Agilent Technologies FRG-700 Short Operating Instructions
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Agilent Technologies FRG-700 Short Operating Instructions

Inverted magnetron pirani gauge
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  • Page 3 This page is intentionally left blank...

  • Page 4: Table Of Contents

    Contents Product Identification Validity Intended Use Functional Principle Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data Installation 3.1 Vacuum Connection 3.2 Power Connection Operation 4.1 Gas Type Dependence 4.2 Ignition Delay 4.3 Adjusting the Gauge Deinstallation Maintenance, Troubleshooting...

  • Page 5: Product Identification

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Product Identification In all communications with Agilent, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. Agilent Technologies Model: Made in Liechtenstein...

  • Page 6: Intended Use

    We reserve the right to make technical changes without prior notice. All dimensions in mm. Intended Use The Inverted Magnetron Pirani Gauges FRG-700 and FRG-702 have been designed for vacuum measurement of gases in the … 1000 mbar. pressure range of 5×10 They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g.

  • Page 7: Safety

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

  • Page 8: General Safety Instructions

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 General Safety Instructions  Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the product.

  • Page 9: Liability And Warranty

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Liability and Warranty Agilent assumes no liability and the warranty becomes null and void if the end-user or third parties  disregard the information in this document  use the product in a non-conforming manner ...

  • Page 10: Technical Data

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Technical Data … 1000 mbar Measuring range (air, N 5×10  Accuracy ±30% (in the range … 100 mbar) 1×10  Repeatability ±5% (in the range … 100 mbar) 1×10 Output signal (measuring signal) 0 …...
  • Page 11 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Supply DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV). The connection to the gauge has to be fused 15 …...
  • Page 12 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Materials on the vacuum side Vacuum connection stainless steel Measurement chamber stainless steel Feedthrough isolation ceramic Internal seal FRG-700 FPM 75 FRG-702 Ag, Cu, soft solder (Sn, Ag) Anode Ignition aid stainless steel Pirani measurement tube...
  • Page 13 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Dimensions [mm] ø 63.5 ø 63.5 DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-F...
  • Page 14 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Weight 700 g 730 g FRG700KF25 FRG702KF25 980 g 750 g FRG700CF35 FRG702KF40 1010 g FRG702CF35 Measuring Signal vs. Pressure Pressure p 1E+04 p = 10 1.667U-d mbar 1E+02 torr 1E+00 1E–02 1E–04 1E–06 1E–08...
  • Page 15 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Gas Type Dependence p (mbar) He Ne Indication range Freon 12 >10 mbar) –1 Water vapor –2 –3 –2 –1 (mbar)
  • Page 16 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 p (mbar) –1 Indication range –2 ... 10 mbar –3 –4 –5 –6 –4 (mbar) In the range below 10 mbar, the pressure indication is linear. For gases other than air, the pressure can be determined by means of a simple conversion formula: = K ×...

  • Page 17: Installation

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Installation Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.
  • Page 18 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to...
  • Page 19 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 WARNING WARNING: electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the pro- duct out of operation and remove the electronics unit.
  • Page 20 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 When making a CF flange connection, it can be ad- vantageous to temporarily remove the electronics and the magnet unit. Hex. socket AF 1.5 AF 7 Protective lid Keep the protective lid.
  • Page 21 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Remove the protective lid and connect the product to the vacuum system. Seal with centering ring Protective lid Clamp Seal with centering ring and filter Keep the protective lid.

  • Page 22: Power Connection

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Power Connection Make sure the vacuum connection is properly made ( "Vacuum Connection").  If no sensor cable is available, make one according to the following diagram. Signal – 10 k Ident – Electrical connection Supply ( 15 …...

  • Page 23: Operation 233

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Operation When the supply voltage is applied, the measuring signal is available between pins 3 and 5. Over the whole measurement range, the measuring signal is output as a logarithm of the pressure (measuring signal vs. pressure  "Technical Data").

  • Page 24: Adjusting The Gauge 244

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Adjusting the Gauge The gauge is factory-calibrated. If used under different climatic conditions, through extreme temperatures, aging or contamina- tion, and after exchanging the sensor, the characteristic curve can be offset and readjustment may become necessary.
  • Page 25 Inverted Magnetron Pirani Gauge FRG-700 FRG-702  While depressing the tactile switch with a cylindrical pin  (ø 3 mm), adjust the <HV> potentiometer by means of a 1.5 mm screwdriver … … to 4.20 V … to 5×10 mbar...
  • Page 26 Inverted Magnetron Pirani Gauge FRG-700 FRG-702  Using the 1.5 mm screwdriver, adjust the <ATM> potentiometer … … to 8.60 V … to 1×10 mbar  Turn the nameplate back to its original position (it catches).

  • Page 27: Deinstallation 277

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

  • Page 28: Maintenance, Troubleshooting 288

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702  Put the gauge out of operation and unplug the sensor cable.  Remove the gauge from the vacuum system and place the protective lid. When deinstalling a CF flange connection, it can be ad- vantageous to temporarily remove the electronics and the magnet unit (...

  • Page 29: Returning The Product 299

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Returning the Product WARNING WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to Agilent should preferably be free of harmful substances. Adhere to the for-...

  • Page 30: Disposal

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

  • Page 31: Literature

    Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Literature  [1] www.agilent.com Operating Manual Inverted Magnetron Pirani Gauge FRG-700, FRG 702 tqna74e1 Agilent Technologies, Lexington, MA 02421, USA  www.agilent.com Operating Manual AGC-100 Vacuum Gauge Controller tqnb15e1 Agilent Technologies, Lexington, MA 02421, USA...
  • Page 32 Inverted Magnetron Pirani Gauge FRG-700 FRG-702 Notes...
  • Page 36 t q ma 7 4 e 1...

This manual is also suitable for:

Frg-702

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