve

    SK00-4390-DI-002-11 6.2.10 Adjusting The Slow Leak Valve This machine adopts the air introduction method to reduce the noise on achieving the ultimate pressure. If the Slow leak valve was clogged, a high sputtering sound (called “punch noise.”) generated during operation on the ultimate pressure. Adjust the Slow leak valve in such a case.
  • Page 57 Quantity Name VS1501 VS2401 VS1501 VS2401 Exhaust valve vane A Exhaust valve vane － Exhaust valve vane B Exhaust valve For VS1501 For VS2401 gasket Required tools Hexagon wrench M10, M6, M4 Torque wrench M10, M6, M4 (2 ~ 30Nm)
  • Page 58 SK00-4390-DI-002-11 (2) Replacement procedure Operation Note Parts name ① Top cover Take off the top Hexagon socket head cap cover. ⑦ screw M10×25 ⑤ Exhaust valve seat Take off the Hexagon socket head cap exhaust valve seat. ⑨ screw M6×14 ②...
  • Page 59 Set the position of the exhaust valve to the following. After having fixed it, confirm that there are no deviation of the mounting position for the exhaust valve and no interval between the exhaust valve and the exhaust valve seat. VS1501 VS2401...

  • Page 60: Cleaning The Coolant Jacket

    SK00-4390-DI-002-11 6.2.12 Cleaning The Coolant Jacket To clean the Jacket, stop the Pump operation and turn OFF the Power Supply. (1) Check whether there is no dust such as water stain pooled in the Jacket that is a water passage inside the cylinder. (2) Take off the Jacket cover at the Cylinder side to clean the inside.
  • Page 61 P. 32.) 4) Be cautious so as not to drop bolt or the like inside the Cylinder (2) Required tools and parts Specifications Name VS1501 VS2401 Hexagon wrench Torque wrench M10 (25 ~ 30Nm) (3) Cleaning the Oil tank ▪...
  • Page 62 SK00-4390-DI-002-11 (4) Cleaning for cylinder exhaust valve Work ①： Remove the bolts (M10x7pcs) mounting the upper cover. It becomes easy upon mounting the removed 2 pieces of bolts on the tap hole. Work ②： Upon removing the upper cover, two openings can be seen in the cylinder.

  • Page 63: Checkup After Storage For A Long Period

    SK00-4390-DI-002-11 6.3 Checkup after storage for a long period Long term storage of the Vacuum pump without operation might possibly cause trouble in operation caused by rust. If you kept the Pump long time without operating it, ask a closest Service Center for the check. 6.4 Overhaul If there found remarkable Pump contamination or performance deterioration due to the operation condition, you are recommended to conduct regular overhaul regardless of the check items...

  • Page 64: Trouble Check List

    SK00-4390-DI-002-11 6.5 Trouble Check List Table. 7 Trouble check list Trouble Causes Processing method Reference The Pump does not (1) Motor connection is wrong. (1) Check the connection. run. (2) Safety circuit such as the (2) Make the Safety circuit Electromagnetic breaker is conform to the Motor not correctly set.
  • Page 65 SK00-4390-DI-002-11 Trouble Causes Processing method Reference (4) The oil is not circulating. (4) Overhaul. 6.2.10 Abnormal noise a) Oil pit of the Cover or a) Clean the oil pit. sounds. the like is clogged. b) Oil distributor valve b) Check and repair the Oil has a trouble.
  • Page 66 (8) Use a Leak detector or the pipe connecting with the like to find out the leak Pump. position and stop it. (9) Not using the ULVAC (9) Conduct the overhaul of the genuine oil. Pump and replace the oil 6.2.3...
  • Page 67 SK00-4390-DI-002-11 Trouble Causes Processing method Reference Pressure does not (10) The oil is not (10) Overhaul. come down. circulating. a) Oil pit of the Cover a) Clean the oil pit. or the like is clogged. b) Oil distributor valve b) Check and repair the Oil has a trouble.
  • Page 68 SK00-4390-DI-002-11 Trouble Causes Processing method Reference Pump surface (5) The oil is not circulating. (5) Overhaul temperature is a) Oil pit of the Cover or a) Clean the oil pit. abnormally high. the like is clogged. Room b) Oil disturb b) Check and repair the Oil temperature+60°C distributor valve.
  • Page 69 SK00-4390-DI-002-11 Trouble Causes Processing method Reference Abnormal Motor (1) Foreign substance (1) Overhaul, removal of foreign current value entered inside the substance inside the Pump. Pump impaired the Motor rotation. (2) Abnormal sliding of the (2) Overhaul, check and repair Rotor and/or vane.

  • Page 70: Removal / Transport

    You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer this product. VS1501 : 232kg VS2401 : 271kg Be sure to use the loading machinery (such as mobile crane) to lift up the...

  • Page 71: Disposal

    SK00-4390-DI-002-11 8. Disposal Make sure to keep in compliance with the laws and regulations established by the local governments to dispose the Vacuum pump. You should ask the dedicated disposal agency for the disposal particularly if the Pump has exhausted any toxic gas. Note that you are requested to bear the cost and charges relating to the disposal.

  • Page 72: Warranty Clauses

    9.4 Response procedure (1) Domestic business in Japan: ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the local ULVAC representatives for repair. If field service is required, Buyer shall ask ULVAC, Inc. or the local ULVAC representatives.

  • Page 73: Disclaimer

    (7) Secondary damage by defect of this Product defect. (8) Secondary damage to Buyer by the reason that third party sued ULVAC for patent infringement. (9) ULVAC engineer decided the reason of failure was improper use which does not conform to the use condition of this Product.

  • Page 74: Main Displacement Parts

    SK00-4390-DI-002-11 10. Main Displacement Parts Table. 8 Main displacement parts list (VS1501/VS2401 Common) Section Name Standard / Dimensions Materials Q’ty Oil seal TCV507212 Fluorine rubber Front cover Bearing NU208EW Oil seal TCV507212 Fluorine rubber Rear cover Bearing NU208EW Oil seal...
  • Page 75 This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed.
  • Page 76 ULVAC service center or sales office prior to shipment. Please consult with your closest local ULVAC service center or sales office if our components are used with toxic gases or contaminated with reactive products or substances produced by reaction.
  • Page 77 . co . jp 東京都港区港南２-３-１３ TEL:03-5769-5511 アルバック販売株式会社 大阪支店 〒532-0003 大阪府大阪市淀川区宮原３-３-３１ TEL:06-6397-2286 ULVAC ,Inc. http://www.ulvac.co.jp/en/ Service Centers http://www.ulvac.co.jp/en/support/service-center/ Sales Offices http://www.ulvac.co.jp/en/support/sales-offices/ ULVAC, Inc. Components Division 2500 Hagisono, Chigasaki, Kanagawa, 253-8543, Japan TEL: +81-467-89-2261 ulvac . co . jp / en rev5.1...

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Vs2401

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