Technical Information
Replacing the Pirani element
If it is severely contaminated or defective.
NOTE
Slide a new FPM seal (13a) over the Pirani element (13) and insert it into the
corresponding groove.
Mount the Pirani element.
Cleaning FRG-700, Replacing Parts
DANGER: cleaning agents.
WARNING
Cleaning agents can be detrimental to health and environment.
Adhere to the relevant regulations and take the necessary precautions when
handling cleaning agents and disposing of them. Consider possible
reactions with the product materials.
We recommend replacing the Pirani element when cleaning the gauge.
NOTE
Tools / material required
Allen wrench AF 1.5
Allen wrench AF 3
Open-end wrench 7.0 mm
Pliers for circlip
Polishing cloth (400 grain) or Scotch-Brite
Tweezers
Cleaning alcohol
Mounting tool for ignition aid
Ignition aid
Pirani element (13) incl. FPM seal (13a)
FPM seal (11) for anode feedthrough.
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Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual