Agilent Technologies FRG-700 User Manual page 21

Technical Information
A: Measuring Signal vs. Pressure
Conversion formulae
where:
Conversion curves
Conversion table
Figure 3 Measuring Signal vs. Pressure
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
p
[mbar]
[Torr]
[Pa]
p pressure
U measuring signal
c, d constant (pressure
unit dependent)
Meas. signal U [V]
<0.5
0.5 ... 1.82
1.82
2.0
2.6
3.2
3.8
4.4
5.0
5.6
6.2
6.8
7.4
8.0
8.6
8.6 ... 9.5
9.5 ... 10.5
1.667U-d
p = 10
U
[V]
[V]
[V]
valid in the range
Pressure p [mbar]
5.0×10 -9
1.0×10 -8
-7
1.0×10
1.0×10 -6
-5
1.0×10
1.0×10 -4
1.0×10 -3
-2
1.0×10
0.1
1.0
10
100
1000
Sensor error (Pirani defective)
⇔ U = c + 0.6log
c
6.8
6.875
5.6
5×10 -9 mbar < p <1000 mbar
-9
3.8×10 Torr < p <750 Torr
5×10 -7 Pa < p <1×10
Pressure p [Torr] Pressure p [Pa]
Sensor error
Underrange
3.8×10 -9
7.5×10 -9
-8
7.5×10
7.5×10 -7
-6
7.5×10
7.5×10 -5
7.5×10 -4
-3
7.5×10
7.5×10 -4
0.75
7.5
75
750
Overrange
p
10
d
11.33
11.46
9.333
5 pa
5.0×10 -7
1.0×10 -6
-5
1.0×10
1.0×10 -4
-3
1.0×10
1.0×10 -2
0.1
1.0
10
100
1000
1.0×10 4
5
1.0×10
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