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Agilent Technologies FRG-700 User Manual

Inverted magnetron pirani gauge
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Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702
User Manual

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Summary of Contents for Agilent Technologies FRG-700

  • Page 1 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 2 (Technical Data) and 12.212 (Computer Software) and, for the Department of Defense, DFARS 252.227-7015 (Technical Data - Commercial Items) and DFARS 227.7202-3 (Rights in Commercial Computer Software or Computer Software Documentation). Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 3: Table Of Contents

    Technical Specifications FRG-700 and FRG-702 Outline Installation Vacuum Connection Removing the Magnet Unit (only for Gauges with CF Flanges) Electrical Connection Use With an Agilent Controller Use With Another Control Device Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 4 Adjusting the Gauge Deinstallation Cleaning FRG-700 Replacing the Pirani element Cleaning FRG-700, Replacing Parts Disassembling FRG-700 Reassembling FRG-700 Cleaning FRG-702 Cleaning FRG-702, Replacing Parts Disassembling FRG-702 Reassembling FRG-702 Troubleshooting Spare Parts Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 5: Instructions For Use

    Instructions for Use About this manual Validity Definitions and terminology Definition of Caution, Warning and Note Warning Symbols Safety Proper use Improper use Safety guideline for FRG-700 and FRG-702 Disposal Service Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 6: About This Manual

    About this manual Validity This manual lists the instructions for the users of the FRG-700 and FRG-702, with particular reference to the notions relating to safety, operation and first level maintenance, limited to maintenance operations for which the user is responsible.

  • Page 7: Definitions And Terminology

    WARNING practice which, if not performed correctly, could result in serious personal injury. Notes are intended to call attention to important information and provide more NOTE detail regarding specific steps. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 8: Warning Symbols

    Warning Symbols The following is a list of symbols that appear in conjunction with warnings on the FRG-700 and FRG-702. The hazard they describe is also shown. A triangular symbol indicates a warning. The meanings of the symbols that may...
  • Page 9 The following symbols appear on the instrument for your information. CE certification Waste Electrical and Electronic Equipment Generic Hazard No access to pacemaker carriers Magnetic Field ETL (Electrical Testing Laboratories) Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 10: Safety

    Agilent Technologies declines all responsibility for damage to the product or for the physical safety of the operator or third parties deriving from the non-observance of the safety rules indicated in the technical documentation.

  • Page 11: Improper Use

    Instructions for Use Improper use Agilent Technologies declines all responsibility, deriving from the improper use of the FRG-700 AND FRG-702. Agilent assumes no liability and the warranty becomes null and void if the end-user or third parties: disregard the information in this document ...

  • Page 12: Safety Guideline For Frg-700 And Frg-702

    Dirt sensitive area CAUTION Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 13: Disposal

    Other components Such components must be separated according to their materials and recycled. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 14: Service

    Completion of the “Request for Return” form is required to return your product to Agilent for service (provided at the end of this manual). Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 15: Technical Information

    Adjusting the Gauge Deinstallation Cleaning FRG-700 Replacing the Pirani element Cleaning FRG-700, Replacing Parts Disassembling FRG-700 Reassembling FRG-700 Cleaning FRG-702 Cleaning FRG-702, Replacing Parts Disassembling FRG-702 Reassembling FRG-702 Troubleshooting Spare Parts Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 16: Product Description

    Technical Information Product Description The Inverted Magnetron Pirani Gauges FRG-700 and FRG-702 have been designed for vacuum measurement in the pressure range of 5×10 ... 1000 mbar. They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g.

  • Page 17: Technical Specifications

    Low = 0 V Pirani-only mode p < 10 mbar High = 15 ... 30 VDC Cold cathode ignited Combined Pirani / cold cathode mode Lamp High voltage on (LED on) Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 18 Internal seals FRG-700 FPM 75 FRG-702 Ag, Cu, soft solder (Sn, Ag) Anode Ignition aid stainless steel Pirani measuring tube Ni, Au Pirani filament Agilent controller fulfill these requirements. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 19 –40 °C ... +65 °C ≤ Relative humidity 80% at temperatures up to +31 °C decreasing to 50% at +40 °C indoors only altitude up to 2000 m Degree of protection IP 40 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 20: Frg-700 And Frg-702 Outline

    Dimensions [mm] FRG-700 FRG-702 Weight FRG700KF25 700 g FRG702KF25 730 g ≈ ≈ FRG700KF25 980 g FRG702KF40 750 g ≈ ≈ FRG702CF35 1010 g ≈ Figure 2 FRG-700 and FRG-702 Outline Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 21 1.0×10 7.5×10 1.0×10 1.0×10 7.5×10 1.0×10 7.5×10 7.5×10 0.75 1000 1.0×10 1000 1.0×10 8.6 … 9.5 Overrange 9.5 … 10.5 Sensor error (Pirani defective) Figure 3 Measuring Signal vs. Pressure Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 22 B: Gas Type Dependence Indication range above Pressure indicated (gauge calibrated for air) mbar Indication range above Pressure indicated (gauge calibrated for air) ... 0.1 mbar Figure 4 Gas Type Dependence Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 23 These conversion factors are average values. A mixture of gases and vapors is often involved. In this case, accurate NOTE determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 24: Installation

    Caution: dirt sensitive area. CAUTION Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 25 <HV> and <ATM> trimmer potentiometers can be accessed with a screw driver. When making a CF flange connection, it may be advantageous to temporarily NOTE remove the electronics and the magnet unit. Figure 5 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 26 Technical Information Remove the protective lid and connect the product to the vacuum system. Figure 6 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 27: Removing The Magnet Unit (Only For Gauges With Cf Flanges)

    Push the electronics unit up to the mechanical stop and lock it with the hexagon socket set screw (1). Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 28: Electrical Connection

    Figure 8 Use With Another Control Device Make a sensor cable according to the diagram. 8 poles FCC-68 Figure 9 Connect the sensor cable to the gauge and the controller. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 29: Operation

    High = 15 ... 30 VDC Combined Pirani / cold cathode mode As long as the cold cathode measuring circuit has not ignited, the measuring value of the Pirani is output as measuring signal. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 30 Once flanged on, permanently leave the gauge in the operating mode irrespective of NOTE the pressure range. Like this, the ignition delay of the cold cathode measuring circuit is always negligible (<1 s), and thermal stabilizing effects are minimized. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 31 Special precautions are required for vapors deposited under plasma (of the cold cathode measuring system). It may even be necessary to temporarily switch of the gauge while such vapors occur. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 32: Adjusting The Gauge

    Evacuate the vacuum system to p << 10 mbar, and then wait 10 minutes. Turn the nameplate counter-clockwise until the mechanical stop is reached. While depressing the pin with the cylindrical pin, adjust the <HV> potentiometer Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 33 Vent the gauge with air or nitrogen to atmospheric pressure, and wait at least 10 minutes. Turn the nameplate clockwise until the mechanical stop is reached. Turn the nameplate back to its original position (it catches). Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 34: Deinstallation

    Remove the gauge from the vacuum system and install the protective lid. When deinstalling the CF flange connection, it may be advantageous to temporarily NOTE remove the magnet unit. Figure 10 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 35: Cleaning Frg-700

    Dry the tube (e.g. with a blow dryer <150 °C). Slide a new FPM seal over the Pirani element and insert it into the corresponding groove. Reinstall the Pirani element. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 36: Replacing The Pirani Element

     Tweezers  Cleaning alcohol  Mounting tool for ignition aid  Ignition aid  Pirani element (13) incl. FPM seal (13a)  FPM seal (11) for anode feedthrough.  Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 37: Disassembling Frg-700

    Pirani element (13)): pressure piece (9), complete anode (10), FPM seal (11) incl. support ring (12), Pirani element (13) incl. FPM seal (13a). The parts can now be cleaned or replaced individually. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 38: Reassembling Frg-700

    Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the product out of operation and remove the electronics unit. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 39: Cleaning Frg-702

    Replacing the Pirani element Slide the screw fitting (13a) and the copper seal (13b) over the Pirani element (13). Mount the Pirani element. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 40: Cleaning Frg-702, Replacing Parts

     Cleaning alcohol  Mounting tool for ignition aid  Ignition aid  Metal seal (11) for anode feedthrough  Pirani element (13) incl. set of seals (13a, 13b).  Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 41: Disassembling Frg-702

    (10), metal seal (11) incl. centering ring (12). Unfasten the screw fitting (13a) of the Pirani element and remove Pirani element together with the copper seal (13b). The parts can now be cleaned or replaced individually. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 42: Reassembling Frg-702

    11 Place the circlip (5) snugly fitting on the polarity insert. Visually check that the anode pin is centered over the middle hole of the polarity NOTE insert (max. eccentricity = 0.5 mm). Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 43 15 Push the electronics unit up to the mechanical stop and lock it with the hexagon socket set screw (1). 16 Adjust the gauge. Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 44: Troubleshooting

    Convert with the corresponding formula. Severe outgassing in the cold cathode Clean the measuring chamber. measuring chamber. Measuring signal unstable. Gauge contaminated. Clean the gauge (FRG-700 page 36) (FRG-702 page 41). Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...

  • Page 45: Spare Parts

    Set of ignition aids, comprising: FRG700IGN 10× ignition aid Mounting tool for ignition aid FRG700IGNT Measuring system DN 25 ISO-KF flange FRG700MEAS25 DN 40 CF-F flange FRG700MEAS40 FRG-700 Figure 13 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 46 Set of ignition aids, comprising: FRG700IGN 10× ignition aid Mounting tool for ignition aid FRG700IGNT Measuring system DN 25 ISO-KF flange FRG702MEAS25 DN 40 CF-F flange FRG702MEAS40 FRG-702 Figure 14 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual...
  • Page 47 Please follow these instructions whenever one of our products needs to be returned. Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to include the completed Health and Safety declaration Section. No work can be started on your unit until we receive a completed copy of this form.
  • Page 48 Terms and conditions TERMS AND CONDITIONS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division – Products and Services Terms of Sale. Unless otherwise pre-negotiated, customer is responsible for the freight charges for the returning product. Return shipments must comply with all applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.
  • Page 49 Vacuum Products Division Request for Return Form Customer information Company : Contact Name: Address: Tel: Fax: Email: Equipment Product description Agilent PartNo Agilent Serial No Original Purchasing Reference Failure description Type of process (for which the equipment was used) Type of return Non Billable Billable New PO # (hard copy must be submitted with this form): ______________________________________...
  • Page 50 Request for Return Form United States India (Sales) India (Service) Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies India Pvt. Ltd. 121 Hartwell Avenue Unit Nos 110- 116, & Part of 101 & 109 C-Block, RMZ Centennial Plot Number- 8A, 8B, 8C,...
  • Page 51 The manual describes the following: Instruction for Use  Technical information  This information is subject to change without notice. © Agilent Technologies, Inc. 2024 Agilent Technologies Italia S.p.A. Vacuum Products Division *TQMa74e1* Edition 01/24 Via F.lli Varian, 54 *TQMa74e1* Issue A.00...

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Frg-702

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