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Fig. 7:
1 Multifunction connection X3
2 Adapter TCS
3 Accessory connection B1
4 Connection RS-485
Connect pre-configured accessories
► Observe the installation instructions in the operating instructions for the relevant accessory.
► Note the existing configuration of existing connections and control lines.
► Connect only matching accessory devices to the electronic drive unit.
Using additional accessories
► Observe the installation instructions in the operating instructions for the relevant accessory.
► Note the existing configuration of existing connections and control lines.
► Use a Pfeiffer Vacuum control unit for the configuration if needed.
5.6 Connecting the electrical supply
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
► Install a mains disconnection device according to SEMI-S2.
► Install a circuit breaker with an interruption rating of at least 10,000 A.
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
► Do not carry out your own conversions or modifications on the unit.
► Ensure the integration into an Emergency Off safety circuit.
5.6.1 Earthing the turbopump
Pfeiffer Vacuum recommends connecting a suitable grounding cable to discharge applicative interfer-
ences.
1
X3
Example of accessory connection via adapter TCS 12
WARNING
WARNING
2
3
4
7
6
5
Digital output DO2
6
Digital output DO1
7
Accessory connection A1
5
Installation
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