Disassembling Frg-700 - Agilent Technologies FRG-700 User Manual

Technical Information

Disassembling FRG-700

Figure 11
1 Remove the gauge from the vacuum system.
2 Unfasten the hexagon socket set screw (1) on the electronics unit (2).
3 Remove the electronics unit without twisting it.
The cover of the electronics unit cannot be removed.
NOTE
4 Unfasten the hexagon head screw (3) on the magnet unit (4) and remove the
magnet unit.
The magnetic force and the tendency to tilt make it difficult to separate the magnet
NOTE
unit and the measuring chamber (7).
5 Remove the circlip (5) and the polarity insert (6) from the measuring chamber.
6 Remove the three hexagon socket screws (8) incl. lock washers (8a) on the
back of the measuring chamber.
7 Carefully remove the following parts in this order (without exerting stress on the
Pirani element (13)): pressure piece (9), complete anode (10), FPM seal (11)
incl. support ring (12), Pirani element (13) incl. FPM seal (13a).
The parts can now be cleaned or replaced individually.
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 37