Deinstallation - Agilent Technologies FRG-700 User Manual

Technical Information

Deinstallation

DANGER: contaminated parts
WARNING
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions when
handling contaminated parts.
Vacuum component
CAUTION
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure
cleanliness and prevent damages.
Dirt sensitive area
CAUTION
Touching the product or parts thereof with bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean tools when working in this area.
Procedure
1 Vent the vacuum system.
2 Put the gauge out off operation and unplug the sensor cable.
3 Remove the gauge from the vacuum system and install the protective lid.
When deinstalling the CF flange connection, it may be advantageous to temporarily
NOTE
remove the magnet unit.
Figure 10
34 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual