Agilent Technologies FRG-700 User Manual page 23

Inverted magnetron pirani gauge
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Technical Information
In the range below 10
air, the pressure can be determined by means of a simple conversion formula:
These conversion factors are average values.
A mixture of gases and vapors is often involved. In this case, accurate
NOTE
determination is only possible with a partial pressure measurement instrument,
e.g. a quadrupole mass spectrometer.
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
-5
mbar, the pressure indication is linear. For gases other than
p
= K × pressure indicated
eff
where
gas type
air (O
Xe
Kr
Ar
H
Ne
He
K
, CO, N
)
1.0
2
2
0.4
0.5
0.8
2.4
2
4.1
5.9
23

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Frg-702

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