Disassembling Frg-702 - Agilent Technologies FRG-700 User Manual

Technical Information

Disassembling FRG-702

Figure 12
1 Remove the gauge from the vacuum system.
2 Unfasten the hexagon socket set screw (1) on the electronics unit (2).
3 Remove the electronics unit without twisting it.
The cover of the electronics unit cannot be removed.
NOTE
4 Unfasten the hexagon head screw (3) on the magnet unit (4) and remove the
magnet unit.
The magnetic force and the tendency to tilt make it more difficult to separate the
NOTE
magnet unit and the measuring chamber (7).
5 Remove the circlip (5) and the polarity insert (6) from the measuring chamber.
6 Unfasten the hexagon socket set screw (9c) and remove the insulator (9b)
without twisting it.
7 Remove the four hexagon socket screws (8) incl. lock washers (8a) on the back
of the measuring chamber.
8 Carefully remove the following parts in this order (without exerting stress on the
Pirani element (13)): pressure piece (9), anode extension piece (9a), complete
anode (10), metal seal (11) incl. centering ring (12).
9 Unfasten the screw fitting (13a) of the Pirani element and remove Pirani
element together with the copper seal (13b).
The parts can now be cleaned or replaced individually.
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 41